Method and apparatus for filtering metrology data based on collection purpose

  • US 6,836,691 B1
  • Filed: 05/01/2003
  • Issued: 12/28/2004
  • Est. Priority Date: 05/01/2003
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • collecting metrology data related to the processing of workpieces in a plurality of tools;

    generating context data for the metrology data, the context data including collection purpose data;

    filtering the metrology data based on the collection purpose data; and

    conducting a process control activity related to one of the tools based on the filtered metrology data.

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