Three-dimensional photonic crystal waveguide structure and method

• US 6,898,362 B2
• Filed: 01/17/2002
• Issued: 05/24/2005
• Est. Priority Date: 01/17/2002
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Forbes, Leonard, Geusic, Joseph E.
• Primary Examiner(s): Ullah, Akm Enayet
• Assistant Examiner(s): Rahll, Jerry T
• Application Number:
  US10/052,952
• Publication Number:
  US 20030133683A1
• Time in Patent Office: 1,223 Days
• Field of Search: 385/122, 385130-132
• US Class Current: 385/132
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: C30B 29/60 characterised by shape
• CPC Class Codes: C30B 33/00 After-treatment of single crystals or homogeneous polycrystalline material with defined structure C30B31/00 takes precedence
• CPC Class Codes: G02B 2006/12078 Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices
• CPC Class Codes: G02B 6/13 Integrated optical circuits characterised by the manufacturing method
• CPC Class Codes: H01L 29/04 characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes characterised by physical imperfections H01L29/30
• CPC Class Codes: H01L 29/06 characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
• CPC Class Codes: H01S 5/11 Comprising a photonic bandgap structure

Abstract

A waveguide structure formed with a three-dimensional (3D) photonic crystal is disclosed. The 3D photonic crystal comprises a periodic array of voids formed in a solid substrate. The voids are arranged to create a complete photonic bandgap. The voids may be formed using a technique called “surface transformation,” which involves forming holes in the substrate surface, and annealing the substrate to initiate migration of the substrate near the surface to form voids in the substrate. A channel capable of transmitting radiation corresponding to the complete bandgap is formed in the 3D photonic crystal, thus forming the waveguide. The waveguide may be formed by interfacing two 3D photonic crystal regions, with at least one of the regions having a channel formed therein. The bandgap wavelength can be chosen by arranging the periodic array of voids to have a lattice constant a fraction of the bandgap wavelength.

Claims

1. A method of forming a three-dimensional (3D) photonic crystal waveguide structure, comprising:

forming in first and second substrates respective first and second 3D photonic crystal regions respectively comprising first and second substantially identical periodic arrays of voids defining substantially identical first and second complete bandgaps;

forming a first empty channel in the first 3D photonic crystal region; and

interfacing the first and second 3D photonic crystal regions to form a 3D waveguide defined by the first empty channel and a portion of the second 3D photonic crystal region covering the first empty channel.

2. The method of claim 1, wherein the method includes forming the first and second periodic arrays of voids via surface transformation.

3. The method of claim 1, wherein the method includes:

determining a filling ratio of voids needed to produce the first and second complete bandgaps; and

forming voids in the first and second substrates to achieve the determined filling ratio.

4. The method of claim 3, wherein the method includes forming the first and second periodic array of voids from unit cells connected by imaginary bonds, and forming second voids along the imaginary bonds.

5. The method of claim 4, wherein the method includes forming the first and second voids as spherical voids.

6. The method of claim 1, wherein the method includes forming a second empty channel in the second 3D photonic crystal region, and aligning the first empty channel with the second empty channel when interfacing the first and second 3D photonic crystals so that the 3-D waveguide is defined by the first and second empty channels.

7. The method of claim 1, wherein the method includes forming the first empty channel to have a rectangular cross-section.

8. A method of forming a 3D photonic crystal waveguide structure, comprising:

combining two 3D photonic crystal regions each formed from a substantially identical periodic array of voids via surface transformation so as to form a complete bandgap in each 3D photonic crystal region; and

wherein at least one of the 3D photonic crystal regions includes an empty channel that forms a waveguide upon said combining of the two 3D photonic crystal regions.

9. The method of claim 8, wherein the method includes forming the voids to be spherical voids.

10. The method of claim 9, wherein the method includes arranging the periodic arrays of voids to form a modified diamond crystal structure.

11. The method of claim 8, wherein the method includes forming the empty channel to include a taper.

12. The method of claim 8, wherein the method includes forming the empty channel to include a bend.

13. The method of claim 8, wherein the method includes forming the periodic array of spherical voids from unit cells, and forming the empty channel be at least one unit cell in width and at least one unit cell in depth.

14. The method of claim 8, wherein the method includes forming the empty channel by etching at least one of the two 3D photonic crystal regions.

15. The method of claim 8, wherein combining the two 3D photonic crystal regions includes aligning alignment marks formed relative to each of the two 3D photonic crystal regions.

16. A method of guiding radiation, comprising:

forming in first and second substrates respective first and second 3D photonic crystal regions respectively including first and second substantially identical periodic arrays of voids defining substantially identical first and second complete bandgaps;

forming a first empty channel in the first 3D photonic crystal region;

interfacing the first and second 3D photonic crystal regions to form a 3D waveguide defined by the first empty channel and a portion of the second 3D photonic crystal region covering the first empty channel; and

introducing radiation into an input end of the 3D waveguide.

17. The method of claim 16, wherein the method further includes detecting radiation at an output end of the 3D waveguide and generating an electronic signal in response thereto.

