Narrow width effect improvement with photoresist plug process and STI corner ion implantation

  • US 7,071,515 B2
  • Filed: 07/14/2003
  • Issued: 07/04/2006
  • Est. Priority Date: 07/14/2003
  • Status: Active Grant
First Claim
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1. A NMOS transistor having an improved narrow width Vt roll-off, comprising:

  • a substrate that includes shallow trench isolation (STI) features which are comprised of a shallow trench with sloped sidewalls and a bottom, an oxide liner formed on said shallow trench sidewalls and bottom, and an insulator layer formed on said oxide liner that fills said shallow trench and extends to a level that is above the top of said substrate, wherein a groove is formed at top corners of said shallow trench;

    an active area formed between two adjacent shallow trenches in said substrate, said active area having an indium doped region that is adjacent to the groove;

    a gate dielectric layer formed on said active areas; and

    a patterned gate layer formed on said gate dielectric layer wherein said gate layer extends over said adjacent shallow trenches.

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