Measurement device for non-contact detection of oscillations of an object
First Claim
1. A measurement device for non-contact detection of oscillations of an object, comprising at least one laser interferometer (2, 3), a scanning device (6, 7, 11), which directs a measurement beam (4) of the at least one laser interferometer (2, 3) onto various measurement points (5) of the object (1) for generating a scanning movement, a data recording device (9), which interacts with the laser interferometer (2, 3) and with the scanning device (6, 7, 11) in order to correlate oscillation data measured by the at least one laser interferometer (2, 3) with position data of the respective measurement point (5) obtained from the scanning device (11), and an evaluation or display device (10) for position-matched evaluation or display of the oscillation data correlated with the position data, wherein the scanning device comprises a program-controlled, moving support (6), on which at least one measurement head (3) of the at least one laser interferometer is mounted and with which the at least one measurement head (3) can be moved to the various measurement points (5), wherein the scanning device (6, 11) is programmed so that the at least one measurement head (3) of the laser interferometer moves to the individual measurement points (5) at a preselected distance to the object (1).
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Abstract
A measurement device for oscillation measurement, as well as a corresponding method, is proposed, wherein the oscillation measurement is performed by at least one laser interferometer (2, 3), whose measurement beam is directed onto various measurement points (5) of the object (1) for generating a scanning movement, and the obtained oscillation data is correlated with the position data of the respective measurement point (5) and evaluated or displayed. In particular, for three-dimensional measurements, the invention reduces the measurement complexity because the scanning device is a robot arm, which moves a measurement head of the laser interferometer to the desired measurement points on the object.
13 Citations
11 Claims
- 1. A measurement device for non-contact detection of oscillations of an object, comprising at least one laser interferometer (2, 3), a scanning device (6, 7, 11), which directs a measurement beam (4) of the at least one laser interferometer (2, 3) onto various measurement points (5) of the object (1) for generating a scanning movement, a data recording device (9), which interacts with the laser interferometer (2, 3) and with the scanning device (6, 7, 11) in order to correlate oscillation data measured by the at least one laser interferometer (2, 3) with position data of the respective measurement point (5) obtained from the scanning device (11), and an evaluation or display device (10) for position-matched evaluation or display of the oscillation data correlated with the position data, wherein the scanning device comprises a program-controlled, moving support (6), on which at least one measurement head (3) of the at least one laser interferometer is mounted and with which the at least one measurement head (3) can be moved to the various measurement points (5), wherein the scanning device (6, 11) is programmed so that the at least one measurement head (3) of the laser interferometer moves to the individual measurement points (5) at a preselected distance to the object (1).
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10. A method for non-contact detection of oscillations of an object, comprising the steps of:
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directing at least one measurement beam of at least one laser interferometer onto various measurement points on the object; detecting oscillation data obtained from the at least one laser interferometer and correlating the oscillation data with position data of the measurement points; displaying and/or evaluating the oscillation data correlated with the position data, wherein at least one measurement head of one the at least one laser interferometer is mounted on a program-controlled, moving support, and moving the at least one measurement head to the measurement points using the moving support so that the at least one measurement head is moved to the individual measurement points at a preselected distance to the object. - View Dependent Claims (11)
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Specification