Micro-electromechanical pressure sensor

  • US 7,093,494 B2
  • Filed: 10/18/2004
  • Issued: 08/22/2006
  • Est. Priority Date: 10/18/2004
  • Status: Expired due to Fees
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First Claim
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:

  • a chamber partially defined by a flexible membrane, the chamber containing a fluid at a reference pressure, such that the flexible membrane deflects from any pressure difference between the reference pressure and the fluid pressure, the membrane being at least partially formed from conductive material;

    associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure; and

    a second chamber with a second membrane the second chamber being sealed from the fluid pressure and the second membrane from predetermined pressure difference in the second chamber;

    wherein,the associated circuitry converts the deflection of the second membrane into an adjustment of the output signal to compensate for the temperature of the sensor.

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