Differential capacitance measurement

• US 6,949,937 B2
• Filed: 01/13/2004
• Issued: 09/27/2005
• Est. Priority Date: 12/23/2003
• Status: Expired due to Fees

• Current Assignee: Dialog Semiconductor GmbH (Renesas Electronics Corporation)
• Original Assignee: Dialog Semiconductor GmbH (Renesas Electronics Corporation)
• Inventors: Knoedgen, Horst
• Primary Examiner(s): Nguyen, Vincent Q.
• Assistant Examiner(s): Nguyen, Hoai-An D.
• Application Number:
  US10/756,709
• Publication Number:
  US 20050134292A1
• Time in Patent Office: 623 Days
• Field of Search: 324658-689, 324/649, 324/600, 324/382, 324/519, 324/548, 324/76.66, 340/870.37, 73/74, 737/18, 737/24, 737/80, 733/350.4, 735/143.2, 738/622.2, 738/623.37, 738/625.2, 738/626.26
• US Class Current: 324/658
• CPC Class Codes: G01D 5/241 by relative movement of capacitor electrodes
• CPC Class Codes: G01R 27/2605 Measuring capacitance capacitive sensors G01D5/24

Abstract

A circuit and method are given, which realizes a stable yet sensitive differential capacitance measuring device with good RF-suppression and with very acceptable noise features for use in capacitive sensor evaluation systems. By evaluating the difference of capacitor values only—with the help of a switched capacitor front-end—large spreads of transducer capacitor values are tolerable. Furthermore a mode of operation can be set up, where no essential galvanic connection between sensor input and the active read-out input at any given time is existing. The solution found exhibits a highly symmetrical construction. Using the intrinsic advantages of that solution the circuit of the invention is manufactured as an integrated circuit with standard CMOS technology at low cost.

Claims

1. A circuit, capable of evaluating small variations in magnitude of capacitance within a differential capacitor arrangement forming a transducer and thus apt for real-time evaluating and measuring said differential capacitive transducers with high sensitivity and great noise immunity, implemented as a pair of sensor capacitors, connected normally to the two input terminals of said circuit and delivering a precise and stable output signal as result of said measurement to its output terminals, comprising:

capacitive sensor elements or transducers in form of capacitors, connected to input terminals of evaluation means and designated as transducer capacitors;

means for evaluating said small variations in magnitude of capacitance in real-time and thus measuring said capacitive sensor elements, delivering output signals as result of said measurement and consisting of some means for charging and discharging said transducer capacitors with charges delivered by appropriate supply voltages, means for transferring and exchanging said charges implemented in form of a switching network, and means for transforming said transferred and applicatively exchanged charges into voltages equivalent to said output signals implemented within read-out system;

means for internal intermediate storage of electrical energy, assembled as a four-pole (two-port) circuit exhibiting two input and two output terminals; and

amplifier stages connected to said output terminals of said means for internal intermediate storage of electrical energy, delivering a boosted output signal at the output terminals of the circuit.

2. The circuit according to claim 1 wherein said means for evaluating said small variations in magnitude of capacitance in real-time and thus measuring said capacitive sensor elements is implemented as a switched capacitor front-end, comprising:

means for transferring and exchanging said charges implemented in form of a switching network featuring a pair of switching network input terminals, a pair of switching network output terminals, and terminals for supply voltages and/or a ground terminal;

means for transforming said transferred charges into voltages thus implementing said read-out system featuring a pair of read-out system input terminals, a pair of read-out system output terminals, and terminals for supply voltages and/or a ground terminal; and

a pair of two capacitors where this pair of capacitors represent said means for internal intermediate storage of electrical energy now in form of electrical charges;

each capacitor with a first and a second electrode and each capacitor connected with said first electrode to its respective terminal of said pair of switching network output terminals, furthermore connected with said first electrode via some connection means to its respective terminal of said pair of read-out system input terminals and both capacitors connected together with their other, second electrodes to a common point as said virtual ground terminal.

3. The circuit according to claim 2 wherein each of said connection means consists of a simple conducting wire connection.

