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Methods for determining optical characteristics using light receivers of first and second numerical apertures and first and second critical heights

  • US 7,119,892 B2
  • Filed: 04/29/2005
  • Issued: 10/10/2006
  • Est. Priority Date: 06/30/1998
  • Status: Expired due to Fees
First Claim
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1. A method comprising the steps of:

  • providing light to an object from one or more light sources, and receiving light from the object through a plurality of light receivers, wherein the plurality of light receivers comprise one or more first light receivers and one or more second light receivers, wherein the one or more first light receivers have a first numerical aperture and the one or more second light receivers have a second numerical aperture different from the first numerical aperture;

    determining the intensity of light received by more than one of the light receivers; and

    measuring the optical characteristics of the object, wherein the measurement produces data indicative of the optical characteristics of the object.

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