Microring resonator and method for manufacturing
First Claim
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1. A method for making a plurality of waveguide resonator devices, the method comprising:
- positioning a precursor resonator structure at a fixed separation from a plurality of waveguides; and
after the precursor resonator structure has been positioned relative to the waveguides dividing the precursor resonator structure into a plurality of separate resonators, the precursor resonator structure being divided at locations between the waveguides.
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Abstract
A method for making a plurality of waveguide resonator devices is disclosed herein. The method includes fixing a precursor resonator structure relative to a plurality of waveguides. The method also includes dividing the precursor resonator structure into a plurality of separate resonators after the precursor resonator structure has been fixed relative to the waveguides. The precursor resonator structure is divided at locations between the waveguides.
14 Citations
25 Claims
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1. A method for making a plurality of waveguide resonator devices, the method comprising:
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positioning a precursor resonator structure at a fixed separation from a plurality of waveguides; and after the precursor resonator structure has been positioned relative to the waveguides dividing the precursor resonator structure into a plurality of separate resonators, the precursor resonator structure being divided at locations between the waveguides. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for fabricating a plurality of waveguide resonator devices, the method comprising:
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providing a substrate supporting a plurality of waveguides; providing spacer layers; mounting a precursor resonator structure to the substrate with the precursor resonator structure extending across the waveguides and separated from the waveguides by the spacer layers; and cutting the precursor resonator structure and the substrate into a plurality of pieces to provide a plurality of ring resonator devices, each of the ring resonator devices including a portion of the substrate, a portion of the precursor resonator structure, at least one of the waveguides and at least one of the spacer layers. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method for fabricating a plurality of waveguide resonator devices, the method comprising:
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providing a first substrate supporting a plurality of first waveguides; providing a second substrate supporting a plurality of second waveguides; providing spacer layers; mounting a precursor resonator structure between the first and second substrates with the precursor resonator structure extending across the waveguides and separated from the waveguides by the spacer layers; and cutting the precursor resonator structure and the first and second substrates into a plurality of pieces to provide the plurality of ring resonator devices, each of the ring resonator devices including a portion of the first substrate, a portion of the second substrate, a portion of the precursor resonator structure, at least two of the waveguides and at least two of the spacer layers.
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Specification