End-effectors and transfer devices for handling microelectronic workpieces
First Claim
1. A passive end-effector for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
- a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece, the contact sites including at least a first contact site, a second contact site and a third contact site, wherein the first and second contact sites are on a semicircle of the circle and the third contact site is on an opposing semicircle of the circle;
a plurality of passive retainers carried by the body including at least a first retainer at the first contact site, a second retainer at the second contact site and a third retainer at the third contact site, each retainer including an inclined surface that slopes downwardly toward a central region of the circle to support an edge of the workpiece, wherein the inclined surfaces are arranged to hold the workpiece in a plane spaced apart from the body; and
a sensor carried by the body, the sensor having a moveable pin with a contact region at least partially within the circle, wherein the pin moves generally transverse to the plane as the workpiece is loaded on and unloaded from the end-effector.
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Accused Products
Abstract
Passive end-effectors for handling microelectronic workpieces having a perimeter edge circumscribing a first diameter. In one embodiment, a passive end-effector in accordance with the invention includes a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece. The body, for example, can be a paddle or a fork. The passive end-effector can also include a plurality of passive abutments that are carried by the body. The abutments are located along the circle, and the abutments are configured to support the workpiece in a plane spaced apart from the body. The abutments, for example, can each include an inclined surface that slopes downwardly toward a central region of the circle to support only the edge of the workpiece in a manner that suspends or otherwise spaces the workpiece in a plane that is spaced apart from the body. The passive end-effector can further include a sensor assembly that is carried by the body. The sensor includes an engagement member positioned at least partially within the circle, and the engagement member is configured to move generally transverse to the plane as the workpiece is loaded on and unloaded from the end-effector. The passive end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane of the workpiece.
403 Citations
44 Claims
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1. A passive end-effector for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece, the contact sites including at least a first contact site, a second contact site and a third contact site, wherein the first and second contact sites are on a semicircle of the circle and the third contact site is on an opposing semicircle of the circle; a plurality of passive retainers carried by the body including at least a first retainer at the first contact site, a second retainer at the second contact site and a third retainer at the third contact site, each retainer including an inclined surface that slopes downwardly toward a central region of the circle to support an edge of the workpiece, wherein the inclined surfaces are arranged to hold the workpiece in a plane spaced apart from the body; and a sensor carried by the body, the sensor having a moveable pin with a contact region at least partially within the circle, wherein the pin moves generally transverse to the plane as the workpiece is loaded on and unloaded from the end-effector. - View Dependent Claims (2, 3, 4, 5)
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6. A passive end-effector for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece; a plurality of passive retainers carried by the body, each retainer including an inclined surface that slopes downwardly toward a central region of the circle to support the workpiece in a plane spaced apart from the body; a sensor carried by the body, the sensor having a moveable pin with a contact region at least partially within the circle, wherein the pin moves generally transverse to the plane; and wherein the passive end-effector does not include an active member that moves between a release position in which it is engaged with the workpiece and a processing position in which it presses the workpiece against the retainers. - View Dependent Claims (7, 8, 9, 10)
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11. A passive end-effector for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece; a plurality of passive retainers carried by the body, the retainers being located along the circle, and the retainers being configured to support the workpiece in a plane spaced apart from the body; a sensor carried by the body, the sensor having an engagement member positioned at least partially within the circle, wherein the engagement moves generally transverse to the plane; and wherein the passive end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane to press the workpiece against the retainers. - View Dependent Claims (12, 13, 14, 15)
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16. A passive end-effector for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece; a plurality of passive retainers carried by the body, the retainers being located along the circle, and the retainers being configured to support the workpiece in a plane spaced apart from the body; a sensor carried by the body, the sensor having a lever with a contact region at least partially in the circle, a pivot joint coupled to the lever to allow the contact region to move generally transverse to the plane between a raised position and a lowered position; and wherein the passive end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane to press the workpiece against the retainers.
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17. A passive end-effector for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece; a support means for passively supporting the workpiece in a plane spaced apart from the body that does not exert a force against the workpiece parallel to the plane; a sensing means for sensing proper positioning of the workpiece on the passive support means, the sensing means being carried by the body, and the sensing means having a member positioned at least partially within the circle that moves generally transverse to the plane; and wherein the passive end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane to press the workpiece against the retainers.
