Web lift system for chemical mechanical planarization

• US 7,008,303 B2
• Filed: 04/03/2003
• Issued: 03/07/2006
• Est. Priority Date: 08/29/2000
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: White, John M., Somekh, Sasson, Sommer, Phillip R.
• Primary Examiner(s): Eley, Timothy V.
• Application Number:
  US10/408,032
• Publication Number:
  US 20030171069A1
• Time in Patent Office: 1,069 Days
• Field of Search: 451/296, 451/297, 451/303, 451/305, 451/306, 451/307, 451/308, 451/310, 451/311, 451/36, 451/41, 451/59, 451/63
• US Class Current: 451/59
• CPC Class Codes: B24B 21/004 using abrasive rolled strips
• CPC Class Codes: B24B 21/008 Machines comprising two or more tools or having several working posts B24B21/006 takes precedence
• CPC Class Codes: B24B 21/20 for controlling or adjusting the tracking or the tension of the grinding belt
• CPC Class Codes: B24B 37/16 characterised by the shape of the lapping plate surface, e.g. grooved

Abstract

Generally, a method and system for lifting a web of polishing material is provided. In one embodiment, the system includes a platen that has a first lift member disposed adjacent to a first side and a second lift member disposed adjacent to a second side. The platen is adapted to support the web of polishing media that is disposed between the first and the second lift members. A method includes supporting a web of polishing media on a platen between a first lift member and a second lift member and moving at least the first lift member or the second lift member to an extended position relative the platen that places the web in a spaced-apart relation with the platen.

Claims

1. A method for moving a web of polishing material comprising the steps of:

supporting a portion of the web of polishing material on a platen between a first member and a second member; and

moving at least one of the first or the second members against an underside of the web to an extended position relative the platen that places the portion of the web in a spaced-apart relation with the platen.

2. The method of claim 1, wherein the step of moving at least one of the first or the second members comprises moving the first member and the second member.

3. The method of claim 1, wherein the step of moving further comprises unwinding a portion of the web.

4. The method of claim 1, wherein the step of moving further comprises at least partially extending the first member before extending the second member.

5. The method of claim 1 further comprising the step of winding the web to return any extended member to a retracted position.

6. The method of claim 1, wherein the step of moving pulls the web from a supply roll.

7. The method of claim 1, wherein the step of moving the first or the second member further comprises actuating a linear motion device.

8. The method of claim 7, wherein the linear motion device is a cylinder, solenoid or lead screw.

9. A method for moving a web of polishing material comprising the steps of:

polishing a first substrate on a portion of the web of polishing material supported on a platen; and

mechanically pushing the web of polishing material away from the platen to place the portion of the web of polishing material and the platen in a spaced-apart relation after polishing the substrate.

10. The method of claim 9 further comprising advancing the mechanically spaced web.

11. The method of claim 10 further comprising:

mechanically lowering the mechanically spaced web of polishing material back into contact with the platen; and

polishing a second substrate.

12. The method of claim 11, wherein the step of mechanioally pushing further comprises:

actuating a first roller guiding the web of polishing material onto an upper surface of the platen away from the platen.

13. The method of claim 12, wherein the step of mechanically pushing further comprises:

actuating a second roller disposed on a side of the platen opposite the first roller and having the web of polishing material disposed thereover away from the platen.

14. A method for moving a web of polishing material comprising the steps of:

mechanically pushing a portion of the web of polishing material away from a platen adapted to support the web of polishing mateilal during processing;

advancing the mechanically spaced portion of the web of polishing material across the platen;

returning the mechanically spaced portion of the web of polishing material into contact with the platen; and

polishing a substrate on the platen.

15. The method of claim 14, wherein the step of mechanically pushing further comprises:

moving a roller having the web passing thereover and disposed between a supply roll having another portion of the web of polishing material wound thereon end the platen.