Triaxial angular rate and acceleration sensor

• US 6,843,126 B2
• Filed: 08/29/2002
• Issued: 01/18/2005
• Est. Priority Date: 02/08/1991
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Hulsing, Rand H. II
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US10/230,458
• Publication Number:
  US 20030005767A1
• Time in Patent Office: 873 Days
• Field of Search: 735/040.4, 735/041.2, 735/10, 735/141.5
• US Class Current: 73/504.04
• CPC Class Codes: F02G 1/044 having at least two working members, e.g. pistons, delivering power output
• CPC Class Codes: F02G 1/0445 Engine plants with combined cycles, e.g. Vuilleumier
• CPC Class Codes: F16L 37/24 in which the connection is made by inserting one member axially into the other and rotating it to a limited extent, e.g. with bayonet action
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends

Abstract

A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. Each sensor is formed from two accelerometers having their sensing axes canted at an angle with respect to the plane of the substrate and further being directed in opposite directions. The rate sensing axes thus lie along three orthogonal axes.

In order to reduce or eliminate angular acceleration sensitivity, a two substrate configuration may be used. Each substrate includes three accelerometers that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. The sensing axes of the accelerometers of the first substrate are canted at an angle with respect to the plane of the first substrate toward the central portion thereof so that they lie along three skewed axes. Similarly, the sensing axes of the accelerometers of the second substrate are canted at an angle with respect to the plane of the second substrate away from the central portion thereof so that they lie along same three but oppositely directed axes. The sensing axes of the first and second substrates are aligned to prevent angular acceleration sensitivity.

Claims

1. A sensor structure comprising:

a first accelerometer formed in a first planar substrate and disposed in a first plane, said first accelerometer having a sensing axis;

a second accelerometer formed in a second planar substrate and disposed in a second plane that is generally parallel to said first plane, said second accelerometer having a sensing axis that is aligned with and anti-parallel or parallel with said sensing axis of said first accelerometer;

means for linking said first and second accelerometers so that movement of said first accelerometer in said first plane causes a corresponding movement of said second accelerometer in said second plane said linking means comprising a linking member formed from a third planar substrate and disposed in a third plane that is generally parallel to said first and second planes, said third plane lying between said first and second planes.