Continuous processing of thin-film batteries and like devices
First Claim
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1. A system for making a thin-film device, the system comprising:
- a first substrate-supply station that supplies a substrate having a major surface area, the substrate having a first layer, having a composition different than the substrate, formed on a first surface area of the substrate;
a first deposition station that deposits a second layer onto the first layer, wherein the first deposition station supplies an amount of ion-assist energy to the second layer to aid in crystalline layer formation while controlling a stoichiometry of the crystalline layer without substantially heating the substrate, wherein the first and second layers are part of a battery; and
a deposition station that deposits a photovoltaic cell on the battery.
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Abstract
A system for making a thin-film device includes a substrate-supply station that supplies a substrate having a major surface area. The substrate has a first layer on a first surface area of the substrate'"'"'s major surface area. Also included is a device for depositing a second layer onto the first layer, wherein the device supplies energy to the second layer to aid in layer formation without substantially heating the substrate.
231 Citations
32 Claims
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1. A system for making a thin-film device, the system comprising:
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a first substrate-supply station that supplies a substrate having a major surface area, the substrate having a first layer, having a composition different than the substrate, formed on a first surface area of the substrate; a first deposition station that deposits a second layer onto the first layer, wherein the first deposition station supplies an amount of ion-assist energy to the second layer to aid in crystalline layer formation while controlling a stoichiometry of the crystalline layer without substantially heating the substrate, wherein the first and second layers are part of a battery; and a deposition station that deposits a photovoltaic cell on the battery. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A system for making a thin-film device, the system comprising:
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a substrate-supply station that supplies a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate'"'"'s major surface area; means for depositing a second layer onto the first layer, wherein the means supplies energy to the second layer to aid in crystalline layer formation without substantially heating the substrate, wherein the first and second layers are part of a battery; and a deposition station that deposits a photovoltaic cell on the battery. - View Dependent Claims (15, 16, 17)
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18. A system for making a thin-film device, the system comprising:
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a substrate-supply station that supplies a substrate having a major surface area; a plurality of deposition stations that deposit layers onto the substrate including a first deposition station and a second deposition station, wherein the first and the second deposition stations each supply an amount of ion assist energy to the respective layers to aid in crystalline layer formation while controlling a stoichiometry of the respective crystalline layers without substantially heating the substrate; and a deposition station that deposits a photovoltaic cell on a battery. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A system for making a thin-film device, the system comprising:
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a substrate-supply station that supplies a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate'"'"'s major surface area; means for depositing a second layer onto the first layer while supplying an amount of ion-assist energy to the second layer to aid in crystalline layer formation without substantially heating the substrate, wherein the first and second layers are part of a battery; and a deposition station that deposits a photovoltaic cell on the battery.
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Specification