Method and apparatus for tuning a laser with a Bragg grating in a semiconductor substrate

• US 6,853,671 B2
• Filed: 09/28/2001
• Issued: 02/08/2005
• Est. Priority Date: 06/13/2001
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Jones, Richard, Liu, Ansheng, Paniccia, Mario J., Nicolaescu, Remus
• Primary Examiner(s): Harvey, Minsun Oh
• Assistant Examiner(s): Nguyen, Phillip
• Application Number:
  US09/967,445
• Publication Number:
  US 20020197013A1
• Time in Patent Office: 1,229 Days
• Field of Search: 372/20, 372/26, 372/50, 372/92, 372/99, 372/102
• US Class Current: 372/102
• CPC Class Codes: G02B 2006/12097 Ridge, rib or the like
• CPC Class Codes: G02B 2006/12135 Temperature control
• CPC Class Codes: G02B 6/124 Geodesic lenses or integrated gratings
• CPC Class Codes: G02F 1/0147 based on thermo-optic effects G02F1/132 takes precedence
• CPC Class Codes: G02F 1/025 in an optical waveguide structure G02F1/017, G02F1/2257 take precedence
• CPC Class Codes: G02F 2201/307 Reflective grating, i.e. Bragg grating

Abstract

A semiconductor-based laser tuning method and apparatus. In one aspect of the present invention, an apparatus according to an embodiment of the present invention includes a gain medium disposed in a semiconductor substrate. A laser cavity is disposed in the semiconductor substrate and is optically coupled to the gain medium. A first reflector defines one end of the laser cavity. The first reflector includes a first tunable Bragg grating disposed in the semiconductor substrate. The first tunable Bragg grating includes a first plurality of silicon and polysilicon interfaces along the semiconductor substrate such that there is a first plurality of perturbations of a refractive index along the Bragg grating. The first tunable Bragg grating selectively reflects light having a tunable center wavelength so as to emit light through stimulated emission having the tunable center wavelength in the laser cavity. A second reflector defines an other end of the laser cavity.

Claims

1. A laser apparatus, comprising:

a gain medium disposed in a semiconductor substrate;

a laser cavity disposed in the semiconductor substrate, the laser cavity optically coupled to the gain medium;

a first reflector defining one end of the laser cavity, the first reflector including a first tunable Bragg grating disposed in the semiconductor substrate, the first tunable Bragg grating including a first plurality of silicon and polysilicon interfaces along the semiconductor substrate such that there is a first plurality of perturbations of a refractive in index along the first tunable Bragg grating, the first tunable Bragg grating to selectively reflect light having a tunable center wavelength so as to emit light through stimulated emission having the tunable center wavelength in the laser cavity; and

a second reflector defining an other end of the laser cavity.

2. The apparatus of claim 1 further comprising a heater disposed proximate to the semiconductor substrate including the first tunable Bragg grating, wherein a temperature of the semiconductor substrate including the first tunable Bragg grating is responsive to the heater, wherein the tunable center wavelength is responsive to the temperature of the semiconductor substrate.

3. The apparatus of claim 1 wherein the laser cavity comprises a rib waveguide disposed in the semiconductor substrate.

4. The apparatus of claim 1 wherein the first tunable Bragg grating is one of a first plurality of tunable Bragg gratings disposed in the semiconductor substrate cascaded along the laser cavity, each of the first plurality of tunable Bragg gratings having different tunable center wavelengths, each of the first plurality of tunable Bragg gratings defining the end of the laser cavity at their respective different tunable center wavelengths.

5. The apparatus of claim 1 wherein the second reflector includes a second Bragg grating disposed in the semiconductor substrate such that there is a second plurality of perturbations of a refractive index along the second tunable Bragg grating, the second tunable Bragg grating to selectively reflect light having the tunable center wavelength so as to emit light through stimulated emission having the tunable center wavelength in the laser cavity.

6. The apparatus of claim 5 wherein the first tunable Bragg grating is one of a first plurality of tunable Bragg gratings disposed in the semiconductor substrate cascaded along the laser cavity, each of the first plurality of tunable Bragg gratings having different tunable center wavelengths, each of the first plurality of tunable Bragg gratings defining the end of the laser cavity at their respective different tunable center wavelengths,

wherein the second tunable Bragg grating is one of a second plurality of tunable Bragg gratings disposed in the semiconductor substrate cascaded along the laser cavity, each of the second plurality of tunable Bragg gratings having different tunable center wavelengths, each of the second plurality of tunable Bragg gratings defining the other end of the laser cavity at their respective different tunable center wavelengths.

