Polishing apparatus

• US 7,040,968 B2
• Filed: 04/25/2005
• Issued: 05/09/2006
• Est. Priority Date: 10/24/2000
• Status: Expired due to Term

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: Kimura, Norio, Kamimura, Kenji, Tsujimura, Manabu, Okamura, Satoshi, Aizawa, Hideo, Matsuo, Hisanori, Akagi, Makoto, Tokushige, Katsuhiko
• Primary Examiner(s): Rose, Robert A.
• Application Number:
  US11/113,084
• Publication Number:
  US 20050191949A1
• Time in Patent Office: 379 Days
• Field of Search: 451/443, 451/444, 451/72, 451/56, 451/288, 451/5, 451/21, 451/65
• US Class Current: 451/56
• CPC Class Codes: B24B 29/005 using brushes
• CPC Class Codes: B24B 53/003 using at least two conditioning tools
• CPC Class Codes: B24B 53/017 Devices or means for dressing, cleaning or otherwise conditioning lapping tools
• CPC Class Codes: H01L 21/30625 With simultaneous mechanical treatment, e.g. mechanico-chemical polishing

Abstract

The present invention relates to a polishing apparatus for polishing a workpiece, such as a semiconductor wafer, to a flat mirror finish. The polishing apparatus comprises a polishing table having a polishing surface, and a top ring, and the workpiece is interposed between the polishing table and the top ring and pressed at a predetermined pressure to polish the workpiece. The polishing apparatus comprises at least two dressing units for dressing the polishing surface by being brought into contact with the polishing surface, which is a surface of a polishing cloth.

Claims

1. A method for dressing a polishing cloth provided in a polishing apparatus, comprising:

initially conditioning a polishing cloth, before use in a polishing process, by using a first dressing unit including a diamond dresser or an SiC dresser; and

conditioning said polishing cloth, between processes of polishing a workpiece, by using a second dressing unit including a brush dresser,

wherein said second dressing unit is not used during the initial conditioning of said polishing cloth.

4. The method according to claim 1, wherein initially conditioning a polishing cloth comprises thinly shaving a surface of said polishing cloth by using said first dressing unit.

2. A method for dressing a polishing cloth provided in a polishing apparatus, comprising:

initially conditioning a polishing cloth, before use in a polishing process, by using a first dressing unit including a diamond dresser or an SiC dresser; and

between processes of polishing a workpiece, initially conditioning said polishing cloth by using said first dressing unit including said diamond dresser or said SiC dresser, and then conditioning said polishing cloth by using a second dressing unit including a brush dresser,

wherein said second dressing unit is not used during the initial conditioning of said polishing cloth.

5. The method according to claim 2, wherein initially conditioning a polishing cloth comprises thinly shaving a surface of said polishing cloth by using said first dressing unit.

3. A method for dressing a polishing cloth provided in a polishing apparatus, comprising:

while polishing a workpiece, performing dressing of a polishing cloth while swinging a first dresser having a diameter smaller than a diameter of said workpiece; and

then

after polishing said workpiece, performing dressing of said polishing cloth by using a second dresser having a diameter larger than said diameter of said workpiece.

6. The method according to claim 3, wherein said first dresser comprises a diamond dresser.

7. The method according to claim 3, wherein said second dresser comprises a diamond dresser.

8. The method according to claim 3, wherein performing dressing of said polishing cloth by using a second dresser comprises thinly shaving a surface of said polishing cloth by using said second dresser.

9. The method according to claim 3, further comprising spraying a fluid toward said polishing cloth during the dressing of said polishing cloth by using said second dresser.

10. The method according to claim 9, wherein said fluid comprises a mixture of gas and liquid.

11. The method according to claim 10, wherein said gas comprises nitrogen gas.

12. The method according to claim 10, wherein said liquid comprises pure water.