Mechanical deformation amount sensor
First Claim
1. A mechanical deformation amount sensor, comprising:
- a sensor structure formed by one of a semiconductor substrate and an insulating substrate and integrally includes a deformation portion deformable, when a physical quantity to be detected is applied to the sensor structure, due to the physical quantity and a support portion for supporting the deformation portion;
a first carbon nanotube resistance element provided on deformation portion to be mechanically deformed when the physical quantity to be detected is applied to said sensor structure;
a second carbon nanotube resistance element provided on said support portion that is not deformed when the physical quantity to be detected is applied to said sensor structure; and
a wiring pattern which is formed in a pattern on said sensor structure to be connected to said first carbon nanotube resistance element and said second carbon nanotube resistance element, wherein a voltage is applied to the first and second carbon nanotube resistance elements via said wiring pattern such that a change of electrical conductivity of said first carbon nanotube resistance element upon mechanical deformation of said first carbon nanotube resistance element is fetched as an electrical signal.
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Accused Products
Abstract
A mechanical deformation amount sensor includes a sensor structure which is formed by a semiconductor substrate or an insulating substrate and integrally includes a deformation portion deformable, when a physical quantity to be detected is applied to the sensor structure, due to the physical quantity and a support portion for supporting the deformation portion, a carbon nanotube resistance element which is provided on the deformation portion so as to be mechanically deformed in response to deformation of the deformation portion and a wiring pattern which is formed in a pattern on the sensor structure so as to be connected to the carbon nanotube resistance element. By applying a voltage to the carbon nanotube resistance element via the wiring pattern, a change of electrical conductivity of the carbon nanotube resistance element upon mechanical deformation of the carbon nanotube resistance element is fetched as an electrical signal.
95 Citations
16 Claims
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1. A mechanical deformation amount sensor, comprising:
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a sensor structure formed by one of a semiconductor substrate and an insulating substrate and integrally includes a deformation portion deformable, when a physical quantity to be detected is applied to the sensor structure, due to the physical quantity and a support portion for supporting the deformation portion;
a first carbon nanotube resistance element provided on deformation portion to be mechanically deformed when the physical quantity to be detected is applied to said sensor structure;
a second carbon nanotube resistance element provided on said support portion that is not deformed when the physical quantity to be detected is applied to said sensor structure; and
a wiring pattern which is formed in a pattern on said sensor structure to be connected to said first carbon nanotube resistance element and said second carbon nanotube resistance element, wherein a voltage is applied to the first and second carbon nanotube resistance elements via said wiring pattern such that a change of electrical conductivity of said first carbon nanotube resistance element upon mechanical deformation of said first carbon nanotube resistance element is fetched as an electrical signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A mechanical deformation amount sensor, comprising:
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a sensor structure formed by one of a semiconductor substrate or an insulating substrate and integrally including a deformation portion that is deformable, when a physical quantity to be detected is applied to said sensor structure, due to the physical quantity and a support portion for supporting said deformation portion;
a carbon nanotube resistance element provided on said deformation portion to be mechanically deformed in response to a deformation of said deformation portion; and
a wiring pattern formed in a pattern on said sensor structure to be connected to said carbon nanotube resistance element, wherein a voltage is applied to said carbon nanotube resistance element via said wiring pattern, such that a change of electrical conductivity of said carbon nanotube resistance element upon mechanical deformation of said carbon nanotube resistance element is fetched as an electrical signal, a reference resistance element being provided at a portion of said sensor structure other than said deformation portion, said reference resistance element and said carbon nanotube resistance element being connected to each other by said wiring pattern to form a bridge circuit. - View Dependent Claims (13)
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14. A mechanical deformation amount sensor, comprising:
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a sensor structure formed by one of a semiconductor substrate or an insulating substrate and integrally including a deformation portion that is deformable, when a physical quantity to be detected is applied to said sensor structure, due to the physical quantity and a support portion for supporting said deformation portion;
a carbon nanotube resistance element provided on said deformation portion to be mechanically deformed in response to a deformation of said deformation portion; and
a wiring pattern formed in a pattern on said sensor structure to be connected to said carbon nanotube resistance element, wherein a voltage is applied to said carbon nanotube resistance element via said wiring pattern, such that a change of electrical conductivity of said carbon nanotube resistance element upon mechanical deformation of said carbon nanotube resistance element is fetched as an electrical signal, a step portion being formed on said deformation portion, said carbon nanotube resistance element being provided on said deformation portion so as to stride over said step portion.
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15. A mechanical deformation amount sensor, comprising:
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a sensor structure formed by one of a semiconductor substrate or an insulating substrate and integrally including a deformation portion that is deformable, when a physical quantity to be detected is applied to said sensor structure, due to the physical quantity and a support portion for supporting said deformation portion;
a carbon nanotube resistance element provided on said deformation portion to be mechanically deformed in response to a deformation of said deformation portion; and
a wiring pattern formed in a pattern on said sensor structure to be connected to said carbon nanotube resistance element, wherein a voltage is applied to said carbon nanotube resistance element via said wiring pattern, such that a change of electrical conductivity of said carbon nanotube resistance element upon mechanical deformation of said carbon nanotube resistance element is fetched as an electrical signal, said carbon nanotube resistance element being formed by a single-wall carbon nanotube, wherein said carbon nanotube resistance element is formed by a plurality of single-wall carbon nanotubes which are arranged side by side and are electrically connected to each other in parallel.
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16. A mechanical deformation amount sensor, comprising:
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a sensor structure formed by one of a semiconductor substrate or an insulating substrate and integrally including a deformation portion that is deformable, when a physical quantity to be detected is applied to said sensor structure, due to the physical quantity and a support portion for supporting said deformation portion;
a carbon nanotube resistance element provided on said deformation portion to be mechanically deformed in response to a deformation of said deformation portion; and
a wiring pattern formed in a pattern on said sensor structure to be connected to said carbon nanotube resistance element, wherein a voltage is applied to said carbon nanotube resistance element via said wiring pattern, such that a change of electrical conductivity of said carbon nanotube resistance element upon mechanical deformation of said carbon nanotube resistance element is fetched as an electrical signal, said mechanical deformation amount sensor acting as an acceleration sensor having an acceleration as the physical quantity to be detected, wherein said sensor structure further includes a weight portion integrally coupled with said support portion by said deformation portion.
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Specification