Growing smooth semiconductor layers

• US 6,921,726 B2
• Filed: 03/13/2002
• Issued: 07/26/2005
• Est. Priority Date: 03/13/2002
• Status: Expired due to Fees

• Current Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Pfeiffer, Loren Neil, Akiyama, Hidefumi, West, Kenneth William
• Primary Examiner(s): Thomas, Tom
• Assistant Examiner(s): RICHARDS, NORMAN DREW
• Application Number:
  US10/097,092
• Publication Number:
  US 20030173559A1
• Time in Patent Office: 1,231 Days
• Field of Search: 438/761, 438/763, 438/767, 438/493
• US Class Current: 438/767
• CPC Class Codes: C30B 23/02 Epitaxial-layer growth
• CPC Class Codes: C30B 29/40 AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
• CPC Class Codes: C30B 29/42 Gallium arsenide
• CPC Class Codes: H01L 21/02395 Arsenides
• CPC Class Codes: H01L 21/02433 Crystal orientation
• CPC Class Codes: H01L 21/02463 Arsenides
• CPC Class Codes: H01L 21/02546 Arsenides
• CPC Class Codes: H01L 21/02587 Structure
• CPC Class Codes: H01L 21/02609 Crystal orientation
• CPC Class Codes: H01L 21/02631 Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation

Abstract

A method includes epitaxially growing a semiconductor layer with a free surface and performing an anneal that reduces atomic roughness on the free surface. The free surface has an orientation with respect to lattice axes of the layer for which atoms in flat regions of the free surface have more chemical bonds to the layer than do, at least, some of the atoms at edges of monolayer steps on the free surface.

Claims

1. A method, comprising:

epitaxially growing a semiconductor layer with a free surface, the free surface having an orientation with respect to lattice axes of the layer for which some atoms in flat regions of the free surface have three chemical bonds to the layer and, at least, some of the atoms at edges of monolayer steps on the free surface have two chemical bonds to the layer; and

performing an anneal that reduces atomic roughness on the free surface; and

wherein the performing an anneal comprises annealing the layer at a temperature above a temperature during the epitaxially growing step.

2. The method of claim 1, wherein the growing includes stopping the growth at an average surface height that corresponds to an integer number of monolayers.

5. The method of claim 1, further comprising:

cleaving a crystalline substrate to form an edge surface; and

wherein the epitaxially growing causes the semiconductor layer to grow on the edge surface.

6. The method of claim 1, wherein the growing includes growing a layer of one of a group III/V semiconductor and a semiconductor with a non-cubic lattice.

7. The method of claim 1, wherein the growing includes growing a GaAs layer along one of a 110-type crystal axis of GaAs and a 111-type crystal axis of GaAs.

8. The method of claim 7, wherein the layer is grown on a substrate that includes aluminum, gallium and arsenic.

9. The method of claim 1, further comprising:

epitaxially growing a layer of a different semiconductor on the annealed layer.

11. The method of claim 1, wherein the growing includes growing the layer along a 110-type crystal axis.

12. The method of claim 11, wherein the layer includes gallium and arsenic.

13. The method of claim 1, wherein the growing includes growing the layer along a 111-type crystal axis.

14. The method of claim 13, wherein the layer includes gallium and arsenic.

3. A method comprising:

epitaxially growing a semiconductor layer with a free surface, the free surface having an orientation with respect to lattice axes of the layer for which some atoms in flat regions of the free surface have three chemical bonds to the layer and, at least, some of the atoms at edges of monolayer steps on the free surface have two chemical bonds to the layer;

performing an anneal that reduces atomic roughness on the free surface; and

measuring a time-dependent rate of specular reflection off the growing semiconductor layer; and

wherein the growing includes stopping the growth in response to a selected measurement of the rate of specular reflection.

4. The method of claim 3, wherein the selected measurement indicates that a specular reflection intensity has a relative maximum as a function of growing time.

10. A method comprising:

epitaxially growing a semiconductor layer with a free surface, the free surface having an orientation with respect to lattice axes of the layer for which some atoms in flat regions of the free surface have three chemical bonds to the layer and, at least, some of the atoms at edges of monolayer steps on the free surface have two chemical bonds to the layer; and

performing an anneal that reduces atomic roughness on the free surface; and

wherein the growing includes growing a GaAs layer along a 110-type crystal axis of GaAs; and

wherein the performing an anneal comprises heating the GaAs layer to a temperature of 570°

C. or more; and

wherein the performing an anneal comprises maintaining the temperature of 570°

C. or more for 10 minutes.