Micro-structures with individually addressable ribbon pairs

• US 7,057,795 B2
• Filed: 08/20/2002
• Issued: 06/06/2006
• Est. Priority Date: 08/20/2002
• Status: Active Grant

• Current Assignee: Silicon Light Machines Corporation (SCREEN Holdings Co., Ltd.)
• Original Assignee: Silicon Light Machines Corporation (SCREEN Holdings Co., Ltd.)
• Inventors: Hunter, Jim, Amm, David, Gudeman, Christopher
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): Dinh, Jack
• Application Number:
  US10/225,370
• Publication Number:
  US 20040036950A1
• Time in Patent Office: 1,386 Days
• Field of Search: 359/290, 359/291, 359/295, 359/298, 359/224, 359/318, 359/572, 359/573, 359/237, 359/211, 359/571, 385/18
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements

Abstract

An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.

Claims

1. A micro-device comprising:

a. a plurality of ribbon pairs configured to move relative to each other, each ribbon pair being individually addressable separately from other ribbon pairs in the plurality of ribbon pairs, each ribbon pair comprising a movable active ribbon and a stationary bias ribbon suspended over a substrate;

b. a light source for directing beams of light to the plurality of ribbon pairs; and

c. a driver circuit in electrical communication with at least a single ribbon pair to selectively control the single ribbon pair from among the plurality of ribbon pairs.

2. The device of claim 1, wherein the ribbon pairs are configured for modulating light.

3. The device of claim 2, wherein the light source comprises optical fibers, wherein individual optical fibers are in communication with individual ribbon pairs.

4. The system of claim 3, wherein the light source is configured for generating light comprising a wavelength in a range of 0.4 to 2.0 microns.

5. The device of claim 1, wherein the ribbon pairs comprise ribbons that are in a range of 5.0 to 20 microns wide.

6. The device of claim 1, wherein the ribbon pairs comprise ribbons that are in a range of 20 to 60 microns long.

7. The device of claim 1, wherein each ribbon pair comprises silicon nitride with a reflective aluminum layer.