Display device
First Claim
1. A display device comprising:
- a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
a planarization layer formed over the active layer;
a barrier layer formed on the planarization layer; and
a drain electrode formed on the barrier layer, the light emitting element comprising;
a pixel electrode in contact with an upper surface of the drain electrode on the barrier layer;
a light emitting member formed in contact with the pixel electrode; and
an opposing electrode facing the pixel electrode through the light emitting member, wherein the drain electrode is electrically connected with the active layer through a first opening formed in the gate insulating film and the barrier layer and a second opening formed in the planarization layer, and wherein the barrier layer covers an upper surface of the planarization layer and a side surface of the second opening formed in the planarization layer.
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Accused Products
Abstract
A display device according to the present invention includes: a planarization layer for insulating between a gate electrode etc. and a data wiring, a drain electrode, or the like of the transistor; and a barrier layer that is formed on an upper surface or lower surface of the planarization layer and at the same time, adapted to suppress diffusion of moisture or degassing components from the planarization layer. The display device adopts a device structure effective in reducing the plasma damage on the planarization layer by devising a positional relationship between the planarization layer and the barrier layer. Also, in combination with a novel structure as a structure for a pixel electrode, effects such as an increase in luminance can be provided as well.
127 Citations
33 Claims
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1. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
a planarization layer formed over the active layer;
a barrier layer formed on the planarization layer; and
a drain electrode formed on the barrier layer, the light emitting element comprising;
a pixel electrode in contact with an upper surface of the drain electrode on the barrier layer;
a light emitting member formed in contact with the pixel electrode; and
an opposing electrode facing the pixel electrode through the light emitting member, wherein the drain electrode is electrically connected with the active layer through a first opening formed in the gate insulating film and the barrier layer and a second opening formed in the planarization layer, and wherein the barrier layer covers an upper surface of the planarization layer and a side surface of the second opening formed in the planarization layer. - View Dependent Claims (7, 8, 9, 16, 17, 18, 19, 23, 24)
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2. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
a planarization layer formed over the active layer;
a barrier layer formed on the planarization layer; and
a drain electrode formed on the barrier layer, the light emitting element comprising;
a pixel electrode in contact with a lower surface of the drain electrode on the barrier layer;
a light emitting member formed in contact with the pixel electrode; and
an opposing electrode facing the pixel electrode through the light emitting member, wherein the drain electrode is electrically connected with the active layer through a first opening formed in the gate insulating film and the barrier layer and a second opening formed in the planarization layer, and wherein the barrier layer covers an upper surface of the planarization layer and a side surface of the second opening formed in the planarization layer.
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3. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
a barrier layer formed over the active layer;
an insulating layer formed on the barrier layer;
a drain electrode formed on the insulating layer; and
a planarization layer formed on a source electrode or the drain electrode, the light emitting element comprising;
a pixel electrode formed on the planarization layer and electrically connected with the drain electrode through an opening formed in the planarization layer;
a light emitting member formed in contact with the pixel electrode; and
an opposing electrode facing the pixel electrode through the light emitting member, and wherein the drain electrode is electrically connected with the active layer through a first opening formed in the gate insulating film and the barrier layer, and a second opening formed in the insulating layer. - View Dependent Claims (6)
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4. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
an insulating layer formed over the active layer;
a barrier layer formed on the insulating layer;
a drain electrode formed on the barrier layer; and
a planarization layer formed on the drain electrode, the light emitting element comprising;
a pixel electrode formed on the planarization layer and electrically connected with the drain electrode through an opening formed in the planarization layer;
a light emitting member formed in contact with the pixel electrode; and
an opposing electrode facing the pixel electrode through the light emitting member, wherein the drain electrode is electrically connected with the active layer through a first opening formed in the gate insulating film and the barrier layer and a second opening formed in the insulating layer, and wherein the barrier layer covers an upper surface of the insulating layer and a side surface of the second opening formed in the insulating layer.
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5. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
an insulating layer formed over the active layer;
a barrier layer formed on the insulating layer;
a drain electrode formed on the barrier layer; and
a planarization layer formed on the drain electrode, the light emitting element comprising;
a pixel electrode formed on the planarization layer and electrically connected with the drain electrode through an opening formed in the planarization layer;
a light emitting member formed in contact with the pixel electrode; and
an opposing electrode facing the pixel electrode through the light emitting member, wherein the drain electrode is electrically connected with the active layer through an opening formed in the gate insulating film, the insulating layer, and the barrier layer, and wherein the barrier layer covers an upper surface of the insulating layer.
