Controlling lens shape in a microlens array

• US 7,068,432 B2
• Filed: 07/27/2004
• Issued: 06/27/2006
• Est. Priority Date: 07/27/2004
• Status: Active Grant

• Current Assignee: Aptina Imaging Corporation (ON Semiconductor Corporation)
• Original Assignee: Micron Technology, Inc.
• Inventors: Li, Jin, Boettiger, Ulrich C.
• Primary Examiner(s): Ben, Loha
• Application Number:
  US10/899,009
• Publication Number:
  US 20060023314A1
• Time in Patent Office: 700 Days
• Field of Search: 359/619, 359/621, 430/311, 430/313, 430/321, 430/330, 438/69, 438/70, 438/75, 438/151, 438/156, 257/232, 257/233, 257/432, 257/225, 216/26, 216/58, 348/340
• US Class Current: 359/619
• CPC Class Codes: G02B 27/1013 for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors spectral imaging systems G01J
• CPC Class Codes: G02B 27/1073 characterized by manufacturing or alignment methods
• CPC Class Codes: G02B 27/123 The splitting element being a lens or a system of lenses, including arrays and surfaces with refractive power
• CPC Class Codes: G02B 3/0018 Reflow, i.e. characterized by the step of melting microstructures to form curved surfaces, e.g. manufacturing of moulds and surfaces for transfer etching
• CPC Class Codes: G02B 3/0043 Inhomogeneous or irregular arrays, e.g. varying shape, size, height
• CPC Class Codes: G02B 3/005 arranged along a single direction only, e.g. lenticular sheets G02B3/0043 takes precedence
• CPC Class Codes: G02B 3/0056 arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses G02B3/0043 takes precedence; miniaturised objectives for electronic devices employing wafer level optics G02B13/0085
• CPC Class Codes: H01L 27/14603 Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
• CPC Class Codes: H01L 27/14625 Optical elements or arrangements associated with the device
• CPC Class Codes: H01L 27/14627 Microlenses
• CPC Class Codes: H01L 27/14685 Process for coatings or optical elements

Abstract

A semi-conductor based imager includes a microlens array having microlenses with modified focal characteristics. The microlenses are made of a microlens material, the melting properties of which are selectively modified to obtain different shapes after a reflow process. Selected microlenses, or portions of each microlens, are modified, by exposure to ultraviolet light, for example, to control the microlens shape produced by reflow melting. Controlling the microlens shape allows for modification of the focal characteristics of selected microlenses in the microlens array.

Claims

1. A method of forming a microlens array comprising the steps of:

patterning a microlens material into a pre-reflow array;

bleaching a portion of the pre-reflow array through a pattern; and

reflowing the pre-reflow array to form the microlens array.

2. A method of forming a microlens array according to claim 1, wherein the act of bleaching comprises irradiating the microlens material of the pre-reflow array through the pattern, and wherein the pattern stops selected portions of the microlens material from being irradiated as much as other portions of the microlens material.

3. A method of forming a microlens array according to claim 2, further comprising the act of:

arranging the pattern to irradiate a first portion of the microlens material differently from a second portion of the microlens material to produce, after reflowing the pre-reflow array, a first set of microlenses having a first shape and a second set of microlenses having second shape different from the first shape.

4. A method of forming a microlens array according to claim 2, further comprising the act of:

arranging the pattern to irradiate a first portion of the microlens material differently from a second portion of the microlens material to produce, after reflowing the pre-reflow array, a first set of microlenses having first focal characteristics and a second set of microlenses having second focal characteristics different from the first focal characteristics.

5. A method of forming a microlens array according to claim 4, wherein the first and second focal characteristics include focal length, the first set of microlenses having a focal length different from a focal length of the second set of microlenses.

6. A method of forming a microlens array according to claim 4, wherein the first and second focal characteristics include focal angle, the first set of microlenses having a focal angle different from a focal angle of the second set of microlenses.

7. A method of forming a microlens array according to claim 1, wherein the step of reflowing the bleached pre-reflow array produces a microlens array of uniformly shaped microlenses.

