Micro-mirror device with increased mirror tilt

• US 6,903,487 B2
• Filed: 02/14/2003
• Issued: 06/07/2005
• Est. Priority Date: 02/14/2003
• Status: Expired due to Term

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Shreeve, Robert W., Nikkel, Eric Lee, Regan, Michael John, Angelos, Jr., Sam G.
• Primary Examiner(s): TAMAI, KARL I
• Application Number:
  US10/367,156
• Publication Number:
  US 20040160143A1
• Time in Patent Office: 844 Days
• Field of Search: 310/309, 359223-226, 359/291
• US Class Current: 310/309
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence

Abstract

A micro-mirror device includes a substrate, at least one electrode formed on the substrate, and a reflective element spaced from the substrate and extending beyond the at least one electrode. The reflective element is adapted to move between a first position and at least one second position, and, when the reflective element is in the at least one second position, a minimum distance between the reflective element and the at least one electrode is greater than a minimum distance between the reflective element and the substrate.

Claims

1. A micro-mirror device, comprising:

a substrate having a surface and at least one trench formed therein, the at least one trench having a sidewall oriented substantially perpendicular to the surface of the substrate;

at least one electrode formed within the at least one trench along the sidewall thereof; and

a reflective element spaced from the substrate and extending beyond the at least one electrode,

wherein the reflective element is adapted to move between a first position and at least one second position, and

wherein, when the reflective element is in the at least one second position, a minimum distance between the reflective element and the at least one electrode is greater than a minimum distance between the reflective element and the substrate.

2. The device of claim 1, wherein the at least one second position of the reflective element is oriented at an angle to the first position.

3. The device of claim 1, wherein the reflective element extends over the at least one trench, and wherein an end of the reflective element is adapted to be positioned in the at least one trench when the reflective element is in the at least one second position.

4. The device of claim 1, wherein, when the reflective element is in the at least one second position, the minimum distance between the reflective element and the substrate is defined between the reflective element and the at least one trench.

5. The device of claim 1, further comprising:

at least one post extending from the substrate and supporting the reflective element,

wherein, when the reflective element is in the first position, a distance between the at least one electrode and the reflective element is greater than a distance between the at least one electrode and the at least one post as defined along the substrate.

6. The device of claim 5, further comprising:

a conductive via extending through the at least one post and electrically coupled to the reflective element.

7. The device of claim 1, wherein the reflective element is adapted to move in response to application of an electrical signal to the at least one electrode.

8. The device of claim 1, further comprising:

a plate spaced from and oriented substantially parallel to the substrate, wherein the reflective element is interposed between the substrate and the plate, and the plate and the substrate define a cavity therebetween; and

a dielectric liquid disposed in the cavity.

9. A display device including the micro-mirror device of claim 1.

10. A method of forming a micro-mirror device, the method comprising:

providing a substrate, including forming at least one trench in the substrate with the at least one trench having a sidewall oriented substantially perpendicular to a surface of the substrate;

forming at least one electrode within the at least one trench along the sidewall thereof; and

spacing a reflective element from the substrate, including extending the reflective element beyond the at least one electrode,

wherein the reflective element is adapted to move between a first position and at least one second position, and

wherein, when the reflective element is in the at least one second position, a minimum distance between the reflective element and the at least one electrode is greater than a minimum distance between the reflective element and the substrate.

11. The method of claim 10, wherein the at least one second position of the reflective element is oriented at an angle to the first position.

12. The method of claim 10,

wherein spacing the reflective element from the substrate further includes extending the reflective element over the at least one trench, and wherein an end of the reflective element is adapted to be positioned in the at least one trench when the reflective element is in the at least one second position.

13. The method of claim 10, wherein, when the reflective element is in the at least one second position, the minimum distance between the reflective element and the substrate is defined between the reflective element and the at least one trench.

14. The method of claim 10, further comprising:

extending at least one post from the substrate,

wherein spacing the reflective element from the substrate includes supporting the reflective element from the at least one post, and

wherein, when the reflective element is in the first position, a distance between the at least one electrode and the reflective element is greater than a distance between the at least one electrode and the at least one post as defined along the substrate.

15. The method of claim 14, further comprising:

extending a conductive via through the at least one post and electrically coupling the conductive via with the reflective element.

16. The method of claim 10, wherein the reflective element is adapted to move in response to application of an electrical signal to the at least one electrode.

17. The method of claim 10, further comprising:

orienting a plate substantially parallel to the substrate and spacing the plate from the substrate, including defining a cavity between the plate and the substrate; and

disposing a dielectric liquid in the cavity,

wherein spacing the reflective element from the substrate includes interposing the reflective element between the substrate and the plate.

18. A micro-actuator, comprising:

a substrate having a surface and at least one trench formed therein, the at least one trench having a sidewall oriented substantially perpendicular to the surface of the substrate;

at least one electrode formed within the at least one trench along the sidewall thereof;

an actuating element spaced from the substrate; and

means for moving the actuating element between a first position and at least one second position,

wherein, when the actuating element is in the at least one second position, a minimum distance between the actuating element and the at least one electrode is greater than a minimum distance between the actuating element and the substrate.

19. The micro-actuator of claim 18, wherein means for moving the actuating element includes means for moving the actuating element through an angle between the first position and the at least one second position.

20. The micro-actuator of claim 19, means for moving the actuating element includes means for increasing the angle between the first position and the at least one second position for a given distance between the actuating element and the substrate.

21. The micro-actuator of claim 18, wherein means for moving the actuating element includes means for moving an end of the actuating element through a plane coinciding with the surface of the substrate.

22. The micro-actuator of claim 18, further comprising:

means for supporting the actuating element from the substrate,

wherein, when the actuating element is in the first position, a distance between the at least one electrode and the actuating element is greater than a distance between the at least one electrode and the means for supporting the actuating element as defined along the substrate.

23. The micro-actuator of claim 18, further comprising:

a plate spaced from and oriented substantially parallel to the substrate;

wherein the actuating element is interposed between the substrate and the plate, and the plate and the substrate define a cavity therebetween, and

wherein means for moving the actuating element includes a dielectric liquid disposed in the cavity.