Fabrication of nanoscale thermoelectric devices
First Claim
1. A method for fabricating a nanowire thermoelectric device comprising the steps of:
- providing a substrate upon which to grow nanowires;
forming a first electrode pattern on a top surface of the substrate, wherein the first electrode pattern comprises bottom electrodes and a first set of connections which connects the bottom electrodes to form first and second groups of electrically connected bottom electrodes;
forming a p-type nanowire on the substrate by activating the first group of electrically connected bottom electrodes during p-type material electrodeposition;
forming a n-type nanowire on the substrate by activating the second group of electrically connected bottom electrodes during n-type material electrodeposition;
forming top electrodes to connect the p-type nanowire to the n-type nanowire;
forming a first set of holes in the substrate to remove the first set of connections between the bottom electrodes;
forming a second set of holes in the substrate to allow for electrical access to the bottom electrodes; and
forming a second bottom electrode pattern, wherein the second bottom electrode pattern comprises the bottom electrodes and a second set of connections between the bottom electrodes, and wherein the second bottom electrode pattern is formed using the second set of holes.
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Abstract
In a method for fabricating a nanowire thermoelectric device, a first electrode pattern is formed on a substrate, wherein the first electrode pattern includes bottom electrodes and a first set of connections which connects the bottom electrodes to form first and second groups of electrically connected bottom electrodes. P-type nanowires and n-type nanowires are selectively formed on the substrate by selectively activating either the first group of electrically connected bottom electrodes and the second group. The p-type and n-type nanowires are then connected by top electrodes. A first set of holes in the substrate is formed to remove the first set of connections. A second set of holes to allow for electrical access to the bottom electrodes, and a second set of connections are formed, so as to result in an array of thermocouples connected to each other in parallel banks of series-connected thermocouples.
64 Citations
11 Claims
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1. A method for fabricating a nanowire thermoelectric device comprising the steps of:
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providing a substrate upon which to grow nanowires; forming a first electrode pattern on a top surface of the substrate, wherein the first electrode pattern comprises bottom electrodes and a first set of connections which connects the bottom electrodes to form first and second groups of electrically connected bottom electrodes; forming a p-type nanowire on the substrate by activating the first group of electrically connected bottom electrodes during p-type material electrodeposition; forming a n-type nanowire on the substrate by activating the second group of electrically connected bottom electrodes during n-type material electrodeposition; forming top electrodes to connect the p-type nanowire to the n-type nanowire; forming a first set of holes in the substrate to remove the first set of connections between the bottom electrodes; forming a second set of holes in the substrate to allow for electrical access to the bottom electrodes; and forming a second bottom electrode pattern, wherein the second bottom electrode pattern comprises the bottom electrodes and a second set of connections between the bottom electrodes, and wherein the second bottom electrode pattern is formed using the second set of holes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification