Setter, method for manufacturing ceramic substrate, and ceramic substrate

CAFC
  • US 7,125,600 B2
  • Filed: 05/10/2005
  • Issued: 10/24/2006
  • Est. Priority Date: 05/24/2004
  • Status: Expired due to Fees
First Claim
Patent Images

1. A setter having a mount surface on which a ceramic green sheet is to be mounted in baking the ceramic green sheet to form a ceramic substrate,wherein an average particle size is 0.3 μ

  • m–

    2.5 μ

    m, a porcelain density is not less than 6 kg/dm3, a thermal conductivity is not more than 5 W/mK, and an arithmetic average roughness of the mount surface is 1 μ

    m–

    20 μ

    m.

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