System for generating two-dimensional masks from a three-dimensional model using topological analysis

• US 7,065,736 B1
• Filed: 09/24/2003
• Issued: 06/20/2006
• Est. Priority Date: 09/24/2003
• Status: Expired due to Fees

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Schiek, Richard
• Primary Examiner(s): Lin, Sun James
• Application Number:
  US10/671,116
• Time in Patent Office: 1,000 Days
• Field of Search: 716/19, 716/21
• US Class Current: 716/55
• CPC Class Codes: G03F 1/50 Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof

Abstract

A method of generating two-dimensional masks from a three-dimensional model comprises providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements, reducing the three-dimensional model to a topological description of unique cross sections, and selecting candidate masks from the unique cross sections and the cross section topology. The method further can comprise reconciling the candidate masks based on the process mask requirements description to produce two-dimensional process masks.

Claims

1. A method of generating two-dimensional masks from a three-dimensional model comprising:

providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements;

reducing the three-dimensional model to a topological description of unique cross sections;

selecting candidate masks from the unique cross sections and a cross section topology; and

reconciling the candidate masks based on the description of process mask requirements to produce two-dimensional process masks.

2. The method according to claim 1 further comprising:

separating the three-dimensional model into at least one independent model body.

3. The method according to claim 2 further comprising:

searching the at least one independent body for the unique cross sections; and

arranging the unique cross sections based on mutual topological relationship.

4. The method according to claim 2 further comprising:

reducing the at least one independent model body to topology graphs including at least one node.

5. The method according to claim 4 further comprising:

selecting the candidate masks based on structure of the topology graphs.

6. The method according to claim 4 further comprising:

analyzing the topology graphs comprising;

calculating area of a topology graph node;

categorizing the topology graph node relative to topological neighboring nodes; and

identifying masks according to predetermined heuristic rules.

7. The method according to claim 1 further comprising:

summing the candidate masks; and

reconciling the summed candidate masks comprising;

performing selected operations based on process constraints, the selected operations being selected from among a group comprising;

reordering, merging and splitting the summed candidate masks.

8. The method according to claim 7 wherein:

the process constraints are selected from among a group comprising number of layers, material type of a layer, thickness of a layer, mask type, and number of masks.

9. A method of generating two-dimensional masks from a three-dimensional model comprising:

disassembling the three-dimensional model into one or more independent bodies;

processing individual of the one or more independent bodies comprising;

generating a topology tree composed of one or more nodes;

categorizing the one or more nodes of the topology tree; and

locating deposition boundaries to define one or more deposition domains;

processing individual of the one or more deposition domains comprising;

locating candidate masks; and

saving the candidate masks in a candidate mask set; and

summing, the candidate masks in the candidate mask set.

10. The method according to claim 9 further comprising:

providing the three-dimensional model that represents a micro-electro-mechanical structure for manufacture.

11. The method according to claim 9 wherein:

processing individual of the one or more independent bodies further comprises;

combining redundant nodes.

12. The method according to claim 9 further comprising:

for a model that cannot be produced within constraints of a specified process or no particular process is specified, defining process steps that are capable of producing the model.

13. The method according to claim 9 further comprising:

supplying the three-dimensional model with a specific manufacturing process for production of a device corresponding to a model undefined; and

generating a process description for a manufacturing process capable of producing the device in combination with production of the two-dimensional masks.

14. The method according to claim 9 further comprising:

reconciling the candidate masks in the candidate mask set with target process constraints.

15. The method according to claim 14 wherein:

reconciling the candidate masks comprises inverting etching sense of a candidate mask to meet a target process constraint.

16. The method according to claim 14 wherein:

reconciling the candidate masks comprises dividing candidate mask layers that are thicker than layers determined by the target process constraints and placing a sacrificial oxide mask identical to the divided candidate mask between the divided candidate mask layers.

17. The method according to claim 14 wherein:

reconciling the candidate masks comprises rearranging order of the candidate masks for a target process that an arrangement does not change result.

18. A method of generating two-dimensional masks from a three-dimensional model comprising:

analyzing cross sectional topology of a three-dimensional body;

generating a topology tree describing connectivity and relationships between cross sections, the topology tree including one or more nodes and branches connecting the one or more nodes;

processing individual of the one or more nodes comprising;

calculating a cross sectional area of the individual of the one or more nodes; and

categorizing the individual of the one or more nodes relative to topological neighboring nodes;

processing individual of the one or more branches comprising;

locating deposition boundaries to define one or more deposition domains; and

processing individual deposition domain regions between the deposition boundaries comprising;

defining a mask set and deposition thickness.

19. The method according to claim 18 further comprising:

identifying independent three-dimensional bodies in the three-dimensional model;

processing individual of the independent three-dimensional bodies; and

summing the mask sets for the processed independent three-dimensional bodies.

20. The method according to claim 19 further comprising:

reconciling the mask sets with target mask process constraints.

21. The method according to claim 19 further comprising:

joining redundant nodes of the processed individual of the one or more nodes.

