Vibratory gyroscopic rate sensor

• US 6,883,374 B2
• Filed: 09/06/2002
• Issued: 04/26/2005
• Est. Priority Date: 09/14/2001
• Status: Expired due to Term

• Current Assignee: Atlantic Inertial Systems Incorporated (Raytheon Technologies Corporation d/b/a RTX)
• Original Assignee: BAE Systems Plc
• Inventors: Fell, Christopher P, Eley, Rebecka, Fox, Colin H. J., McWilliam, Stewart
• Primary Examiner(s): Chapman, John E.
• Application Number:
  US10/475,580
• Publication Number:
  US 20040144174A1
• Time in Patent Office: 963 Days
• Field of Search: 735/041.3, 735/041.2, 735/040.2
• US Class Current: 73/504.13
• CPC Class Codes: G01C 19/5684 the devices involving a micromechanical structure

Abstract

A three axis rate sensor includes a substantially planar vibratory resonator having a substantially ring or hoop-like structure with inner and outer peripheries extending around a common axis, drive means for causing the resonator to vibrate in a Cos 2θ vibration mode, carrier mode pick-off means for sensing movement of the resonator in response to the applied drive z-axis response mode, pick-off means for detecting movement of the resonator in response to rotation about the z-axis, z-axis response mode drive means for nulling said motion, x-axis response mode pick-off mean for detecting movement of the resonator in response to rotation about the x-axis, x-axis response mode drive means for nulling said motion, y-axis response mode pick-off mean for detecting movement of the resonator in response to rotation about the y-axis, y-axis response mode drive means for nulling said motion, and support means for flexibly supporting the resonator and for allowing the resonator to vibrate relative to the support means in response to the drive means and the applied rotation wherein the support means comprises only L support beams, where L≠2^K, and K=0, 1, 2 or 3. For example there may be three, five, six or seven support beams.

Claims

1. A three axis rate sensor including a substantially planar vibratory resonator having a substantially ring or hoop-like structure with inner and outer peripheries extending around a common axis, drive means for causing the resonator to vibrate in a Cos 2θ

vibration mode, carrier mode pick-off means for sensing movement of the resonator in response to the applied drive means, z-axis response mode pick-off means for detecting movement of the resonator in response to rotation about the z-axis, z-axis response mode drive means for nulling said motion, x-axis response mode pick-off means for detecting movement of the resonator in response to rotation about the x-axis, x-axis response mode drive means for nulling said motion, y-axis response mode pick-off means for detecting movement of the resonator in response to rotation about the y-axis, y-axis response mode drive means for nulling said motion, and support means for flexibly supporting the resonator and for allowing the resonator to vibrate relative to the support means in response to the drive means and to applied rotation, characterised in that the support means comprises only L support beams, where L≠

2^K, K=0, 1, 2 or 3, and L<

8.

2. A rate sensor according to claim 1, wherein each support beam comprises first and second linear portions extending from opposite ends of an arcuate portion.

3. A rate sensor according to claim 2, wherein the support beams are substantially equi-angularly spaced.

4. A rate sensor according to claim 2, wherein the support means includes a base having a projecting boss with the inner periphery of the substantially ring or hoop-like structure being coupled to the boss by the support beams which extend from said inner periphery of the ring or hoop-like structure to the projecting boss so that the ring or hoop-like structure is spaced from the base.

5. A rate sensor according to claim 2 wherein the total stiffness of the support beams is less than that of the ring or hoop-like structure.

6. A rate sensor according to claim 1, wherein the support beams are substantially equi-angularly spaced.

7. A rate sensor according to claim 6, wherein the support means includes a base having a projecting boss with the inner periphery of the substantially ring or hoop-like structure being coupled to the boss by the support beams which extend from said inner periphery of the ring or hoop-like structure to the projecting boss so that the ring or hoop-like structure is spaced from the base.

8. A rate sensor according to claim 6 wherein the total stiffness of the support beams is less than that of the ring or hoop-like structure.

9. A rate sensor according to claim 1, wherein the support means includes a base having a projecting boss with the inner periphery of the substantially ring or hoop-like structure being coupled to the boss by the support beams which extend from said inner periphery of the ring or hoop-like structure to the projecting boss so that the ring or hoop-like structure is spaced from the base.

10. A rate sensor according to claim 9 wherein the total stiffness of the support beams is less than that of the ring or hoop-like structure.

11. A rate sensor according to claim 1 wherein the total stiffness of the support beams is less than that of the ring or hoop-like structure.