4. The circuit according to claim 2 wherein each of said connection means consists of a single pole switch.

5. The circuit according to claim 1 wherein said means for charging and discharging said transducer capacitors with charges delivered by appropriate supply voltages comprises:

one in-out connection terminal for each of said capacitors;

two connection terminals for said supply voltages and/or ground; and

one pair of switches for every of said capacitors, consisting of two single pole on-off switches with a first and a second pin, wherefrom said first pins are connected together and equally to one electrode of said transducer capacitors and also to said in-out connection terminal, wherefrom said second pins are connected pairwise to said connection terminals for said power supplies and/or said ground for each of said capacitors and whereby said switches are being operated—

i.e. closed (on) and opened (off)—

crosswise by pairs in an alternating fashion thus alternatively charging and discharging said transducer capacitors.

6. The circuit according to claim 5 wherein said switches are implemented as Field Effect Transistors (FETs).

7. The circuit according to claim 1 wherein said means for transferring and exchanging said charges implemented in form of a switching network comprises:

one pair of input terminals, i.e. one input connection terminal for each of said transducer capacitors;

one pair of output terminals, i.e. one output connection terminal corresponding to each of said transducer capacitors and connected appropriately to said means for internal intermediate storage of electrical charges; and

two pairs of switches, thereby one pair of said switches being associated with each of said transducer capacitors and being interconnected to said pair of output terminals, consisting of two single pole on-off switches with a first and a second pin each, said first pins of each switch of every pair of said switches connected each with one of said input terminals thus enabling a crossover connection possibility for each output terminal, whereto said second pins of said switches are connected in such a way, that each of said second pins of said pairs of switches is connecting together to one of said output terminals;

showing an IXI-configuration for said pairs of switches, where the terminal points may be thought of being the common points on top and at bottom of said IXI-configuration.

8. The circuit according to claim 7 wherein said switches are implemented as Field Effect Transistors (FETs).

9. The circuit according to claim 1 wherein said means for internal intermediate storage of electrical energy stores said energy in form of electrical charges and comprises capacitors connected to the output terminals of said switching network.

10. The circuit according to claim 9 wherein said capacitors for said storage of electrical charges are composed of two capacitors, which are—

in connection with said switching network—

functioning as a low-pass filter.

11. The circuit according to claim 9 wherein said capacitors for said storage of electrical charges are composed of two capacitors, each connected with one electrode to said output terminals of said switching network and their other electrodes connected together at one common point.

12. The circuit according to claim 11 wherein said common point is tied to ground.

13. The circuit according to claim 11 wherein said common point is tied to a reference voltage, furnished as output signal by said read-out system.

14. The circuit according to claim 13 wherein said read-out system generates said output signal, comprising:

a digital/analog converter, delivering said reference voltage to said common point; and

an analog/digital converter itself being biased by reference voltages, derived with resistive dividers from said supply voltages thus being designed for adoption of a so-called ratiometric operation mode.

15. The circuit according to claim 1 wherein said means for transforming said transferred and applicatively exchanged charges into voltages equivalent to said output signal is implemented within said read-out system, comprising:

one pair of single pole on-off input switches, each switch connected with one pin to said means for internal intermediate storage of electrical charges;

one pair of single pole on-off output switches, each switch connected with one pin to said amplifier stages and the other pins of said input and output switches, both respectively connected together at one connection point, thus connecting each of said input and output switches in series; and

one floating ‘

difference’

capacitor, its electrodes connected between said connection points of said input and said output switches connected in series.

16. The circuit according to claim 15 wherein said ‘

difference’

capacitor—

in connection with said pair of single pole on-off input switches—

is dimensioned and functioning as a low-pass filter.

