Indium-tin oxide thin film filter for dense wavelength division multiplexing

• US 7,019,906 B2
• Filed: 01/08/2002
• Issued: 03/28/2006
• Est. Priority Date: 01/08/2002
• Status: Expired due to Fees

• Current Assignee: Google LLC (Alphabet Inc.)
• Original Assignee: Hon Hai Precision Industry Co., Ltd.
• Inventors: Leu, Charles, Chen, Ga-Lane
• Primary Examiner(s): Dunn, Drew A.
• Assistant Examiner(s): Pritchett, Joshua L.
• Application Number:
  US10/044,268
• Publication Number:
  US 20030128430A1
• Time in Patent Office: 1,540 Days
• Field of Search: 359/580, 359/586, 359/588, 359/577, 359/584, 359/589
• US Class Current: 359/589
• CPC Class Codes: G02B 5/281 designed for the infrared light

Abstract

A DWDM thin film filter includes a substrate (11) and a film stack (12). The film stack comprises a plurality of cavities (13). Each cavity includes a first group of mirror layers (21), a second group of mirror layers (22), and a spacer layer (23). Each group of mirror layers includes a plurality of high refractive index thin films (31) and low refractive index thin films (32) alternately deposited one on another. The material of the high refractive index films is a composition of indium-tin oxide. In the preferred embodiment, a thin film filter having 160 layers of film can be produced. Such a thin film filter attains the same or better optical characteristics as a conventional DWDM thin film filter having 180 layers of film.

Claims

1. A thin film filter for dense wavelength division multiplexing, the thin film filter comprising:

a glass substrate; and

a film stack mounted on the glass substrate, the film stack comprising a plurality of cavities;

wherein

each cavity comprises a first mirror layer, a second mirror layer, and a spacer layer arranged therebetween, both of the first mirror layer and the second mirror layer including low refractive index thin films and high refractive index thin films, and wherein each of the high refractive index thin films comprises a composition of indium-tin oxide having a high refractive index such that a substantially different refractive index between the low refractive index thin films and the high refractive index thin films is formed.

2. The thin film filter as described in claim 1, wherein the thin film filter further comprises a coupling film, and the coupling film adjoins an adjacent cavity of the plurality of cavities.

3. The thin film filter as described in claim 2, wherein the coupling film is made of a material having a relatively low refractive index.

4. The thin film filter as described in claim 1, wherein a range of the composition of indium-tin oxide is from 20% indium oxide plus 80% tin oxide to 17% indium oxide plus 83% tin oxide.

5. The thin film filter as described in claim 1, wherein the low refractive index thin films comprise silicon dioxide (SiO₂) or aluminum oxide (Al₂O₃).

6. The thin film filter as described in claim 5, wherein the low refractive index thin films and the high refractive index thin films are alternately deposited one on another.

7. The thin film filter as described in claim 6, wherein each of the low refractive index thin films and each of the high refractive index thin films has an optical thickness equal to one-quarter of a central wavelength of a pass bandwidth of the thin film filter.

8. A thin film filter for dense wavelength division multiplexing, the thin film filter comprising:

a glass substrate; and

a film stack mounted on the glass substrate, the film stack comprising five cavities, each cavity having a plurality of layers, each layer comprising low refractive index thin films and high refractive index thin films;

wherein

each of the high refractive index thin films comprises a composition of indium-tin oxide having a refractive index of about 2.1, and a total number of the layers in the five cavities is about 160.

9. The thin film filter as described in claim 8, wherein the thin film filter further comprises a coupling film, and the coupling film adjoins an adjacent cavity.

10. The thin film filter as described in claim 9, wherein the coupling film is made of a material having a relatively low refractive index.

11. The thin film filter as described in claim 10, wherein the low refractive index thin films comprise silicon dioxide (SiO₂) or aluminum oxide (Al₂O₃).