7. The apparatus of claim 6 wherein one of the first plurality of tunable Bragg gratings and one of the second plurality of tunable Bragg gratings are tuned to have substantially equal respective tunable center wavelengths, wherein remaining ones of the first plurality of tunable Bragg gratings and remaining ones of the second plurality of tunable Bragg gratings are tuned not to have substantially equal respective tunable center wavelengths.

8. The apparatus of claim 5 wherein the tunable center wavelength is one of a first plurality of wavelengths that the first tunable Bragg grating is to reflect, wherein the tunable center wavelength is one of a second plurality of wavelengths that the second tunable Bragg grating is to reflect, wherein remaining ones of the first plurality of wavelengths are not equal to remaining ones of the second plurality of wavelengths.

9. The apparatus of claim 1 further comprising an optical splitter disposed in the semiconductor substrate, the optical splitter having a first optical input optically coupled to the other end of the laser cavity, the optical splitter having a plurality of optical outputs, each of the plurality of optical outputs optically coupled to the first optical input of the optical splitter.

10. The apparatus of claim 9 wherein the optical splitter includes a plurality of optical inputs including the first optical input, wherein each of the plurality of optical inputs is optically coupled to a corresponding one of a plurality of tunable lasers disposed in the semiconductor substrate.

11. The apparatus of claim 10 wherein the optical splitter includes an N×

N multi-mode interference (MMI) device disposed in the semiconductor substrate.

12. A laser apparatus, comprising:

a gain medium disposed in a semiconductor substrate;

a laser cavity disposed in the semiconductor substrate, the laser cavity optically coupled to the gain medium;

a first reflector defining a first end of the laser cavity, the first reflector including a first tunable Bragg grating disposed in the semiconductor substrate, the first tunable Bragg grating including a plurality of insulated conductor structures protruding into the laser cavity to produce charge modulated regions to induce a plurality of corresponding perturbations of a refractive index along the semiconductor substrate, the first tunable Bragg grating to selectively reflect light having a tunable center wavelength so as to emit light through stimulated emission having the tunable center wavelength in the laser cavity; and

a second reflector defining an other end of the laser cavity.

13. The apparatus of claim 12 wherein a charge concentration in the charge modulated region is adjusted in response to a modulation signal so as to adjust the tunable center wavelength.

14. The apparatus of claim 12 wherein the laser cavity comprises a rib waveguide disposed in the semiconductor substrate.

15. The apparatus of claim 14 wherein the first tunable Bragg grating is one of a first plurality of tunable Bragg gratings disposed in the semiconductor substrate cascaded along the laser cavity, each of the first plurality of tunable Bragg gratings having different tunable center wavelengths, each of the first plurality of tunable Bragg gratings defining the other end of the laser cavity at their respective different tunable center wavelengths.

16. The apparatus of claim 12 wherein the second reflector includes a second tunable Bragg grating disposed in the semiconductor substrate such that there is a second plurality of perturbations of a refractive index along the second tunable Bragg grating, the second tunable Bragg grating to selectively reflect light having the tunable center wavelength so as to emit light through stimulated emission having the tunable center wavelength in the laser cavity.

17. The apparatus of claim 16 wherein the first tunable Bragg grating is one of a first plurality of tunable Bragg gratings disposed in the semiconductor substrate cascaded along the laser cavity, each of the first plurality of tunable Bragg gratings having different tunable center wavelengths, each of the first plurality of tunable Bragg gratings defining the end of the laser cavity at their respective different tunable center wavelengths,

wherein the second tunable Bragg grating is one of a second plurality of tunable Bragg gratings disposed in the semiconductor substrate cascaded along the laser cavity, each of the second plurality of tunable Bragg gratings having different tunable center wavelengths, each of the second plurality of tunable Bragg gratings defining the other end of the laser cavity at their respective different tunable center wavelengths.

18. The apparatus of claim 17 wherein one of the first plurality of tunable Bragg gratings and one of the second plurality of tunable Bragg gratings are tuned to have substantially equal respective tunable center wavelengths, wherein remaining ones of the first plurality of tunable Bragg gratings and remaining ones of the second plurality of tunable Bragg gratings are tuned not to have substantially equal respective tunable center wavelengths.

19. The apparatus of claim 16 wherein the tunable center wavelength is one of a first plurality of wavelengths that the first tunable Bragg grating is to reflect, wherein the tunable center wavelength is one of a second plurality of wavelengths that the second tunable Bragg grating is to reflect, wherein remaining ones of the first plurality of wavelengths are not equal to remaining ones of the second plurality of wavelengths.