17. The circuit according to claim 15 wherein said switches are implemented as Field Effect Transistors (FETs).

18. The circuit according to claim 1 wherein said means for transforming said transferred and applicatively exchanged charges into voltages equivalent to said output signal is implemented within said read-out system, comprising:

one pair of single pole on-off input switches, each switch connected with one pin to said means for internal intermediate storage of electrical energy;

one pair of single pole on-off output switches, each switch connected with one pin to said amplifier stages and the other pins of said input and output switches, both respectively connected together at one connection point, thus connecting each of said input and output switches in series; and

two capacitors, its electrodes connected on one side to said connection point between said input and said output switches respectively and on the other side connected together to a common point.

19. The circuit according to claim 18 wherein said capacitors—

in connection with said pair of single pole on-off input switches—

are dimensioned and functioning as a low-pass filter.

20. The circuit according to claim 18 wherein said switches are implemented as Field Effect Transistors (FETs).

21. The circuit according to claim 1 wherein said means for transforming said transferred and applicatively exchanged charges into voltages equivalent to said output signal is implemented within said read-out system which comprises active circuits and resistors, connected to a common point tied to a reference voltage.

22. The circuit according to claim 21 wherein said read-out system generates said output signal, comprising:

a digital/analog converter, delivering said reference voltage to said common point; and

an analog/digital converter, being fed by said voltages equivalent to said output signal and itself being biased by reference voltages, derived with resistive dividers from said supply voltages thus being designed for adoption of a so-called ratiometric operation mode.

23. The circuit according to claim 1 wherein said amplifier stages connected to the output terminals of said means for internal intermediate storage of electrical energy are implemented as a multiple stage amplifier, which starts with a differential amplifier stage as a differential operational amplifier and ends with an impedance converter stage as a non-inverting operational amplifier, delivering said precise and stable output signal.

24. The circuit according to claim 1 wherein said means for evaluating said small variations in magnitude of capacitance in real-time and thus measuring said capacitive sensor elements is implemented as a switched capacitor front-end, comprising:

two input terminals for connecting said two capacitive sensor elements designated as transducer capacitors;

two supply voltage terminals for connecting appropriate positive and negative supply voltages;

one virtual ground terminal for connecting to a reference potential;

two output terminals for delivering said output signal as result of said measurement;

two internal storage capacitors for the intermediate storage of the difference of charges from said transducer capacitors;

two pairs of switches for connecting said two transducer capacitors to said positive and negative supply voltages, whereby each transducer capacitor is separately and alternatively being connected to either said positive or said negative supply voltage;

two pairs of switches for connecting said capacitive sensor elements to said two internal storage capacitors;

whereby both transducer capacitors are commonly but alternatively being connected to either the first internal storage capacitor or the second internal storage capacitor;

one ‘

difference’

capacitor for the summing up of the charges from said two internal storage capacitors onto said ‘

difference’

capacitor;

one pair of switches for connecting said two internal storage capacitors to said ‘

difference’

capacitor; and

one pair of switches for connecting said ‘

difference’

capacitor with its appearing output voltage to said two output terminals for delivering said output signal.

25. The circuit according to claim 24 wherein at any time given an essential galvanic connection from said input terminals—

whereto said capacitive sensor elements are connected—

to the output terminals of said read-out system is avoided, thus featuring an excellent radio frequency noise suppression from input to output and vice-versa.

26. The circuit according to claim 24 whereby extreme symmetrical construction principles are observed, symmetrical in view of the arrangement of all paired capacitors, all paired switches and all supply voltage and connection lines used within all said means of the circuit, particularly regarding their positions relating to each other and especially relating to ground, thus resulting in an excellent 50/60 Hz noise insensitivity of the circuit.

27. The circuit according to claim 24 wherein said switches are implemented as Field Effect Transistors (FETs).

28. The circuit according to claim 24 manufactured in integrated circuit technology.

29. The circuit according to claim 24 manufactured as an integrated circuit in CMOS technology.

30. The circuit according to claim 1 wherein at any time given an essential galvanic connection from said input terminals—

whereto said capacitive sensor elements are connected—

to the output terminals of said read-out system is avoided, thus featuring an excellent radio frequency noise suppression from input to output and vice-versa.

