Setter, method for manufacturing ceramic substrate, and ceramic substrate

• US 7,125,600 B2
• Filed: 05/10/2005
• Issued: 10/24/2006
• Est. Priority Date: 05/24/2004
• Status: Expired due to Fees

• Current Assignee: TDK Corporation
• Original Assignee: TDK Corporation
• Inventors: Sasaki, Satoshi
• Primary Examiner(s): McNeil, Jennifer C.
• Assistant Examiner(s): Speer, Timothy M.
• Application Number:
  US11/125,261
• Publication Number:
  US 20060014038A1
• Time in Patent Office: 532 Days
• Field of Search: None
• US Class Current: 428/141
• CPC Class Codes: C04B 2235/3206 Magnesium oxides or oxide-forming salts thereof
• CPC Class Codes: C04B 2235/3208 Calcium oxide or oxide-forming salts thereof, e.g. lime
• CPC Class Codes: C04B 2235/3213 Strontium oxides or oxide-forming salts thereof
• CPC Class Codes: C04B 2235/3225 Yttrium oxide or oxide-forming salts thereof
• CPC Class Codes: C04B 2235/3229 Cerium oxides or oxide-forming salts thereof
• CPC Class Codes: C04B 2235/3294 Antimony oxides, antimonates, antimonites or oxide forming salts thereof, indium antimonate
• CPC Class Codes: C04B 2235/6025 Tape casting, e.g. with a doctor blade
• CPC Class Codes: C04B 2235/77 Density
• CPC Class Codes: C04B 2235/785 Submicron sized grains, i.e. from 0,1 to 1 micron
• CPC Class Codes: C04B 2235/786 Micrometer sized grains, i.e. from 1 to 100 micron
• CPC Class Codes: C04B 2235/9607 Thermal properties, e.g. thermal expansion coefficient
• CPC Class Codes: C04B 2235/9623 Ceramic setters properties
• CPC Class Codes: C04B 2235/963 Surface properties, e.g. surface roughness
• CPC Class Codes: C04B 35/486 Fine ceramics
• CPC Class Codes: C04B 35/491 based on lead zirconates and lead titanates , e.g. PZT
• CPC Class Codes: Y10T 428/12451 Macroscopically anomalous interface between layers
• CPC Class Codes: Y10T 428/12458 having composition, density, or hardness gradient
• CPC Class Codes: Y10T 428/24355 Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
• CPC Class Codes: Y10T 428/252 Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]

Abstract

A setter and a method for manufacturing a ceramic substrate are capable of suppressing deformation such as warpage occurring in a ceramic substrate after baking. A ceramic green sheet 4 is mounted and baked on a mount surface of a zirconia setter wherein an average particle size is 0.3 μm, a porcelain density is not less than 6 kg/dm ³, a thermal conductivity is not more than 5 W/mK, and an arithmetic average roughness of the mount surface is 1 μm–20 μm, whereby it is feasible to suppress the deformation such as warpage occurring in a piezoelectric ceramic substrate after baked.

Claims

1. A setter having a mount surface on which a ceramic green sheet is to be mounted in baking the ceramic green sheet to form a ceramic substrate,

wherein an average particle size is 0.3 μ

m–

2.5 μ

m, a porcelain density is not less than 6 kg/dm³, a thermal conductivity is not more than 5 W/mK, and an arithmetic average roughness of the mount surface is 1 μ

m–

20 μ

m.

2. A method for manufacturing a ceramic substrate, the method comprising:

preparing a setter wherein an average particle size is 0.3 μ

m–

2.5 μ

m, a porcelain density is not less than 6 kg/dm³, a thermal conductivity is not more than 5 W/mK, and an arithmetic average roughness of a mount surface is 1 μ

m–

20 μ

m; and

mounting and baking a ceramic green sheet on a mount surface of the setter so as to form the ceramic substrate from the baked green sheet.