22. An article of manufacture comprising:

a controller usable medium having a computable readable program code embodied therein for generating two-dimensional masks from a three-dimensional model, the computable readable program code fuser comprising;

a code capable of causing the controller to access information relating to a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements;

a code capable of causing the controller to reduce the three-dimensional model to a topological description of unique cross sections;

a code capable of causing the controller to select candidate masks from the unique cross sections and a cross section topology; and

a code capable of causing the controller to reconcile the candidate masks based on the description of process mask requirements to produce two-dimensional process masks.

23. The article of manufacture according to claim 22 further comprising:

a code capable of causing the controller to separate the three-dimensional model into at least one independent model body;

a code capable of causing the controller to search the at least one independent body for unique cross sections; and

a code capable of causing the controller to arrange the cross sections based on mutual topological relationship.

24. The article of manufacture according to claim 22 further comprising:

a code capable of causing the controller to separate the three-dimensional model into at least one independent model body;

a code capable of causing the controller to reduce the at least one independent model body to topology graphs including at least one node; and

a code capable of causing the controller to select the candidate masks based on structure of the topology graphs.

25. The article of manufacture according to claim 22 further comprising:

a code capable of causing the controller to separate the three-dimensional model into at least one independent model body;

a code capable of causing the controller to reduce the at least one independent model body to topology graphs including at least one node; and

a code capable of causing the controller to analyze the topology graphs comprising;

a code capable of causing the controller to calculate area of a topology graph node;

a code capable of causing the controller to categorize the topology graph node relative to topological neighboring nodes; and

a code capable of causing the controller to identify masks according to predetermined heuristic rules.

26. The article of manufacture according to claim 22 further comprising:

a code capable of causing the controller to sun the candidate masks; and

a code capable of causing the controller to reconcile the summed candidate masks comprising;

a code capable of causing the controller to perform selected operations based on process constraints, the selected operations being selected from among a group comprising;

reordering, merging and splitting the summed candidate masks.

27. An article of manufacture comprising:

a controller usable medium having a computable readable program code embodied therein for generating two-dimensional masks from a three-dimensional model that represents a micro-electro-mechanical structure for manufacture, the computable readable program code further comprising;

a code capable of causing the controller to disassemble the three-dimensional model into one or more independent bodies;

a code capable of causing the controller to process individual of the one or more independent bodies comprising;

a code capable of causing the controller to generate a topology tree composed of one or more nodes;

a code capable of causing the controller to categorize the one or more nodes of the topology tree; and

a code capable of causing the controller to locate deposition boundaries to define one or more deposition domains;

a code capable of causing the controller to process individual of the one or more deposition domains comprising;

a code capable of causing the controller to locate candidate masks; and

a code capable of causing the controller to save masks in a candidate mask set; and

a code capable of causing the controller to sum the candidate masks in the candidate mask set.

28. The article of manufacture according to claim 27 further comprising:

a code capable of causing the controller to combine redundant nodes in the code capable of causing the controller to process individual of the one or more independent bodies.

29. The article of manufacture according to claim 27 further comprising;

a code capable of causing the controller to reconcile the candidate masks in the candidate mask set with target process constraints.

30. An article of manufacture comprising;

a controller usable medium having a computable readable program code embodied therein for generating two-dimensional masks from a three-dimensional model that represents a micro-electro-mechanical structure for manufacture, the computable readable program code further comprising;

a code capable of causing the controller to analyze cross sectional topology of a three-dimensional body;

a code capable of causing the controller to generate a topology tree describing connectivity and relationships between cross sections, the topology tree including one or more nodes and branches connecting the one or more nodes;

a code capable of causing the controller to process individual of the one or more nodes comprising;

a code capable of causing the controller to calculate a cross sectional area of the individual of the one or more nodes; and

a code capable of causing the controller to categorize the individual of the one or more nodes relative to topological neighboring nodes;

a code capable of causing the controller to process individual of the one or more branches comprising;

a code capable of causing the controller to locate deposition boundaries to define one or more deposition domains; and

a code capable of causing the controller to process individual deposition domain regions between the deposition boundaries comprising;

a code capable of causing the controller to define a mask set and deposition thickness.

31. The article of manufacture according to claim 30 further comprising:

a code capable of causing the controller to identify independent three-dimensional bodies in the three-dimensional model;

a code capable of causing the controller to process individual of the independent three-dimensional bodies;

a code capable of causing the controller to sum the mask sets for the processed independent three-dimensional bodies;

a code capable of causing the controller to reconcile the mask sets with target mask process constraints; and

a code capable of causing the controller to join redundant nodes of the processed individual of the one or more nodes.

32. An apparatus for generating two-dimensional masks from a three-dimensional model comprising:

means for providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements;

means for reducing the three-dimensional model to a topological description of unique cross sections;

means for selecting candidate masks from the unique cross sections and a cross section topology; and

means for reconciling the candidate masks based on the description of process mask requirements to produce two-dimensional process masks.