Apparatus and method for determining voltage using optical observation

• US 7,012,537 B2
• Filed: 05/14/2004
• Issued: 03/14/2006
• Est. Priority Date: 02/10/2004
• Status: Expired due to Fees

• Current Assignee: DCG Systems Incorporated (Thermo Fisher Scientific Incorporated)
• Original Assignee: Credence Systems Corporation (COHU Incorporated)
• Inventors: Woods, Gary Leonard, Kasapi, Steven
• Primary Examiner(s): Lieu, Julie Bichngoc
• Application Number:
  US10/845,013
• Publication Number:
  US 20050174248A1
• Time in Patent Office: 669 Days
• Field of Search: 340/635, 340/636.1, 340/636.15, 340/660, 340/661, 340/657, 340/514
• US Class Current: 340/635
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence

Abstract

A beacon circuit enabling study of active elements in an integrated circuit is disclosed. The beacon circuit may be integral to a DUT to be tested. The DUT is stimulated by a conventional ATE, so that its active devices are operating. The signal from the active device is sent to the beacon circuit which, in response to the signal, emits light having intensity that is proportional to the value of the signal. In one example, the beacon circuit is constructed as a voltage to current converter having its input connected to the node of interest and its output connected to a current to light converter. In one example, the current to light converter is implemented as a current mirror circuit. One beneficial implementation disclosed is the use of the beacon circuit for the study of voltage supply disturbances.

Claims

1. An integrated circuit enabling the study of various active elements incorporated therein, comprising:

a substrate;

at least one active circuit element formed in said substrate, said active circuit element connected to at least one node of interest, the voltage at said node varying when said active circuit element operates;

at least one beacon circuit connected to said node, said beacon circuit emitting light whenever the voltage at said node changes; and

,

said active circuit element emitting light that is fainter than light emitted by said beacon circuit.

2. The circuit of claim 1, wherein said beacon circuit is formed in said substrate integrally with said active circuit element.

3. The circuit of claim 1, wherein the intensity of said light emitted by said beacon circuit is substantially linearly proportional to the voltage at said node.

4. The circuit of claim 1, wherein said beacon circuit comprises a voltage to current converter.

5. The circuit of claim 4, wherein said beacon circuit further comprises a current to light converter.

6. The circuit of claim 5, wherein said current to light converter comprises a current mirror.

7. The circuit of claim 5, wherein said current to light converter comprises a light emitting diode.

8. The circuit of claim 6, wherein said current to light converter further includes a light emitting diode.

9. The circuit of claim 1, wherein said active element comprises a transistor.

10. The circuit of claim 1, wherein said active element comprises a voltage comparator.

11. The circuit of claim 10, wherein said voltage comparator provides a signal to said node, indicative of a voltage provided by a power supply.

12. An integrated circuit, enabling the study of various active elements incorporated therein, comprising:

a substrate;

at least one active circuit element formed in said substrate, said active circuit element connected to at least one node of interest, the volt at said node varying when said active circuit element operates;

a beacon circuit formed in said substrate integrally with said active element and connected to said node of interest;

wherein said beacon circuit emits light whenever the voltage at said node varies and wherein said active element comprises a transistor; and

,

wherein said beacon circuit comprises;

a voltage to current converter having its input connected to said node of interest;

a current to light converter having its input connected to an output of said voltage to current converter.

13. The circuit of claim 12, wherein said current to light converter comprises a current mirror.

14. The circuit of claim 12, wherein said current to light converter comprises a light emitting diode.

15. The circuit of claim 13, wherein said current to light converter further comprises a light emitting diode.

16. The system of claim 12, wherein said active element comprises a voltage comparator.

17. A method for investigating an integrated circuit, comprising:

identifying an active element of interest in said interated circuit;

applying a test signal to said active element;

obtaining output voltage from said active element, said output voltage being variable with time and being output in response to said test signal;

providing said output voltage to a beacon circuit;

operating said beacon circuit so as to convert said voltage input to emitted light output;

detecting said emitted light and measuring its intensity;

using a determinable relationship to calculate the output voltage from the light intensity; and

,

wherein operating said beacon circuit comprises;

converting said output voltage to an output current, said output current being variable with time in a first determinable relationship to said output voltage;

converting said output current to said emitted light, the intensity of said emitted light being in a second determinable relationship to said output current.

18. The method of claim 17, wherein at least one of said first and second relationships is a linear relationship.

19. The method of claim 17, wherein converting the output current to emitted light comprises passing said current through a current mirror.

20. The method of claim 17, wherein converting the output current to emitted light comprises passing said current through a light emitting diode.

21. The method of claim 19, wherein converting the output current to emitted light further comprises applying the output of said current minor to a light emitting diode.

22. The method of claim 17, wherein obtaining said output voltage comprises monitoring an output of a power supplier and providing a signal whenever the output of said power supplier exceeds a predefined threshold.