Diffractive optical element and optical system having the same

• US 6,937,397 B2
• Filed: 09/07/2001
• Issued: 08/30/2005
• Est. Priority Date: 09/08/2000
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Ogawa, Hideki, Okuno, Takeharu
• Primary Examiner(s): Nguyen, Thong
• Assistant Examiner(s): Lavarias, Arnel C.
• Application Number:
  US09/947,498
• Publication Number:
  US 20020105726A1
• Time in Patent Office: 1,453 Days
• Field of Search: 359/569, 359/566, 359/558, 359/570, 359/571, 359/574, 359/575, 359/576, 359/565
• US Class Current: 359/575
• CPC Class Codes: G02B 27/4211 correcting chromatic aberrations G02B27/0056, G02B27/4222, G02B27/4227 take precedence
• CPC Class Codes: G02B 27/4216 correcting geometrical aberrations
• CPC Class Codes: G02B 27/4272 having plural diffractive elements positioned sequentially along the optical path
• CPC Class Codes: G02B 27/4277 being separated by an air space
• CPC Class Codes: G02B 5/1895 such optical elements having dioptric power

Abstract

Disclosed is a diffractive optical element which includes a plurality of diffraction gratings being made of materials having different dispersions and being formed in accumulation, wherein at least one of the diffraction gratings has a varying grating thickness.

Claims

1. A diffractive optical element, comprising:

a plurality of laminated diffraction gratings comprising two diffraction gratings made of materials having different dispersions; and

a substrate having at least one of the plurality of gratings formed on its top surface,

wherein light incident on the optical element is influenced by diffracting action as it passes through the plurality of diffraction gratings and the substrate,

wherein at least one of said plurality of diffraction gratings has a varying maximum grating thickness, which varies in accordance with a position along said at least one diffraction grating, and

wherein at least one of said plurality of diffraction gratings has a varying thickness from the top face of the substrate to individual troughs of said at least one diffraction grating, which varies in accordance with a position along said at least one diffraction grating, thereby providing an aspheric action.

2. A diffractive optical element according to claim 1, wherein the maximum grating thickness of said at least one diffraction grating varies to gradually decrease from a central region of said diffractive optical element toward a peripheral region thereof.

3. A diffractive optical element according to claim 1, wherein the maximum grating thickness of said at least one diffraction grating varies to gradually increase from a central region of said diffractive optical element toward a peripheral region thereof.

4. A diffractive optical element according to claim 1, wherein said plurality of diffraction gratings include two diffraction gratings which are laminated so as to be opposed to each other with an air layer being interposed therebetween.

5. A diffractive optical element according to claim 1 comprising:

a plurality of diffraction gratings formed in layers of a number L+1, ranging from an α

-th layer to an (α

+L)-th layer in an order from the light entrance side;

wherein said diffractive optical element includes a region arranged so that, where a diffraction order is an m-th order and when a particular light ray is incident on a j-th diffraction grating element, in an order from the center, in an α

-th layer diffraction grating with an incidence angle θ

α

(j), the grating thickness of each grating element of the diffraction gratings changes to satisfy the following condition, with respect to plural design wavelengths set for a common value of m, $\underset{i=\mathrm{\alpha <br><br>}}{\overset{d+L}{\sum <br><br>}}<br><br>\left[\mathrm{ni}<br><br>\text{\hspace{1em}<br><br>}<br><br>\cos <br><br>\text{\hspace{1em}<br><br>}<br><br>\mathrm{\theta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>i<br><br>\left(j\right)-{\mathrm{ni}}^{\mathrm{\prime <br><br>}}<br><br>\cos <br><br>\text{\hspace{1em}<br><br>}<br><br>\mathrm{\theta <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>{i<br><br>\text{\hspace{1em}<br><br>}}^{\mathrm{\prime <br><br>}}<br><br>\left(j\right)\right]<br><br>d<br><br>\text{\hspace{1em}<br><br>}<br><br>i<br><br>\left(j\right)=\mathrm{Km}<br><br>\text{\hspace{1em}<br><br>}<br><br>\mathrm{\lambda <br><br>}<br><br>\text{\hspace{1em}<br><br>}<br><br>0$

wherein

ni is the refractive index of a light entrance side medium of a diffraction grating in the i-th layer (α

≦

i≦

α

+L) with respect to a wavelength λ

0;

ni′

is the refractive index of a light exit side medium of the i-th layer diffraction grating;

θ

i(j) is the incidence angle of the particular light ray on the j-th grating element in an order from the center, of the i-th layer diffraction grating;

θ

i′

(j) is the emission angle of the particular light ray from the j-th grating element in an order from the center, of the i-th layer diffraction grating;

di(j) is the maximum grating thickness of the j-th grating element in an order from the center, of the i-th layer diffraction grating, wherein it takes a positive value when the light exit side medium is present at a side where positive first order light relative to zeroth order light is produced, while it takes a negative value when the light entrance side medium is present there;

K is an arbitrary real number not less than 0.9 and not greater than 1.1; and

λ

0 is a design wavelength.

6. A diffractive optical element according to claim 5, wherein the design wavelength is that of visible light.

7. A diffractive optical element according to claim 5, wherein, in said plurality of diffraction gratings, the maximum grating thickness of each diffraction grating is not less than 2.0 microns and not greater than 30 microns.

8. A diffractive optical element according to claim 5, wherein at least one of said plurality of diffraction gratings is formed by molding an energy setting material.

9. A diffractive optical element according to claim 1, wherein the top surface is flat or curved.

10. A diffractive optical element according to claim 1, wherein, in said plurality of diffraction gratings, the maximum grating thickness of each diffraction grating is not less than 2.0 microns and not greater than 30 microns.

11. A diffractive optical element according to claim 1, wherein at least one of said plurality of diffraction gratings is formed by molding an energy setting material.

12. An optical system including at least one diffractive optical element as recited in claim 1.