Wireless MEMS capacitive sensor for physiologic parameter measurement

  • US 6,926,670 B2
  • Filed: 01/22/2002
  • Issued: 08/09/2005
  • Est. Priority Date: 01/22/2001
  • Status: Active Grant
First Claim
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1. An implantable microfabricated sensor device for measuring a physiologic parameter of interest within a patient, said sensor comprising:

  • an implantable sensing device, said sensing device being a micro electromechanical system (MEMS) comprising a substrate, an integrated inductor formed on the substrate, at least one sensor responsive to the physiologic parameters and being formed at least in part on the substrate, a plurality of conductive paths electrically connecting said integrated inductor with said sensor, said integrated inductor, said sensor and said conductive paths cooperatively defining an LC tank resonator.

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