31. The circuit according to claim 1 whereby extreme symmetrical construction principles are observed, symmetrical in view of the arrangement of all paired capacitors, all paired switches and all supply voltage and connection lines used within all said means of the circuit, particularly regarding their positions relating to each other and especially relating to ground, thus resulting in an excellent 50/60 Hz noise insensitivity of the circuit.

32. The circuit according to claim 1 used as driver circuit for actuator buttons implementing a non-mechanical switch.

33. The circuit according to claim 1 used as driver circuit for proximity sensors using the change of the dielectric constant of a dedicated capacitor element.

34. The circuit according to claim 1 used as evaluation circuit for sensors detecting humidity or for measuring moisture.

35. The circuit according to claim 1 used as driver or evaluation circuit for non-contact displacement measurements as adopted in capacitive displacement transducers.

36. The circuit according to claim 1 manufactured in integrated circuit technology.

37. The circuit according to claim 1 manufactured as an integrated circuit in CMOS technology.

38. A circuit, capable of evaluating small variations in magnitude of capacitance within a differential capacitor arrangement forming a transducer and thus apt for real-time evaluating and measuring said differential capacitive transducers with high sensitivity and great noise immunity, implemented as a pair of sensor capacitors, connected normally to the two input terminals of said circuit and delivering a precise and stable output signal as result of said measurement to its output terminals, comprising:

capacitive sensor elements or transducers in form of capacitors, connected to said input terminals of said circuit and designated as transducer capacitors;

two input terminals for connecting said two capacitive sensor elements designated as transducer capacitors;

two supply voltage terminals for connecting appropriate positive and negative supply voltages;

one virtual ground terminal for connecting to a reference potential;

two output terminals for delivering said output signal as result of said measurement;

two internal storage capacitors for the intermediate storage of the difference of charges from said transducer capacitors;

two pairs of switches for connecting said two transducer capacitors to said positive and negative supply voltages, whereby each transducer capacitor is separately and alternatively being connected to either said positive or said negative supply voltage;

two pairs of switches for connecting said capacitive sensor elements to said two internal storage capacitors;

whereby both transducer capacitors are commonly but alternatively being connected to either the first internal storage capacitor or the second internal storage capacitor;

one ‘

difference’

capacitor for the summing up of the charges from said two internal storage capacitors onto said ‘

difference’

capacitor;

one pair of switches for connecting said two internal storage capacitors to said ‘

difference’

capacitor;

one pair of switches for connecting said ‘

difference’

capacitor with its appearing output voltage to two internal terminals;

one amplifier stage connected to said two internal terminals and implemented as a multiple stage amplifier, which starts with a differential amplifier stage as a differential operational amplifier and ends with an impedance converter stage as a non-inverting operational amplifier, delivering said precise and stable output signal.

39. The circuit according to claim 38 wherein at any time given an essential galvanic connection from said input terminals—

whereto said capacitive sensor elements are connected—

to the output terminals of said read-out system is avoided, thus featuring an excellent radio frequency noise suppression from input to output and vice-versa.

40. The circuit according to claim 38 whereby extreme symmetrical construction principles are observed, symmetrical in view of the arrangement of all paired capacitors, all paired switches and all supply voltage and connection lines used within all said means of the circuit, particularly regarding their positions relating to each other and especially relating to ground, thus resulting in an excellent 50/60 Hz noise insensitivity of the circuit.

41. The circuit according to claim 38 used as driver circuit for actuator buttons implementing a non-mechanical switch.

42. The circuit according to claim 38 used as driver circuit for proximity sensors using the change of the dielectric constant of a dedicated capacitor element.

43. The circuit according to claim 38 used as evaluation circuit for sensors detecting humidity or for measuring moisture.

44. The circuit according to claim 38 used as driver or evaluation circuit for non-contact displacement measurements as adopted in capacitive displacement transducers.

