Probe station

  • US 6,914,423 B2
  • Filed: 06/12/2001
  • Issued: 07/05/2005
  • Est. Priority Date: 09/05/2000
  • Status: Active Grant
First Claim
Patent Images

1. A chuck assembly including a rotational member and an auxiliary chuck comprising:

  • (a) said rotational member defining an upper surface suitable for supporting a chuck thereon wherein said rotational member is rotatable with respect to said chuck assembly; and

    (b) said auxiliary chuck being free from rotating with respect to said chuck assembly, said auxiliary chuck having an upper surface thereon having an elevation that is above said upper surface of said rotational member.

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