Three-dimensional photonic crystal waveguide structure and method

• US 7,054,532 B2
• Filed: 12/07/2004
• Issued: 05/30/2006
• Est. Priority Date: 05/22/2001
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Forbes, Leonard, Geusic, Joseph E.
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): Rahll, Jerry T
• Application Number:
  US11/005,712
• Publication Number:
  US 20050105869A1
• Time in Patent Office: 539 Days
• Field of Search: 385/122, 385131-132
• US Class Current: 385/122
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: C30B 29/60 characterised by shape
• CPC Class Codes: C30B 33/00 After-treatment of single crystals or homogeneous polycrystalline material with defined structure C30B31/00 takes precedence
• CPC Class Codes: G02B 2006/12078 Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices
• CPC Class Codes: G02B 6/13 Integrated optical circuits characterised by the manufacturing method
• CPC Class Codes: H01L 29/04 characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes characterised by physical imperfections H01L29/30
• CPC Class Codes: H01L 29/06 characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
• CPC Class Codes: H01S 5/11 Comprising a photonic bandgap structure

Abstract

A waveguide structure formed with a three-dimensional (3D) photonic crystal is disclosed. The 3D photonic crystal comprises a periodic array of voids formed in a solid substrate. The voids are arranged to create a complete photonic bandgap. The voids maybe formed using a technique called “surface transformation,” which involves forming holes in the substrate surface, and annealing the substrate to initiate migration of the substrate near the surface to form voids in the substrate. A channel capable of transmitting radiation corresponding to the complete bandgap is formed in the 3D photonic crystal, thus forming the waveguide. The waveguide may be formed by interfacing two 3D photonic crystal regions, with at least one of the regions having a channel formed therein. The bandgap wavelength can be chosen by arranging the periodic array of voids to have a lattice constant a fraction of the bandgap wavelength.

Claims

1. An apparatus comprising:

a first 3D photonic crystal region in a first substrate, the first 3D photonic crystal region having a complete photonic bandgap;

a second 3D photonic crystal region in a second substrate, the second 3D photonic crystal region having a complete photonic bandgap, wherein the first 3D photonic crystal region is coupled to the second 3D photonic crystal region to form a single 3D photonic crystal region having a complete photonic bandgap; and

an empty channel formed in the single 3D photonic crystal region.

2. The apparatus of claim 1, wherein the first 3D photonic crystal region includes a periodic array of voids, wherein the second 3D photonic crystal region includes a periodic array of voids, and wherein the periodic array of voids of the first 3D photonic crystal region is substantially identical to the periodic array of voids of the second 3D photonic crystal region.

3. The apparatus of claim 1, wherein the empty channel includes a first side wall formed in the first 3D photonic crystal region, a second side wall formed in the first 3D photonic crystal region, a lower wall formed in the first 3D photonic crystal region and connecting to the first and second side walls, and an upper surface formed in the second 3D photonic crystal region and connecting to the first and second side walls.

4. The apparatus of claim 1, wherein the first 3D photonic region includes:

a periodic array of first voids connected by imaginary bonds, and

a plurality of second voids located along the imaginary bonds.

5. The apparatus of claim 4, wherein the first voids and the second void are spherical voids.

6. The apparatus of claim 1, wherein the empty channel has a rectangular cross-section.

7. The apparatus of claim 1, wherein the empty channel includes taper.

8. The apparatus of claim 1, wherein the empty channel includes a bend.

9. The apparatus of claim 8, wherein the bend has a degree of up to 90 degrees.

10. An apparatus comprising:

a first 3D photonic crystal region in a first substrate, the first 3D photonic crystal region having a complete photonic bandgap;

an empty channel formed in the first 3D photonic crystal region for transmitting a radiation; and

a second 3D photonic crystal region in a second substrate, the second 3D photonic crystal region having a complete photonic bandgap, at least a portion of the second 3D photonic crystal region covering the empty channel.

11. The apparatus of claim 10, wherein at least one of the first and second 3D photonic regions includes a periodic array of voids forming a number of unit cells, and wherein the empty channel has a width of at least one unit cell and a depth of at least one unit cell.

