Single mode VCSEL

• US 6,965,626 B2
• Filed: 09/03/2002
• Issued: 11/15/2005
• Est. Priority Date: 09/03/2002
• Status: Expired due to Term

• Current Assignee: II-VI Delaware, Inc. (Coherent Corp.)
• Original Assignee: Finisar Corporation (II-VI Incorporated)
• Inventors: Tatum, James A., Johnson, Ralph H., Guenter, James K
• Primary Examiner(s): Ip, Paul
• Assistant Examiner(s): AL NAZER, LEITH A
• Application Number:
  US10/232,382
• Publication Number:
  US 20040042518A1
• Time in Patent Office: 1,169 Days
• Field of Search: 372/87, 372 43- 46
• US Class Current: 372/87
• CPC Class Codes: H01S 2301/166 Single transverse or lateral mode
• CPC Class Codes: H01S 5/005 Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping H01S5/026, H01S5/18388 take precedence
• CPC Class Codes: H01S 5/0207 Substrates having a special shape
• CPC Class Codes: H01S 5/18305 with emission through the substrate, i.e. bottom emission
• CPC Class Codes: H01S 5/1833 with more than one structure
• CPC Class Codes: H01S 5/18341 Intra-cavity contacts
• CPC Class Codes: H01S 5/18369 based on dielectric materials

Abstract

A VCSEL having a metallic heat spreading layer adjacent a semiconductor buffer layer containing an insulating structure. The heat spreading layer includes an opening that enables light emitted by an active region to reflect from a distributed Bragg reflector (DBR) top mirror located above the heat spreading layer. A substrate is below the active region. A lower contact provides electrical current to that substrate. The lower contact includes an opening that enables light emitted from the active region to reflect from a distributed Bragg reflector (DBR) lower mirror. Beneficially, the substrate includes a slot that enables light to pass through an opening in the lower contact. That slot acts as an alignment structure that enables optical alignment of an external feature to the VCSEL.

Claims

1. A vertical cavity surface emitting laser, comprising:

a bottom distributed Bragg reflector;

an active region over said bottom distributed Bragg reflector;

a top distributed Bragg reflector over said active region; and

a metallic contact between said active region and said top distributed Bragg reflector,

wherein the top and bottom distributed Bragg reflectors define at least a minimum distance over which photons resonate within the vertical cavity surface emitting laser.

2. A vertical cavity surface emitting laser according to claim 1, wherein said active region has at least one quantum well.

3. A vertical cavity surface emitting laser according to claim 1, further including a substrate adjacent said active region.

4. A vertical cavity surface emitting laser according to claim 3, further including a bottom metallic contact over part of said substrate;

and

a bottom distributed Bragg reflector in optical contact with said substrate.

5. A vertical cavity surface emitting laser according to claim 4, wherein said bottom metallic contact is ring-shaped.

6. A vertical cavity surface emitting laser according to claim 4, wherein said bottom distributed Bragg reflector extends over said bottom metallic contact.

7. A vertical cavity surface emitting laser according to claim 4, wherein said substrate includes a cavity, and wherein said bottom distributed Bragg reflector has a surface within said cavity.

8. A vertical cavity surface emitting laser according to claim 7, wherein said bottom metallic contact surrounds said cavity.

9. A vertical cavity surface emitting laser according to claim 1, further including a lower buffer layer in contact with said active region.

10. A vertical cavity surface emitting laser according to claim 9, further including a substrate in contact with said lower buffer layer.

11. A vertical cavity surface emitting laser according to claim 10, further including:

a bottom metallic contact over part of said substrate; and

a bottom distributed Bragg reflector in optical contact with said substrate.

12. A vertical cavity surface emitting laser according to claim 11, wherein said bottom metallic contact is ring-shaped.

13. A vertical cavity surface emitting laser according to claim 11, wherein said substrate includes a cavity, and wherein said bottom distributed Bragg reflector has a surface within said cavity.

14. A vertical cavity surface emitting laser according to claim 13, wherein said bottom metallic contact surrounds said cavity.

15. A vertical cavity surface emitting laser according to claim 13, wherein said cavity is defined by inwardly sloping walls.

16. A vertical cavity surface emitting laser according to claim 13, wherein said cavity is aligned with emitted light.

17. A vertical cavity surface emitting laser according to claim 16, further including an external structure that extends into said cavity.

18. A vertical cavity surface emitting laser according to claim 1, further comprising a doped semiconductive top buffer layer adjacent said active region.

19. A vertical cavity surface emitting laser according to claim 18, further comprising an insulating structure within the top buffer layer.

20. A vertical cavity surface emitting laser according to claim 19, wherein said insulating structure includes an oxide region.

21. A vertical cavity surface emitting laser according to claim 19, wherein said insulating structure is an ion implanted region.

22. A vertical cavity surface emitting laser according to claim 18, further including a tunnel junction between said active region and said top buffer layer.

23. A method of forming a vertical cavity surface emitting laser, comprising:

forming a bottom distributed Bragg reflector on a substrate;

producing an active region on a substrate;

forming a metallic contact over part of the active region; and

forming a top distributed Bragg reflector over the active region, wherein the metallic contact is between the active region and the top distributed Bragg reflector, and wherein the top and bottom distributed Bragg reflectors define at least a minimum distance over which photons resonate within the vertical cavity surface emitting laser.

24. A vertical cavity surface emitting laser, comprising:

a first distributed Bragg reflector;

a second distributed Bragg reflector;

an active region located between said first and said second Bragg reflector; and

a top metallic contact between a portion of said active region and said second distributed Bragg reflector, wherein said first and second distributed Bragg reflectors define at least a minimum distance over which photons resonate within the vertical cavity surface emitting laser.