Projection optical system, exposure apparatus, and device manufacturing method

• US 7,119,880 B2
• Filed: 08/09/2005
• Issued: 10/10/2006
• Est. Priority Date: 11/08/2002
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Suzuki, Masayuki
• Primary Examiner(s): RUTLEDGE, DELLA J
• Application Number:
  US11/199,137
• Publication Number:
  US 20060017905A1
• Time in Patent Office: 427 Days
• Field of Search: None
• US Class Current: 355/53
• CPC Class Codes: G02B 17/0657 off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
• CPC Class Codes: G03F 7/70233 Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems

Abstract

A projection optical system for performing reduction projection of a pattern of a reticle onto a projection plane. The system includes a first mirror having a concave reflective surface, a second mirror having a reflective surface, a third mirror having a convex reflective surface, a fourth mirror having a concave reflective surface, a fifth mirror having a convex reflective surface, and a sixth mirror having a concave reflective surface. The reflective surface of the fourth mirror has a curvature radius of not less than 400 mm and not more than 800 mm in absolute value. The reflective surface of the sixth mirror has a curvature radius of not less than 400 mm and not more than 600 mm in absolute value, and the reflective surfaces of the first, second, third, fourth, fifth and sixth mirrors have curvatures of not more than 1500 mm in absolute value, respectively.

Claims

1. A projection optical system for performing reduction projection of a pattern of a reticle onto a projection plane, said system comprising:

a first mirror having a concave reflective surface;

a second mirror having a reflective surface;

a third mirror having a convex reflective surface;

a fourth mirror having a concave reflective surface;

a fifth mirror having a convex reflective surface; and

a sixth mirror having a concave reflective surface,

wherein said first, second, third, fourth, fifth and sixth mirrors are disposed in the order named from the reticle,

the reflective surface of said fourth mirror has a curvature radius of not less than 400 mm and not more than 800 mm in absolute value,

the reflective surface of said sixth mirror has a curvature radius of not less than 400 mm and not more than 600 mm in absolute value,

the reflective surfaces of said first, second, third, fourth, fifth and sixth mirrors have a curvature radius of not more than 1500 mm in absolute value, respectively, and

said projection optical system forms an intermediate image of the pattern between said fourth mirror and said fifth mirror.

3. A projection optical system according to claim 1, wherein said first mirror has a conic coefficient k1 that satisfies a relation 50<

k1<

150.

4. A projection optical system according to claim 1, wherein said first mirror has a conic coefficient k1 that satisfies a relation 80<

k1<

130.

5. A projection optical system according to claim 1, wherein said fifth mirror has a conic coefficient k5 that satisfies a relation 5<

k5<

20.

6. A projection optical system according to claim 1, wherein said fifth mirror has a conic coefficient 5 that satisfies a relation 7.5<

k5<

12.

2. A projection optical system for performing reduction projection of a pattern of a reticle onto a projection plane, said system comprising:

a first mirror having a concave reflective surface;

a second mirror having a reflective surface;

a third mirror having a convex reflective surface;

a fourth mirror having a concave reflective surface;

a fifth mirror having a convex reflective surface; and

a sixth mirror having a concave reflective surface,

wherein said first, second, third, fourth, fifth and sixth mirrors are disposed in the order named from the reticle,

the reflective surface of said fourth mirror has a curvature radius of not less than 400 mm and not more than 800 mm in absolute value, and

said projection optical system forms an intermediate image of the pattern between said fourth mirror and said fifth mirror.

7. A projection optical system for performing reduction projection of a pattern of a reticle onto a projection plane, said system comprising:

a first mirror having a concave reflective surface;

a second mirror having a convex reflective surface;

a third mirror having a convex reflective surface;

a fourth mirror having a concave reflective surface;

a fifth mirror having a convex reflective surface; and

a sixth mirror having a concave reflective surface,

wherein said first, second, third, fourth, fifth and sixth mirrors are disposed in the order named from the reticle,

the reflective surface of said sixth mirror has a curvature radius of not less than 400 mm and not more than 600 mm in absolute value, and

said projection optical system forms an intermediate image of the pattern between said fourth mirror and said fifth mirror.

8. An exposure apparatus comprising:

an illumination optical system for illuminating a pattern with light from a light source; and

a projection optical system for projecting the pattern onto a member to be exposed at a reduced magnification;

said projection optical system including;

a first mirror having a concave reflecting surface;

a second mirror having a reflective surface;

a third mirror having a convex reflective surface;

a fourth mirror having a concave reflecting surface;

a fifth mirror having a convex reflective surface; and

a sixth mirror having a concave reflective surface,

wherein said first, second, third, fourth, fifth and sixth mirrors are disposed in the order named from the pattern,

wherein said reflective surface of said fourth mirror has a curvature radius of not less than 400 mm and not more than 800 mm in absolute value,

said reflective value of said sixth mirror has a curvature radius of not less than 400 mm and not more than 600 mm in absolute value,

said reflective surfaces of said first, second, third, fourth, fifth and sixth mirrors have a curvature radius of not more than 1500 mm in absolute value, respectively, and

said projection optical system forms an intermediate image of the pattern between said fourth mirror and said fifth mirror.