8. A method of forming a microlens array, comprising steps of:

patterning a microlens material;

exposing the microlens material to ultraviolet radiation through a mask, the mask causing the bleaching to vary across the patterned microlens material; and

reflowing the microlens material to produce an array of microlenses having focal characteristics determined by the exposure to the ultraviolet radiation.

9. A method of controlling microlens shape across a microlens array, comprising steps of:

patterning a microlens material using a resist to form a uniform array of pre-reflow microlenses;

exposing the pre-reflow microlenses to radiation directed through a patterned reticle, the patterned reticle causing radiation exposure to vary for different portions of the pre-reflow microlenses; and

reflowing the pre-reflow microlenses to produce an array of microlenses, the shapes of the microlenses corresponding to a radiation pattern established by the patterned reticle.

10. A method of controlling microlens shape according to claim 9, wherein the shapes of the microlenses are established based on a color of a light signal to be captured by a photosensor respectively associated with each microlens.

11. A method of forming a microlens array comprising:

coating a lens material onto a substrate;

patterning the lens material to form a pre-reflow lens array;

exposing the pre-reflow lens array to a patterned bleaching treatment, whereby portions of the pre-reflow lens array are bleached more than other portions; and

reflowing the exposed pre-reflow lens array to form an array of microlenses.

12. A method according to claim 11, wherein portions of each lens in the pre-reflow lens array are bleached more than other portions of each lens.

13. A method according to claim 11, wherein the bleaching patterns for each lens in the pre-reflow lens array are substantially identical.

14. A microlens array, comprising:

a first set of microlenses, each first microlens having a first focal characteristic; and

a second set of microlenses, each second microlens having a second focal characteristic;

wherein the first and second focal characteristics differ and are obtained as the result of exposing the first and second set of microlenses differently to bleaching radiation.

15. A microlens array according to claim 14, wherein the first and second focal characteristics are focal length.

16. A microlens array according to claim 15, wherein a focal length of each of the first microlenses corresponds to a first wavelength of light, and wherein a focal length of each of the second microlenses corresponds to a second wavelength of light.

17. A microlens array according to claim 14, wherein the focal length of each of the first microlenses and the focal length of each of the second microlenses are determined based on a color signal response of a photosensor associated respectively with each microlens.

18. A microlens array according to claim 14, further comprising a third set of microlenses, each third microlens having a third focal characteristic.

19. A microlens array according to claim 18, wherein the first, second, and third focal characteristics are focal length, and the focal lengths of the microlenses in each of the first, second and third sets of microlenses are determined based on a color signal response of a photosensor associated with each respective microlens.

20. A microlens array according to claim 14, wherein the first and second focal characteristics comprise focal angle.

21. A microlens array, comprising:

first microlenses having a first shape; and

second microlenses having a second shape different than the first shape,

wherein the first and second microlenses are formed from the same material, a chemical structure of the material used for the first microlenses being altered to control the first shape of the first microlenses.

22. A microlens array according to claim 21, wherein a chemical structure of the material used in the second microlenses has been altered differently than the altered chemical structure in the first microlenses.

23. A microlens array according to claim 22, wherein a focal length of each of the first microlenses corresponds to a first wavelength of light, and a focal length of each of the second microlenses corresponds to a second wavelength of light.

24. A microlens array, comprising:

a first set of microlenses made of a microlens material and each having a first shape; and

a second set of microlenses made of the microlens material and each having a second shape;

wherein a chemical structure of the microlens material is altered in the first set of microlenses.

25. A microlens array according to claim 24, wherein a chemical structure of the microlens material is chemically altered in the second set of microlenses.

26. A microlens array according to claim 25, wherein the first and second set of microlenses exhibit different focal characteristics.

27. A microlens array according to claim 25, wherein the chemical structure of at least one of the first and second set of microlenses is altered in selected portions of each of the respective plurality of microlenses.

