Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge
First Claim
1. An optical switch device comprising:
- a substrate;
a flexible membrane attached at least one end to a surface of the substrate in proximity to an optical port portion of the substrate, the flexible membrane being configured such that, in a first state, the flexible membrane is disposed over the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the flexible membrane, and, in a second state, the flexible membrane is disposed to expose the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the optical port portion of the substrate; and
a plurality of dimples formed on the flexible membrane such that when the flexible membrane is in the first state, the flexible membrane contacts the substrate at the dimples;
said dimples are fabricated with an interruption or hole in the conductor or the electrode in either said flexible membrane or said substrate or both in the area of and immediately surrounding said dimples.
3 Assignments
0 Petitions
Accused Products
Abstract
An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.
12 Citations
23 Claims
-
1. An optical switch device comprising:
-
a substrate;
a flexible membrane attached at least one end to a surface of the substrate in proximity to an optical port portion of the substrate, the flexible membrane being configured such that, in a first state, the flexible membrane is disposed over the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the flexible membrane, and, in a second state, the flexible membrane is disposed to expose the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the optical port portion of the substrate; and
a plurality of dimples formed on the flexible membrane such that when the flexible membrane is in the first state, the flexible membrane contacts the substrate at the dimples;
said dimples are fabricated with an interruption or hole in the conductor or the electrode in either said flexible membrane or said substrate or both in the area of and immediately surrounding said dimples. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. An optical switch device comprising:
-
a substrate;
a flexible membrane attached at least one end to a surface of the substrate in proximity to an optical port portion of the substrate, the flexible membrane being configured such that, in a first state, the flexible membrane is uncoiled over the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the flexible membrane, and, in a second state, the flexible membrane is coiled away from the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the optical port portion of the substrate; and
a raised annular rim member formed on the substrate around the optical port portion of the substrate such that, when the flexible membrane is in the first state, a bottom surface of the flexible membrane contacts the raised annular rim member;
said flexible membrane being tapered such that the attachment edge of the flexible membrane is measured at the portion of the flexible membrane that covers the optical port portion of the substrate when the flexible membrane is in the first state. - View Dependent Claims (8, 9)
-
-
10. An optical switch device comprising:
-
a substrate; and
a flexible membrane attached at at least one end to a surface of the substrate in proximity to an optical port region of the substrate, the flexible membrane being configured such that, in a first state, the flexible membrane is disposed over the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the flexible membrane, and, in a second state, the flexible membrane is disposed to expose the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the optical port portion of the substrate;
whereinthe flexible member is attached to the substrate at an attachment edge of the flexible member extending along a width dimension of the flexible member, the flexible member being tapered such that the attachment edge of the flexible member is shorter than the width of the flexible member measured at the portion of the flexible member that covers the optical port portion of the substrate when the flexible member is in the first state. - View Dependent Claims (11, 12)
-
-
13. An optical switching method comprising:
-
a substrate;
a flexible membrane attached at least one end to a surface of the substrate in proximity to an optical port portion of the substrate, the flexible membrane being configured such that, in a first state, the flexible membrane is disposed over the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the flexible membrane, and, in a second state, the flexible membrane is disposed to expose the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the optical port portion of the substrate; and
a plurality of dimples formed on the flexible membrane such that when the flexible membrane is in the first state, the flexible membrane contacts the substrate at the dimples;
said dimples are fabricated with an interruption or hole in the conductor or the electrode in either said flexible membrane or said substrate or both in the area of and immediately surrounding said dimples. - View Dependent Claims (14, 15, 16, 17)
-
-
18. An optical switching method comprising:
-
a substrate;
a flexible membrane attached at least one end to a surface of the substrate in proximity to an optical port portion of the substrate, the flexible membrane being configured such that, in a first state, the flexible membrane is uncoiled over the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the flexible membrane, and, in a second state, the flexible membrane is coiled away from the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the optical port portion of the substrate; and
a raised annular rim member formed on the substrate around the optical port portion of the substrate such that, when the flexible membrane is in the first state, a bottom surface of the flexible membrane contacts the raised annular rim member;
said flexible membrane being tapered such that the attachment edge of the flexible membrane is measured at the portion of the flexible membrane that covers the optical port portion of the substrate when the flexible membrane is in the first state. - View Dependent Claims (19, 20)
-
-
21. An optical switching method comprising:
-
a substrate; and
a flexible membrane attached at at least one end to a surface of the substrate in proximity to an optical port region of the substrate, the flexible membrane being configured such that, in a first state, the flexible membrane is disposed over the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the flexible membrane, and, in a second state, the flexible membrane is disposed to expose the optical port portion of the substrate such that light directed toward the optical port portion of the substrate impinges on the optical port portion of the substrate;
whereinthe flexible member is attached to the substrate at an attachment edge of the flexible member extending along a width dimension of the flexible member, the flexible member being tapered such that the attachment edge of the flexible member is shorter than the width of the flexible member measured at the portion of the flexible member that covers the optical port portion of the substrate when the flexible member is in the first state. - View Dependent Claims (22, 23)
-
Specification