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18. A transfer device for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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a transport unit configured to move along a transport path; an arm carried by the transport unit; and an end-effector carried by the arm, the end-effector comprising a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece, the contact sites including at least a first contact site, a second contact site and a third contact site, wherein the first and second contact sites are on a semicircle of the circle and the third contact site is on an opposing semicircle of the circle; a plurality of passive retainers carried by the body including at least a first retainer at the first contact site, a second retainer at the second contact site and a third retainer at the third contact site, each retainer including an inclined surface that slopes downwardly toward a central region of the circle to support an edge of the workpiece, wherein the inclined surfaces are arranged to hold the workpiece in a plane spaced apart from the body; and a sensor carried by the body, the sensor having a moveable pin with a contact region at least partially within the circle, wherein the pin moves generally transverse to the plane as the workpiece is loaded on or unloaded from the end-effector. - View Dependent Claims (19, 20, 21, 22)
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23. A transfer device for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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a transport unit configured to move along a transport path; an arm carried by the transport unit; and an end-effector carried by the arm, the end-effector comprising a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece; a plurality of passive retainers carried by the body, each retainer including an inclined surface that slopes downwardly toward a central region of the circle to support the workpiece in a plane spaced apart from the body; a sensor carried by the body, the sensor having a moveable pin with a contact region at least partially within the circle, wherein the pin moves generally transverse to the plane; and wherein the end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane to press the workpiece against the retainers. - View Dependent Claims (24, 25, 26, 27)
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28. A transfer device for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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a transport unit configured to move along a transport path; an arm carried by the transport unit; and an end-effector carried by the arm, the end-effector comprising a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece; a plurality of passive retainers carried by the body, the retainers being located along the circle, and the retainers being configured to support the workpiece in a plane spaced apart from the body; a sensor carried by the body, the sensor having an engagement member positioned at least partially within the circle, wherein the engagement moves generally transverse to the plane; and wherein the end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane to press the workpiece against the retainers. - View Dependent Claims (29, 30, 31, 32)
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33. A transfer device for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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a transport unit configured to move along a transport path; an arm carried by the transport unit; and an end-effector carried by the arm, the end-effector comprising a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece; a plurality of passive retainers carried by the body, the retainers being located along the circle, and the retainers being configured to support the workpiece in a plane spaced apart from the body; a sensor carried by the body, the sensor having a lever with a contact region at least partially in the circle, a pivot joint coupled to the lever to allow the contact region to move generally transverse to the plane between a raised position and a lowered position; and wherein the end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane to press the workpiece against the retainers.
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34. A transfer device for handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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a transport unit configured to move along a transport path; an arm carried by the transport unit; and an end-effector carried by the arm, the end-effector comprising a body having a plurality of contact sites located along a circle corresponding to the first diameter of the workpiece; a support means for passively supporting the workpiece in a plane spaced apart from the body that does not exert a force against the workpiece parallel to the plane; a sensing means for sensing proper positioning of the workpiece on the passive support means, the sensing means being carried by the body, and the sensing means having a member positioned at least partially within the circle that moves generally transverse to the plane; and wherein the end-effector does not include an active member that exerts a force against the edge of the workpiece parallel to the plane to press the workpiece against the retainers.
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35. A method of handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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supporting a perimeter edge of the workpiece to hold the workpiece in a plane without exerting a force against the workpiece in a direction parallel to the plane; and detecting whether a moveable pin located at least partially within the first diameter of the workpiece is displaced by the workpiece in a direction transverse to the plane. - View Dependent Claims (36, 37, 38)
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39. A method of handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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contacting a perimeter edge of the workpiece with a plurality of passive retainers to hold the workpiece in a plane without exerting a force against the workpiece in a direction parallel to the plane; engaging a pin of a sensor with the workpiece, the pin being moveable transversely relative to the plane under the influence of the weight of the workpiece; and detecting whether the pin was displaced by the workpiece in a direction transverse to the plane. - View Dependent Claims (40, 41, 42)
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43. A method of processing a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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loading the workpiece into a transfer device by supporting a perimeter edge of the workpiece to hold the workpiece in a plane without exerting a force against the workpiece in a direction parallel to the plane, and detecting whether a moveable pin located at least partially within the first diameter of the workpiece is displaced by the workpiece in a direction transverse to the plane; moving the workpiece to a processing station; unloading the workpiece in the processing station; and performing a process on the workpiece.
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44. A method of handling a microelectronic workpiece having a perimeter edge circumscribing a first diameter, comprising:
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loading the workpiece into a transfer device by contacting a perimeter edge of the workpiece with a plurality of passive retainers to hold the workpiece in a plane without exerting a force against the workpiece in a direction parallel to the plane, engaging a pin of a sensor with the workpiece, the pin being moveable transversely relative to the plane under the influence of the weight of the workpiece, and detecting whether the pin was displaced by the workpiece in a direction transverse to the plane; moving the workpiece to a processing station; unloading the workpiece in the processing station; and performing a process on the workpiece.
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Specification