9. A device manufacturing method comprising:

a step of exposing a member to be exposed using an exposure apparatus; and

a step of developing the member having been exposed in said exposing step,

wherein the exposure apparatus includes;

an illumination optical system for illuminating a pattern with light from a light source; and

a projection optical system for projecting the pattern onto the member at a reduced magnification,

the projection optical system including;

a first mirror having a concave reflective surface;

a second mirror having a reflective surface;

a third mirror having a convex reflective surface;

a fourth mirror having a concave reflective surface;

a fifth mirror having a convex reflective surface; and

a sixth mirror having a concave reflective surface,

wherein the first, second, third, fourth, fifth and sixth mirrors are disposed in the order named from the pattern,

said reflective surface of said fourth mirror has a curvature radius of not less than 400 mm and not more than 800 mm in absolute value,

the reflective surface of the sixth mirror has a curvature radius of not less than 400 mm and not more than 600 mm in absolute value,

the reflective surfaces of the first, second, third, fourth, fifth and sixth mirrors have a curvature radius of not more than 1500 mm in absolute value, respectively, and

said projection optical system forms an intermediate image of the pattern between said fourth mirror and said fifth mirror.

10. An exposure apparatus comprising:

an illumination optical system for illuminating a pattern with light from a light source; and

a projection optical system for projecting the pattern onto a member to be exposed at a reduced magnification,

said projection optical system including;

a first mirror having a concave reflective surface;

a second mirror having a reflective surface;

a third mirror having a convex reflective surface;

a fourth mirror having a concave reflective surface;

a fifth mirror having a convex reflective surface; and

a sixth mirror having a concave reflective surface,

wherein said first, second, third, fourth, fifth and sixth mirrors are disposed in the order named from the pattern,

said reflective surface of said fourth mirror has a curvature radius of not less than 400 mm and not more than 800 mm in absolute value, and

said projection optical system forms an intermediate image of the pattern between said fourth mirror and said fifth mirror.

11. A device manufacturing method comprising:

a step of exposing a member to be exposed using an exposure apparatus; and

a step of developing the member having been exposed in said exposing step,

the exposure apparatus including;

an illumination optical system for illuminating a pattern with light from a light source; and

a projection optical system for projecting the pattern onto a member to be exposed at a reduced magnification,

the projection optical system including;

a first mirror having a concave reflective surface;

a second mirror having a reflective surface;

a third mirror having a convex reflective surface;

a fourth mirror having a concave reflective surface;

a fifth mirror having a convex reflective surface; and

a sixth mirror having a concave reflective surface,

wherein the first, second, third, fourth, fifth and sixth mirrors are disposed in the order named from the pattern,

the reflective surface of the fourth mirror has a curvature radius of not less than 400 mm and not more than 800 mm in absolute value, and

said projection optical system forms an intermediate image of the pattern between said fourth mirror and said fifth mirror.

12. An exposure apparatus comprising:

an illumination optical system for illuminating a pattern with light from a light source; and

a projection optical system for projecting the pattern onto a member to be exposed at a reduced magnification,

said projection optical system including;

a first mirror having a concave reflective surface;

a second mirror having a reflective surface;

a third mirror having a convex reflective surface;

a fourth mirror having a concave reflective surface;

a fifth mirror having a convex reflective surface; and

a sixth mirror having a concave reflective surface,

wherein said first, second, third, fourth, fifth and sixth mirrors are disposed in the order named from the pattern,

said reflective surface of said sixth mirror has a curvature radius of not less than 400 mm and not more than 600 mm in absolute value, and

said projection optical system forms an intermediate image of the pattern between said fourth mirror and said fifth mirror.

13. A device manufacturing method comprising:

a step of exposing a member to be exposed using an exposure apparatus; and

a step of developing the member having been exposed in said exposing step,

the exposure apparatus including;

an illumination optical system for illuminating a pattern with light from a light source; and

a projection optical system for projecting the pattern onto a member to be exposed at a reduced magnification,

the projection optical system including;

a first mirror having a concave reflective surface;

a second mirror having a reflective surface;

a third mirror having a convex reflective surface;

a fourth mirror having a concave reflective surface;

a fifth mirror having a convex reflective surface; and

a sixth mirror having a concave reflective surface;

wherein the first, second, third, fourth, fifth and sixth mirrors are disposed in the order named from the pattern,

the reflective surface of the sixth mirror has a curvature radius of not less than 400mm and not more than 600mm in absolute value, and

said projection optical system forms an intermediate image of the pattern between said fourth mirror and said fifth mirror.