45. The circuit according to claim 38 wherein said switches are implemented as Field Effect Transistors (FETs).

46. The circuit according to claim 38 manufactured in integrated circuit technology.

47. The circuit according to claim 38 manufactured as an integrated circuit in CMOS technology.

48. A method for differential capacitance measurements, capable of evaluating small capacitance variations within a differential capacitor arrangement forming a transducer and thus apt for real-time evaluation and measurement of said differential capacitive transducers with high sensitivity and great noise immunity, comprising:

providing a sensor element with at least two variable transducer capacitors configured as a differential capacitor for an evaluation by the following measurement procedure;

providing a means for a real-time evaluation of the operational variations of said transducer capacitor values in form of a switched capacitor (SC) front-end deploying two input terminals for connecting said transducer capacitors and two output terminals for delivering an appropriate output signal as result of the evaluation measurement;

providing appropriate supply voltages for said means;

providing—

within said SC front-end—

as switched charge exchange network a general switching circuit part for generating charges, charge transfer and charge exchange;

providing a means for the post processing of said output signal in form of amplifier stages for level and reference conversion, buffering and boosting of said output signal;

making available—

within said SC front-end—

said appropriate supply voltages for charging each of said transducer capacitors with the help of two appropriate pairs of switches belonging to said switched charge exchange network;

making available—

within said SC front-end—

a pair of internal storage capacitors together with two appropriate pairs of switches—

also belonging to said switched charge exchange network—

for transport of charges from said transducer capacitors to said internal storage capacitors;

making available—

within said SC front-end—

a read-out system with input and output terminals—

which, together with two optionally and appropriately used switches is capable of interpreting said stored charge on said internal storage capacitors thus preparing the delivery of said output signal as result of said evaluation measurement;

establishing a periodic timing schedule (comprising at least three separate time segments each again separable in some number of time slots) for the pertinent operation of the switches within said SC front-end for said charging of said transducer capacitors in time segment I, for said charge transport from said transducer capacitors to said read-out system in time segment II and for said delivery and said interpreting of said output signal in time segment III;

determining for said SC front-end the charging and discharging of both of said transducer capacitors by means of two pairs of switches with regard to said appropriate corresponding supply voltages;

determining within said SC front-end the transport of charges from both of said transducer capacitors to said separate and respective internal storage capacitors by means of two pairs of switches;

determining within said SC front-end the transport of charges from both of said internal storage capacitors to said input terminals of said read-out system by some means, thus establishing an input voltage for said read-out system;

determining within said read-out system the conversion of said input voltage at said input terminals into an output voltage at said output terminals, thus producing said output voltage for said SC front-end;

executing the charging of the first of said transducer capacitors and the discharging of the second of said transducer capacitors by means of the first pair of said switches with regard to said appropriate corresponding supply voltages e.g. during a slot in time segment I;

executing the transport of charges from both of said transducer capacitors to the first of said separate internal storage capacitors by means of the first pair of said switches during a slot in time segment I;

executing the discharging of the first of said transducer capacitors and the charging of the second of said transducer capacitors by means of the second pair of said switches with regard to said appropriate corresponding supply voltages e.g. during a slot in time segment II;

executing the transport of charges from both of said transducer capacitors to the second of said separate internal storage capacitors by means of the second pair of said switches during a slot in time segment II;

restarting optionally the execution of the timing schedule from the beginning with segment I and repeat the according processing steps during time segments I and II continuously until a terminating condition is reached;

executing the transport of charges from both of said internal storage capacitors to said input terminals of said read-out system by some means, thus establishing an input voltage for said read-out system e.g. during time segment III;

executing within said read-out system the conversion of said input voltage at said input terminals into an output voltage at said output terminals, thus producing said output voltage for said SC front-end e.g. during time segment III, and thus furnishing a floating output voltage signal as said result of said evaluation measurement;

restarting the execution of the timing schedule from the beginning with segment I and repeat the according processing steps e.g. during time segments I, II and III continuously;

conditioning said floating output voltage signal as said result of said evaluation measurement at said output terminals continuously by amplifying the difference of said floating voltages within a first amplifier stage of said amplifier stages for said level and reference conversion; and

conditioning further on the output voltage signal of said first amplifier stage of said amplifier stages for said buffering and boosting of said output signal continuously in a second single ended amplifier stage thus resulting in a final gain adjusted strong output signal of said difference capacitance measurement.