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10. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprises a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
a barrier layer formed over the active layer;
a planarization layer formed on the barrier layer; and
a drain electrode formed on the planarization layer, wherein the drain electrode comprises a laminate structure of a first metal film and a second metal film, and includes a portion where a part of the second metal film is removed to expose the first metal film, the light emitting element comprising;
the portion where the first metal film is exposed;
a light emitting member formed in contact with the portion where the first metal film is exposed; and
an opposing electrode facing the portion where the first metal film is exposed through the light emitting member, and wherein the drain electrode is electrically connected with the active layer through a first opening formed in the gate insulating film and the barrier layer and a second opening formed in the planarization layer. - View Dependent Claims (13, 14, 15)
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11. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
a planarization layer formed over the active layer;
a barrier layer formed on the planarization layer; and
a drain electrode formed on the barrier layer, wherein the drain electrode comprises a laminate structure of a first metal film and a second metal film, and includes a portion where a part of the second metal film is removed to expose the first metal film, the light emitting element comprising;
the portion where the first metal film is exposed;
a light emitting member formed in contact with the portion where the first metal film is exposed; and
an opposing electrode facing the portion where the first metal film is exposed through the light emitting member, and wherein the barrier layer covers an upper surface of the planarization layer end a side surface of an opening formed in the insulating layer.
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12. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
a planarization layer formed over the active layer;
a barrier layer formed on the planarization layer; and
a drain electrode formed on the barrier layer, wherein the drain electrode comprises a laminate structure of a first metal film and a second metal film, and includes a portion where a part of the second metal film is removed to expose the first metal film, the light emitting element comprising;
the portion where the first metal film is exposed;
a light emitting member formed in contact with the portion where the first metal film is exposed; and
an opposing electrode facing the portion where the first metal film is exposed through the light emitting member, wherein a source electrode and the drain electrode are electrically connected with the active layer through an opening formed in the gate insulating film, the insulating layer, and the barrier layer, and wherein the barrier layer covers an upper surface of the planarization layer.
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20. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
a barrier layer formed over the active layer;
an insulating layer formed on the barrier layer;
a drain electrode formed on the insulating layer; and
a planarization layer formed on a source electrode or the drain electrode, the light emitting element comprising;
a pixel electrode formed on the planarization layer and electrically connected with the drain electrode through an opening formed in the planarization layer;
a light emitting member formed in contact with the pixel electrode; and
an opposing electrode facing the pixel electrode through the light emitting member, and wherein the drain electrode is electrically connected with the active layer through an opening formed in the gate insulating film, the barrier layer and the insulating layer. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33)
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21. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
a barrier layer formed over the active layer;
an insulating layer formed on the barrier layer;
a drain electrode formed on the insulating layer; and
a planarization layer formed on a source electrode or the drain electrode, the light emitting element comprising;
a pixel electrode formed on the planarization layer and electrically connected with an upper surface of the drain electrode through an opening formed in the planarization layer;
a light emitting member formed in contact with the pixel electrode; and
an opposing electrode facing the pixel electrode through the light emitting member, and wherein the drain electrode is electrically connected with the active layer through an opening formed in the gate insulating film, the barrier layer and the insulating layer.
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22. A display device comprising:
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a transistor formed over a substrate; and
a light emitting element electrically connected with the transistor, the transistor comprising;
an active layer comprising a semiconductor;
a gate insulating film formed in contact with the active layer;
a gate electrode adjacent to the active layer with the gate insulating film interposed therebetween;
a barrier layer formed over the active layer;
an insulating layer formed on the barrier layer;
a drain electrode formed on the insulating layer; and
a planarization layer formed on a source electrode or the drain electrode, the light emitting element comprising;
a pixel electrode formed on the planarization layer and electrically connected with an upper surface of the drain electrode through an opening formed in the planarization layer;
a light emitting member formed in contact with the pixel electrode; and
an opposing electrode facing the pixel electrode through the light emitting member, and wherein the drain electrode is electrically connected with the active layer through a first opening formed in the gate insulating film, the barrier layer, and a second opening formed in the insulating layer.
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Specification