18. The method of claim 16, wherein the method further includes processing the electronic signal.

19. The method of claim 16, wherein the method includes forming the first and second periodic arrays of void by surface transformation.

20. A method of guiding radiation, comprising:

combining two 3D photonic crystal regions having formed therein substantially identical periodic arrays of voids via surface transformation so as to form a complete bandgap in each 3D photonic crystal region, wherein at least one of the 3D photonic crystal regions includes an empty channel that forms a waveguide upon said combining of the two 3D photonic crystal regions; and

introducing radiation into the waveguide having a wavelength within the complete photonic bandgap.

21. The method of claim 20, wherein the method includes forming the voids to be spherical.

22. The method of claim 20, wherein the method includes forming the two 3D photonic crystal regions to each comprise a modified diamond crystal structure.

23. A method of forming a 3D photonic crystal waveguide, comprising:

forming first and second substantially identical 3D photonic crystal regions, wherein at least one of the regions includes an empty channel, and combining the first and second 3D photonic crystal regions to form a single 3D photonic crystal region with a waveguide defined by the empty channel, the single 3D photonic crystal having a complete photonic bandgap defined by first and second periodic arrays of voids formed in each of the first and second 3D photonic crystal regions.

24. The method of claim 23, wherein the method includes forming the first and second periodic arrays of voids by surface transformation.

25. The method of claim 23, wherein the method includes forming the voids as spherical voids.

26. The method of claim 23, including forming the first and second 3D photonic crystal regions with unit cells of first spherical voids having a diamond structure modified with second spherical voids to form the complete bandgap.

27. The method of claim 23, wherein the method includes:

selecting a desired wavelength for the complete photonic bandgap; and

forming the periodic array of voids to have a period a fraction of the desired wavelength.

28. The method of claim 27, wherein the desired wavelength is one of x-ray, ultraviolet, visible, infrared, and microwave.

29. The method of claim 23, wherein the first and second 3D photonic crystal regions are formed in respective first and second substrates, and wherein combining the first and second 3D photonic crystal regions includes interfacing and bonding the substrates.

30. A waveguide structure comprising:

first and second 3D photonic crystal regions combined to form a single 3D photonic crystal region having a complete photonic bandgap defined by first and second periodic arrays of voids formed in each of the first and second 3D photonic crystal regions by surface transformation; and

an empty channel passing through the single 3D photonic crystal region sized to receive and guide radiation of a wavelength corresponding to the complete photonic bandgap.

31. The waveguide structure of claim 30, wherein the voids are spherical.

32. The waveguide structure of claim 30, wherein the first and second periodic arrays of voids form a modified diamond crystal structure.

33. The waveguide structure of claim 30, wherein the empty channel includes a bend.

34. The waveguide structure of claim 30, wherein the empty channel includes a taper.

35. A waveguide structure, comprising:

a 3D photonic crystal including a periodic array of voids formed in a solid substrate so as to have a complete photonic bandgap; and

an empty channel waveguide formed in the 3D photonic crystal and sized to transmit light of a wavelength corresponding to the complete photonic bandgap.

36. The waveguide structure of claim 35, wherein the 3D photonic crystal includes first and second interfaced 3D photonic crystal regions formed in first and second substrates.

37. The waveguide structure of claim 35, wherein the voids are spherical.

38. The waveguide structure of claim 35, wherein the periodic array of voids includes a plurality of cells having a modified diamond structure.

39. The waveguide structure of claim 35, wherein the empty channel waveguide has a bend.

40. The waveguide structure of claim 35, wherein the empty channel waveguide has a rectangular cross-section.

41. The waveguide structure of claim 35, wherein the empty channel waveguide includes a taper.

42. The waveguide structure of claim 35, wherein the substrate includes a material selected from the group of materials consisting of a linear optical material, a non-linear optical material, a metal, a semiconductor, an insulator, a dielectric, an acoustic material, a magnetic material, a ferroelectric material, a piezoelectric material, and a superconducting material.

43. The waveguide structure of claim 35, wherein the complete photonic bandgap has a wavelength including one of an x-ray wavelength, an ultraviolet wavelength, a visible wavelength, an infrared wavelength and a microwave wavelength.

44. The waveguide optical system comprising:

a 3D photonic crystal comprising a periodic array of voids formed in a solid substrate so as to have a complete photonic bandgap;

an empty channel waveguide formed in the 3D photonic crystal and sized to transmit light of a wavelength corresponding to the complete photonic bandgap; and

a radiation source operatively coupled to a first end of the empty channel waveguide to provide radiation to be transmitted down the waveguide.

45. The waveguide optical system of claim 44, wherein the radiation source is a laser.

46. The waveguide optical system of claim 44, further including a photodetector operatively coupled to a second end of the empty channel waveguide to detect radiation transmitted down the empty channel waveguide and generate an electrical signal in response thereto.

47. The waveguide optical system of claim 46, further including an electronic system connected to the photodetector operable to receive and process the electronic signal.

48. The waveguide optical system of claim 44, wherein the periodic array of voids is made up of unit cells, and wherein the unit cells are modified to form the complete photonic bandgap.

49. The waveguide optical system of claim 48, wherein the modified unit cells are modified diamond unit cells.