Antireflection coating for ultraviolet light
First Claim
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1. An optical component with a low reflectance for ultraviolet light in a wavelength range between approx. 180 nm and approx. 370 nm for high angles of incidence, comprising:
- a substrate having at least one surface;
a multilayer system of at least six stacked layers arranged to the at least one surface of the substrate to provide a reduction of reflection, each of the layers comprising a high refractive or a low refractive dielectric material;
wherein;
only one high refractive material and only one low refractive material are used;
the low refractive material consists substantially of magnesium fluoride and the high refractive material consists substantially of aluminum oxide;
a first layer contacting the substrate consists substantially of aluminum oxide;
a second layer contacting the first layer has an optical thickness equal to or less than (0.33λ
), where λ
is the working wavelength in the ultraviolet wavelength range; and
none of the layers has a geometrical layer thickness of more than about (0.5λ
).
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Abstract
An optical component with a low reflectance for ultraviolet light in a wavelength range between approx. 180 nm and approx. 370 nm, in particular approx. 248 nm, and for a high angle of incidence up to at least approx. 40° has a substrate and a multilayer antireflection system arranged on at least one surface of said substrate to provide reflection reduction. The multilayer system distinguishes itself in that the layer adjacent to the substrate does not consist of magnesium fluoride and that none of the layers has a thickness of more than half of the working wavelength. In particular, the layer thicknesses of the low refractive materials should not exceed ⅓ the working wavelength. By adhering to these boundary conditions, antireflective coatings can be produced that provide both permanent laser resistance as well as a high resistance against inner layer stress and thermal stress.
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Citations
47 Claims
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1. An optical component with a low reflectance for ultraviolet light in a wavelength range between approx. 180 nm and approx. 370 nm for high angles of incidence, comprising:
-
a substrate having at least one surface;
a multilayer system of at least six stacked layers arranged to the at least one surface of the substrate to provide a reduction of reflection, each of the layers comprising a high refractive or a low refractive dielectric material;
wherein;
only one high refractive material and only one low refractive material are used;
the low refractive material consists substantially of magnesium fluoride and the high refractive material consists substantially of aluminum oxide;
a first layer contacting the substrate consists substantially of aluminum oxide;
a second layer contacting the first layer has an optical thickness equal to or less than (0.33λ
), where λ
is the working wavelength in the ultraviolet wavelength range; and
none of the layers has a geometrical layer thickness of more than about (0.5λ
).- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. An optical component with a low reflectance for ultraviolet light in a wavelength range between approx. 180 nm and approx. 370 nm for high angles of incidence, comprising:
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a substrate having at least one surface;
a multilayer system of multiple stacked layers arranged to the at least one surface of the substrate to provide a reduction of reflection, each of the layers comprising a high refractive or a low refractive dielectric material, a first layer contacting the substrate consisting substantially of a high refractive metal oxide;
a second layer contacting the first layer having an optical thickness equal to or less than (0.1λ
), where λ
is the working wavelength in the ultraviolet wavelength range;
a third layer contacting the second layer having an optical thickness equal to or less than (0.12λ
); and
none of the layers having a geometric layer thickness of more than about (0.35λ
).- View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
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46. An optical component with a low reflectance for ultraviolet light in a wavelength range between approx. 180 nm and approx. 370 nm for high angles of incidence, comprising:
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a substrate having at least one surface;
a multilayer system of at least six stacked layers arranged to the at least one surface of the substrate to provide a reduction of reflection;
wherein;
a first layer contacting the substrate consists substantially of aluminum oxide and has an optical thickness equal to or less than about (0.5λ
);
a second layer contacting the first layer consists substantially of magnesium fluoride and has an optical thickness equal to or less than about (0.33λ
), where λ
is the working wavelength in the ultraviolet wavelength range; and
remaining layers alternate between consisting substantially of aluminum oxide and magnesium fluoride and have respective optical thicknesses equal to or less than about (0.5λ
).- View Dependent Claims (47)
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Specification
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Current AssigneeCarl Zeiss AG (Carl-Zeiss-Stiftung)
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Original AssigneeCarl Zeiss AG (Carl-Zeiss-Stiftung)
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InventorsHeller, Matthias, Paul, Hans-Jochen
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Primary Examiner(s)Dunn, Drew A.
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Assistant Examiner(s)Pritchett, Joshua L
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Application NumberUS10/036,536Publication NumberTime in Patent Office1,058 DaysField of Search359/350, 359/359, 359/580, 359/581, 359/586, 359/587, 359/588, 359/589US Class Current359/359CPC Class CodesG02B 1/115 Multilayers