12. The apparatus of claim 10, wherein at least one of the first and second 3D photonic regions includes a modified diamond crystal structure.

13. The apparatus of claim 10, wherein at least one of the first and second 3D photonic regions includes a periodic array of voids having a period of a fraction of a wavelength of the radiation.

14. The apparatus of claim 13, wherein the wavelength of the radiation is one of infrared and microwave.

15. The apparatus of claim 10, wherein the empty channel has a rectangular cross-section.

16. The apparatus of claim 10, wherein the empty channel includes taper.

17. The apparatus of claim 10, wherein the empty channel includes a bend.

18. The apparatus of claim 17, wherein the bend has a degree of up to 90 degrees.

19. An apparatus comprising:

a first 3D photonic crystal region in a first substrate, the first 3D photonic crystal region having a complete photonic bandgap;

a gas-filled channel formed in the first 3D photonic crystal region for transmitting a radiation; and

a second 3D photonic crystal region in a second substrate, the second 3D photonic crystal region having a complete photonic bandgap, at least a portion of the second 3D photonic crystal region covering the gas-filled channel.

20. The apparatus of claim 19, wherein at least one of the first and second 3D photonic regions includes a periodic array of voids forming a number of unit cells, and wherein the gas-filled channel has a width of at least one unit cell and a depth of at least one unit cell.

21. The apparatus of claim 19, wherein at least one of the first and second 3D photonic regions includes a modified diamond crystal structure.

22. The apparatus of claim 19, wherein at least one of the first and second 3D photonic regions includes a periodic array of voids having a period of a fraction of a wavelength of the radiation.

23. The apparatus of claim 22, wherein the wavelength of the radiation is one of infrared and microwave.

24. The apparatus of claim 19, wherein the gas-filled channel includes nitrogen.

25. An apparatus comprising:

a first substrate having an incomplete bandgap;

a first 3D photonic crystal region formed in the first substrate, the first 3D photonic crystal region having a complete photonic bandgap;

a second substrate having an incomplete bandgap;

a second 3D photonic crystal region formed in the second substrate, the second 3D photonic crystal region having a complete photonic bandgap, wherein the first 3D photonic crystal region is coupled to the second 3D photonic crystal region to form a single 3D photonic crystal region having a complete photonic bandgap; and

an air-filled channel formed in the single 3D photonic crystal region.

26. The apparatus of claim 25, wherein the first 3D photonic crystal region includes a periodic array of voids, wherein the second 3D photonic crystal region includes a periodic array of voids, and wherein the periodic array of voids of the first 3D photonic crystal region is substantially identical to the periodic array of voids of the second 3D photonic crystal region.

27. The apparatus of claim 25, wherein the air-filled channel includes:

a first side wall formed only in the first 3D photonic crystal region;

a second side wall formed only in the first 3D photonic crystal region;

a lower wall formed in the first 3D photonic crystal region, the lower wall connecting the to first and second side walls; and

an upper surface formed in the second 3D photonic crystal region, the upper surface connecting to the first and second side walls.

28. The apparatus of claim 25, wherein the air-filled channel includes:

a first side wall formed in both of the first and second 3D photonic crystal regions;

a second side wall formed in both of the first and second 3D photonic crystal regions;

a lower wall formed in the first 3D photonic crystal region, the lower wall connecting to the first and second side walls; and

an upper surface formed in the second 3D photonic crystal region, the upper surface connecting to the first and second side walls.

29. The apparatus of claim 25, wherein the first 3D photonic region includes:

a periodic array of first voids connected by imaginary bonds, and

a plurality of second voids located along the imaginary bonds.

30. The apparatus of claim 29, wherein the first voids and the second void are spherical voids.

31. The apparatus of claim 29, wherein the first voids and the second voids form a modified diamond crystal structure.

32. An apparatus comprising:

a first 3D photonic crystal region in a first substrate, the 3D first photonic crystal region having a complete photonic bandgap;

an air-filled channel formed in the first 3D photonic crystal region, the air-filled channel including a first end and a second end;

a second 3D photonic crystal region in a second substrate, the second 3D photonic crystal region having a complete photonic bandgap, at least a portion of the second 3D photonic crystal region covering the air-filled channel; and

a radiation source coupled to the first end of the air-filled channel for providing a radiation.

