Implantable device using ultra-nanocrystalline diamond

• US 7,127,286 B2
• Filed: 10/26/2001
• Issued: 10/24/2006
• Est. Priority Date: 02/28/2001
• Status: Expired due to Term

• Current Assignee: Second Sight Medical Products, Inc.
• Original Assignee: Second Sight Medical Products, Inc.
• Inventors: Greenberg, Robert J., Mech, Brian V.
• Primary Examiner(s): Bockelman, Mark
• Application Number:
  US10/039,842
• Publication Number:
  US 20020120296A1
• Time in Patent Office: 1,824 Days
• Field of Search: 607/1, 607/2, 607/36, 604/891.1, 427/2.1, 427/2.11, 427/2.24, 427/2.12, 600/300, 600/347, 600/365, 600/373
• US Class Current: 607/2
• CPC Class Codes: A61K 9/0009 involving or responsive to electricity, magnetism or acoustic waves; Galenical aspects of sonophoresis, iontophoresis, electroporation or electroosmosis microelectromechanical systems A61K9/0097
• CPC Class Codes: A61N 1/0543 Retinal electrodes
• CPC Class Codes: A61N 1/36046 of the eye
• CPC Class Codes: C23C 16/274 using microwave discharges
• CPC Class Codes: C23C 16/277 using other elements in the gas phase besides carbon and hydrogen; using other elements besides carbon, hydrogen and oxygen in case of use of combustion torches; using other elements besides carbon, hydrogen and inert gas in case of use of plasma jets
• CPC Class Codes: C23C 16/278 doping or introduction of a secondary phase in the diamond
• CPC Class Codes: C23C 16/279 control of diamond crystallography
• CPC Class Codes: H01L 23/29 characterised by the material , e.g. carbon interlayer dielectrics H01L23/5329
• CPC Class Codes: H01L 23/3107 the device being completely enclosed
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

An implantable biocompatible device, that may be either a sensor or stimulator, having electronic circuitry and electrodes formed on a substrate, is uniformly covered with a coating approximately one-micron thick of ultra-nanocrystalline diamond, hermetically sealing the electronic circuitry. Selected electrodes are either left uncovered during coating or uncovered by conventional patterning techniques, allowing the electrodes to be exposed to living tissue and fluids. The ultra-nanocrystalline diamond coating may be doped to create electrically conductive electrodes. These approaches eliminate the need for a hermetically sealed lid or cover to protect hybrid electronic circuitry, and thus allow the device to be thinner than otherwise possible. The conformal ultra-nanocrystalline diamond coating uniformly covers the device, providing relief from sharp edges and producing a strong, uniformly thick hermetic coating around sharp edges and on high aspect-ratio parts.

Claims

1. A biocompatible device which communicates electrical signals with tissue in a living body, comprising:

an integrated circuit, said integrated circuit comprising a semiconductor substrate having at least one surface on which electronic circuitry is formed;

electrodes for contacting the living tissue which are formed on said at least one surface of said semiconductor substrate;

means for electrically connecting said stimulator electrodes with said electronic circuitry formed on said at least one surface of said semiconductor substrate;

an ultra-nanocrystalline diamond coating that covers all areas of said at least one surface of said semiconductor substrate, except for selected portions of said stimulator electrodes; and

means for making electrical connection with and providing operating power to said electronic circuitry formed on said at least one surface of said semiconductor substrate.

2. The biocompatible device according to claim 1 wherein said integrated circuit comprises a sensor.

3. The biocompatible device according to claim 1 wherein said integrated circuit comprises a stimulator.

4. The biocompatible device according to claim 1 wherein said ultra-nanocrystalline diamond coating is approximately constant in thickness over uneven portions of said device to provide a smooth coating with rounded edges.

5. The biocompatible device according to claim 1 wherein said ultra-nanocrystalline diamond coating is patterned by photolithography.

6. The biocompatible device according to claim 1 wherein said ultra-nanocrystalline diamond coating is patterned by selective seeding.

7. The biocompatible device according to claim 1 wherein said ultra-nanocrystalline diamond coating is patterned by oxygen etching.

8. A biocompatible device which communicates electrical signals with tissue in a living body, comprising:

an integrated circuit, said integrated circuit comprising a semiconductor substrate having at least one surface on which electronic circuitry is formed;

electrodes for contacting the living tissue which are formed on said at least one surface of said semiconductor substrate;

means for electrically connecting said stimulator electrodes with said electronic circuitry formed on said at least one surface of said semiconductor substrate;

a diamond coating that covers all areas of said at least one surface of said semiconductor substrate, except for selected portions of said stimulator electrodes; and

means for making electrical connection with and providing operating power to said electronic circuitry formed on said at least one surface of said semiconductor substrate.