20. The apparatus of claim 12 further comprising an optical splitter disposed in the semiconductor substrate, the optical splitter having a first optical input optically coupled to the other end of the laser cavity, the optical splitter having a plurality of optical outputs, each of the plurality of optical outputs optically coupled to the first optical input of the optical splitter.

21. The apparatus of claim 20 wherein the optical splitter includes an N×

N multi-mode interference (MMI) device disposed in the semiconductor substrate, the optical splitter having N optical inputs including the first optical input, the optical splitter having N optical outputs including the plurality of optical outputs.

22. A method for operating a laser, comprising:

stimulating emission of light from a gain medium in a laser cavity disposed in a semiconductor substrate;

reflecting the emitted light having a tunable center wavelength from an end of the laser cavity so as to further stimulate emission of light having the tunable center wavelength in the laser cavity, wherein the emitted light having the tunable center wavelength is reflected from the end of the laser cavity with a first tunable Bragg grating including a plurality of silicon and polysilicon interfaces along the semiconductor substrate such that there are a plurality of perturbations of a refractive index along the Bragg grating; and

reflecting the emitted light from an other end of the laser cavity.

23. The method of claim 22 further comprising adjusting a temperature of the semiconductor substrate including the first tunable Bragg grating wherein the tunable center wavelength is responsive to the temperature of the semiconductor substrate.

24. The method of claim 22 wherein reflecting the emitted light having the tunable center wavelength from the end of the laser cavity comprises reflecting the emitted light having the tunable center wavelength from one of a first plurality of tunable Bragg gratings disposed in the semiconductor substrate cascaded along the laser cavity, wherein the first tunable Bragg grating is one of the first plurality of tunable Bragg gratings, each of the first plurality of tunable Bragg gratings having different tunable center wavelengths.

25. The method of claim 24 wherein reflecting the emitted light from the other end of the laser cavity comprises reflecting the emitted light having the tunable center wavelength from one of a second plurality of tunable Bragg gratings disposed in the semiconductor substrate cascaded along the laser cavity, each of the second plurality of tunable Bragg gratings having different tunable center wavelengths.

26. The method of claim 25 further comprising:

tuning one of the first plurality of tunable Bragg gratings and one of the second plurality of tunable Bragg gratings to reflect light having the tunable center wavelength; and

tuning remaining ones of the first plurality of tunable Bragg gratings and remaining ones of the second plurality of tunable Bragg gratings to different tunable center wavelengths.

27. The method of claim 22 further comprising:

selectively directing the emitted light into an optical splitter disposed in the semiconductor substrate; and

splitting the emitted light directed into the optical splitter into a plurality of optical beams output from the optical splitter.

28. A method for operating a laser, comprising:

stimulating emission of light from a gain medium in a laser cavity disposed in a semiconductor substrate;

reflecting the emitted light having a tunable center wavelength from an end of the laser cavity so as to further stimulate emission of light having the tunable center wavelength in the laser cavity, wherein the emitted light having the tunable center wavelength is reflected from the end of the laser cavity with a first tunable Bragg grating including a plurality of insulated conductor structures protruding into the laser cavity to produce charge modulated regions to induce a plurality of corresponding perturbations of a refractive index along the semiconductor substrate; and

reflecting the emitted light from an other end of the laser cavity.

29. The method of claim 28 further comprising adjusting a charge concentration in the charge modulated regions of the first tunable Bragg grating so as to adjust the tunable center wavelength.

30. The method of claim 28 wherein reflecting the emitted light having the tunable center wavelength from the end of the laser cavity comprises reflecting the emitted light having the tunable center wavelength from one of a first plurality of tunable Bragg gratings disposed in the semiconductor substrate cascaded along the laser cavity, wherein the first tunable Bragg grating is one of the first plurality of tunable Bragg gratings, each of the first plurality of tunable Bragg gratings having different tunable center wavelengths.

31. The method of claim 30 wherein reflecting the emitted light from the other end of the laser cavity comprises reflecting the emitted light having the tunable center wavelength from one of a second plurality of tunable Bragg gratings disposed in the semiconductor substrate cascaded along the laser cavity, each of the second plurality of tunable Bragg gratings having different tunable center wavelengths.

32. The method of claim 31 further comprising:

tuning one of the first plurality of tunable Bragg gratings and one of the second plurality of tunable Bragg gratings to reflect light having the tunable center wavelength; and

tuning remaining ones of the first plurality of tunable Bragg gratings and remaining ones of the second plurality of tunable Bragg gratings to different tunable center wavelengths.

33. The method of claim 28 further comprising:

selectively directing the emitted light into an optical splitter disposed in the semiconductor substrate; and

splitting the emitted light directed into the optical splitter into a plurality of optical beams output from the optical splitter.