28. A microlens array comprising:

a plurality of microlenses made of a microlens material having melting properties, a chemical structure of the microlens material having been altered in a selected patterned portion of each microlens to alter the melting properties of the microlens material in the selected patterned portion.

29. A microlens array according to claim 28, wherein the selected patterned portion is a central part of each microlens.

30. A microlens array according to claim 28, wherein the selected patterned portion is one half of each microlens.

31. A microlens array according to claim 28, wherein the selected patterned portion includes a plurality of regions of each microlens.

32. An imager comprising:

a pixel array having embedded pixel cells, each with a photosensor; and

a microlens array, comprising;

a first set of microlenses, each first microlens made of a microlens material and having a first shape; and

a second set of microlenses, each second microlens made of the microlens material and having a second shape;

wherein the microlens material is structurally modified in the microlens material of the first set of microlenses to determine the first shape.

33. An imager according to claim 32, wherein a melting behavior of the microlens material in the first set of microlenses is modified.

34. An imager according to claim 32, wherein the microlens array further comprises a third set of microlenses, each third microlens made of the microlens material and having a third shape.

35. An imager according to claim 34, wherein focal lengths of each of the pluralities of first, second, and third microlenses are adjusted for a respective color signal.

36. An imager, comprising:

a substrate having pixel cells formed thereon, each with a photosensor; and

a microlens array, comprising;

first microlenses each having a first shape; and

second microlenses each having a second shape different than the first shape;

wherein the first microlenses are adapted to focus light differently than the second microlenses.

37. An imager according to claim 36, wherein the first and the second microlenses each exhibit different focal lengths.

38. An imager according to claim 37, wherein a focal length of the first microlenses is adjusted for a first color signal, and a focal length of the second microlenses is adjusted for a second color signal.

39. An imager according to claim 36, wherein the microlens array further comprises third microlenses each having a third shape.

40. An imager according to claim 39, wherein at least one of the first microlenses is adjacent at least one of the second microlenses and at least one of the third microlenses.

41. An imager, comprising:

a substrate having pixel cells formed thereon, each with a photosensor; and

a microlens array, comprising;

a first set of microlenses, each first microlens having a first focal characteristic; and

a second set of microlenses, each second microlens having a second focal characteristic;

wherein the first and second microlenses are formed from a material, properties of the material having been modified in the first set of microlenses to control the first focal characteristic.

42. An imager according to claim 41, wherein the properties of the material having been modified comprises melting properties.

43. An imager according to claim 41, wherein the first and second focal characteristics are focal length.

44. An imager according to claim 41, wherein the first and the second microlenses each exhibit different focal lengths.

45. An imager according to claim 41, wherein a focal length of the first microlenses is adjusted for a first color signal, and wherein a focal length of the second microlenses is adjusted for a second color signal.

46. An imager according to claim 41, wherein the microlens array further comprises a third set of microlenses, each third microlens having a third focal characteristic.

47. An imager according to claim 46, wherein the first, second, and third focal characteristics comprise focal angle.

48. A camera comprising:

a lens generating a light field; and

an imager comprising;

a substrate having pixel cells formed thereon, each with a photosensor; and

a microlens array comprising;

a central set of microlenses having a first focal angle for collecting light signals in a central portion of the light field; and

a peripheral set of microlenses having a second focal angle different from the first focal angle for collecting light signals in a peripheral portion of the light field.

49. A camera according to claim 48, wherein the central and peripheral sets of microlenses are formed from a material, properties of the material having been modified in the peripheral set of microlenses to control the second focal angle.

50. A system comprising:

a processor;

a lens generating a light field; and

an imager including;

a substrate having pixel cells formed thereon, each with a photosensor; and

a microlens array including;

a central set of microlenses having a first focal angle for collecting light signals in a central portion of the light field; and

a peripheral set of microlenses having a second focal angle different from the first focal angle for collecting light signals in a peripheral portion of the light field.

51. A system according to claim 50, wherein the central and peripheral sets of microlenses are formed from a material, properties of the material having been modified in the peripheral set of microlenses to control the second focal angle.