33. The apparatus of claim 32 further comprising a detector coupled to the second end of the air-filled channel for detecting the radiation and for generating a signal based on the radiation.

34. The apparatus of claim 33 further comprising an electronic system coupled to the detector for receiving the signal from the detector.

35. The apparatus of claim 32, wherein the radiation source includes a laser.

36. The apparatus of claim 32, wherein at least one of the first and second 3D photonic regions includes:

a periodic array of first voids connected by imaginary bonds, and

a plurality of second voids located along the imaginary bonds.

37. The apparatus of claim 36, wherein the first voids and the second voids are spherical voids.

38. The apparatus of claim 36, wherein the first voids and the second voids form a modified diamond crystal structure.

39. A method comprising:

generating a radiation; and

transmitting the radiation through an empty channel, wherein the empty channel is formed in a first 3D photonic crystal region in a first substrate, wherein the empty channel is covered by at least a portion of a second 3D photonic crystal region in a second substrate, and wherein the first and second 3D photonic crystal regions have a complete photonic bandgap.

40. The method of claim 39 further comprising:

detecting the radiation for generating a signal based on the radiation.

41. The method of claim 40 further comprising:

processing the signal.

42. The method of claim 39, wherein the radiation includes a laser.

43. The method of claim 39, wherein the radiation has a wavelength, wherein the wave length is one of infrared and microwave.

44. A method comprising:

forming a first 3D photonic crystal region in a first substrate, the first 3D photonic crystal region having a complete photonic bandgap;

forming an empty channel in the first 3D photonic crystal region; and

covering the empty channel with a second 3D photonic crystal region in a second substrate, the second 3D photonic crystal region having a complete photonic bandgap.

45. The method of claim 44, wherein at least one of the first and second 3D photonic regions includes:

a periodic array of first voids connected by imaginary bonds, and

a plurality of second voids located along the imaginary bonds.

46. The method of claim 45, wherein the first voids and the second voids are spherical voids.

47. The method of claim 45, wherein the first voids and the second voids form a modified diamond crystal structure.

48. The method of claim 44, wherein the empty channel has a rectangular cross-section.

49. The method of claim 44, wherein the empty channel includes taper.

50. The method of claim 44, wherein the empty channel includes a bend.

51. The method of claim 50, wherein the bend has a degree of up to 90 degrees.

52. A method comprising:

creating a channel in a first 3D photonic crystal region in a first substrate, the first 3D photonic crystal region having a complete photonic bandgap; and

covering the channel with a second 3D photonic crystal region in a second substrate to form an air-filled channel for transmitting a radiation through the air-filled channel, the second 3D photonic crystal region having a complete photonic bandgap.

53. The method of claim 52, wherein the first substrate has an incomplete bandgap.

54. The method of claim 52, wherein the second substrate has an incomplete bandgap.

55. The method of claim 52, wherein the first 3D photonic crystal region includes a periodic array of voids, wherein the second 3D photonic crystal region includes a periodic array of voids, and wherein the periodic array of voids of the first 3D photonic crystal region is substantially identical to the periodic array of voids of the second 3D photonic crystal region.

56. A method comprising:

forming a first 3D photonic crystal region in a first substrate, the first 3D photonic crystal region having a complete photonic bandgap;

forming a second 3D photonic crystal region in a second substrate, the second 3D photonic crystal region having a complete photonic bandgap; and

bonding the first 3D photonic crystal region to the second 3D photonic crystal region to form a single 3D photonic crystal region, the single 3D photonic crystal region having a complete photonic bandgap; and

forming an air-filled channel in the single 3D photonic crystal region.

57. The method of claim 56, wherein the first substrate has an incomplete bandgap.

58. The method of claim 57, wherein the second substrate has an incomplete bandgap.

59. The method of claim 56, wherein forming the air-filled channel includes:

forming a first portion of the air-filled channel in the first 3D photonic crystal region;

forming a second portion of the air-filled channel in the second 3D photonic crystal region; and

combining the first portion of the air-filled channel and the second portion of the air-filled channel to form the air-filled channel.