Defect inspection apparatus

• US 7,032,208 B2
• Filed: 03/25/2003
• Issued: 04/18/2006
• Est. Priority Date: 03/27/2002
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Yamashita, Kyoji
• Primary Examiner(s): Garbowski, Leigh M.
• Assistant Examiner(s): Dimyan, Magid Y.
• Application Number:
  US10/395,342
• Publication Number:
  US 20030197857A1
• Time in Patent Office: 1,120 Days
• Field of Search: 716/19, 716/20, 716/21, 356237-430, 382144-149, 250/491.1
• US Class Current: 716/52
• CPC Class Codes: G01N 21/95607 using a comparative method

Abstract

A defect inspection apparatus includes a sensor which optically senses a circuit pattern formed on a plate to be inspected to obtain scanned image data thereof while moving relatively to the plate, an AD converter which converts the scanned image data into digital form, a normal image data generator which generates normal image data expressed by use of multiple values based on CAD data relating to the circuit pattern, a reference data generator which filters the normal image data to generate reference data while selecting filter coefficients according to the moving direction of the plate to be inspected by use of a finite response filter having asymmetrical coefficients, and a comparator which compares the reference data with the scanned image data.

Claims

1. A defect inspection apparatus comprising:

a stage on which a plate to be inspected having a circuit pattern is mounted and which is movable in an X direction and in a Y direction perpendicular to the X direction;

a sensor which optically scans the circuit pattern to obtain scanned image data;

a scanned image data memory which stores the scanned image data in digital form;

a normal image data generator which generates normal image data expressed by use of multiple values based on computer-aided design data relating to the circuit pattern;

a reference data generator which corrects the normal image data to generate reference data, the reference data generator including a positional corrector which corrects a position data of the normal image data, a filtering part which subjects the normal image data to a filtering process, and a filter coefficient selector which has a plurality of sets of filter coefficients, selects one of the sets of filter coefficients and extracts a desired filter coefficient data used in the filtering part from the one selected from the plurality of filter coefficient sets; and

a comparator which compares the reference data with the scanned image data,

wherein the filtering part comprises a first finite response filter having substantially symmetrical coefficients and a second finite response filter having a first-order lag function, the first and second finite response filters having respective transfer functions which are subjected to convolution.

2. The defect inspection apparatus according to claim 1, wherein the filtering part includes a finite response filter having asymmetrical coefficients.

3. The defect inspection apparatus according to claim 1, wherein the first-order lag function is variable only in one of the X and Y directions.

4. The defect inspection apparatus according to claim 1, wherein the filter coefficient selector selects the desired filter coefficient data according to whether a moving direction of the stage is the X direction or the Y direction.

5. The defect inspection apparatus according to claim 1, wherein the sensor is a time delay and integration sensor which moves integrated charges in a direction opposite to a moving direction of the stage.

6. The defect inspection apparatus according to claim 1, wherein the sensor is a time delay and integration sensor which alternatively scans the plate to be inspected and the filter coefficient selector selects the desired filter coefficient data according to a scanning direction of the sensor.

7. The defect inspection apparatus according to claim 1, wherein the sensor is a time delay and integration sensor and the filter coefficient selector selects the desired filter coefficient data according to the number of integration stages of the time delay and integration sensor.

8. The defect inspection apparatus according to claim 1, wherein the sensor is a time delay and integration sensor and which further comprises an output controller which controls output of the scanned image data according to a scanning direction of the sensor.

9. The defect inspection apparatus according to claim 8, further comprising an analog-to-digital converter which digitizes an output of the output controller and supplies a result of digitization to the scanned image data memory.

10. The defect inspection apparatus according to claim 1, further comprising a control computer which controls operations of the normal image data generator, the stage, the reference data generator and the sensor.

11. A defect inspection apparatus comprising:

a sensor which optically senses a circuit pattern formed on a plate to be inspected to obtain scanned image data of the circuit pattern while moving relatively to the plate to be inspected;

an analog-to-digital converter which converts the scanned image data into digital form;

a normal image data generator which derives normal image data expressed by use of multiple values based on computer-aided design data relating to the circuit pattern;

a reference data generator which processes the normal image data to generate reference data while selecting filter coefficients according to a moving direction of the plate to be inspected by use of a finite response filter having asymmetrical coefficients; and

a comparator which compares the reference data with the scanned image data,

wherein the finite response filter includes a first finite response filter having substantially symmetrical coefficients and a second finite response filter having a first-order lag function, the first and second finite response filters having respective transfer functions which are subjected to convolution.

12. The defect inspection apparatus according to claim 11, further comprising an XY stage having the plate to be inspected mounted thereon and being movable in X and Y directions, wherein the first-order lag function is variable only in one of the X and Y directions.

13. The defect inspection apparatus according to claim 11, wherein the filter coefficient data of the second finite response filter is selected according to a moving direction of the XY stage.

14. The defect inspection apparatus according to claim 11, wherein the sensor is a time delay and integration sensor which periodically scans the plate to be inspected and the filter coefficient data of the second finite response filter is selected according to a scanning direction of the sensor.

15. The defect inspection apparatus according to claim 11, wherein the sensor is a time delay and integration sensor and the filter coefficient data of the second finite response filter is selected according to a number of integration stages of the sensor.

16. The defect inspection apparatus according to claim 11, wherein the comparator determines that there is no defect if a difference between the scanned image data and the reference data is within a permissible limit and determines a presence of a defect if the difference between the scanned image data and the reference data exceeds the permissible limit.