49. A method for differential capacitance measurements, capable of evaluating small capacitance variations within a differential capacitor arrangement forming a transducer and thus apt for real-time evaluation and measurement of said differential capacitive transducers with high sensitivity and great noise immunity, comprising:

providing a sensor element with at least two variable transducer capacitors configured as a differential capacitor for an evaluation by the following measurement procedure;

providing a means for a real-time evaluation of the operational changes of said transducer capacitor values in form of a switched capacitor (SC) front-end deploying two input terminals for connecting said transducer capacitors and two output terminals for delivering an appropriate floating output signal as result of said evaluation measurement;

providing appropriate supply voltages for said means;

providing a means for the post processing of said output signal in form of amplifier stages for level and reference conversion, buffering and boosting of said output signal;

making available—

within said SC front-end—

appropriate supply voltages for charging each of said transducer capacitors with the help of two appropriate pairs of switches;

making available—

within said SC front-end—

a pair of internal storage capacitors together with two appropriate pairs of switches for transport of charges from said transducer capacitors to said internal storage capacitors;

making available—

within said SC front-end—

a ‘

difference’

capacitor together with two appropriate pairs of switches for loading and unloading said ‘

difference’

capacitor thus delivering said output signal as result of the evaluation measurement;

establishing a periodic timing schedule (consisting of three separate time segments) for the pertinent operation of the switches within said SC front-end for said charging of said transducer capacitors—

in time segment I—

, for said charge transport from said transducer capacitors to said internal storage capacitors—

in time segment II and for said loading and unloading of said internal ‘

difference’

capacitor—

in time segment III;

determining for said SC front-end the charging and discharging of both of said transducer capacitors by means of two pairs of switches with regard to said appropriate corresponding supply voltages;

determining within said SC front-end the transport of charges from both of said transducer capacitors to said separate and respective internal storage capacitors by means of two pairs of switches;

determining within said SC front-end the transport of charges from both of said internal storage capacitors to said one internal ‘

difference’

capacitor by means of one pair of switches, thus loading said internal ‘

difference’

capacitor;

determining within said SC front-end the transfer of charge from said one internal ‘

difference’

capacitor by means of one pair of switches to said output voltage terminals, thus unloading said internal ‘

difference’

capacitor;

executing the charging of the first of said transducer capacitors and the discharging of the second of said transducer capacitors by means of the first pair of said switches with regard to said appropriate corresponding supply voltages during time segment I;

executing the transport of charges from both of said transducer capacitors to the first of said separate internal storage capacitors by means of the first pair of said switches during time segment I;

executing the discharging of the first of said transducer capacitors and the charging of the second of said transducer capacitors by means of the second pair of said switches with regard to said appropriate corresponding supply voltages during time segment II;

executing the transport of charges from both of said transducer capacitors to the second of said separate internal storage capacitors by means of the second pair of said switches during time segment I1;

executing the transport of charges from both of said internal storage capacitors to said one internal ‘

difference’

capacitor by means of said one pair of switches, thus loading said internal ‘

difference’

capacitor during time segment III;

executing the transfer of charge from said one internal ‘

difference’

capacitor by means of said one other pair of switches to said output voltage terminals, thus unloading said internal ‘

difference’

capacitor during time segment III, and thus furnishing a floating output voltage signal as said result of said evaluation measurement;

restarting the execution of the timing schedule from the beginning with segment I and repeating the according processing steps during time segments I, II and III continuously;

conditioning said floating output voltage signal as said result of said evaluation measurement at said output terminals continuously by amplifying the difference of said floating voltages within a first amplifier stage of said amplifier stages for said level and reference conversion; and

conditioning further on the output voltage signal of said first amplifier stage of said amplifier stages for said buffering and boosting of said output signal continuously in a second single ended amplifier stage thus resulting in a final gain adjusted strong output signal of said difference capacitance measurement.

50. The method according to claim 49 wherein the operations and/or activities during said time segment I and/or said time segment II are repeated severalfold until a termination condition is fulfilled.