Interferometric modulators having charge persistence

• US 7,136,213 B2
• Filed: 08/15/2005
• Issued: 11/14/2006
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Chui, Clarence
• Primary Examiner(s): THOMPSON, TIMOTHY J
• Application Number:
  US11/205,268
• Publication Number:
  US 20060066542A1
• Time in Patent Office: 456 Days
• Field of Search: 359/277, 359/276, 359/245, 359/248, 359/290, 359/291, 359/223, 359/224, 385/17, 385/18
• US Class Current: 359/277
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

An iterferometric modulator is formed having a dielectric with charge persistence. The interferometric modulator is addressed by a method making advantageous use of the charge persistence property, wherein the interferometric modulator is pre-charged in such a way that the pre-charging is not observable to a viewer, and the actuation voltage threshold of the imod is significantly lowered. Subsequently the interferometric modulator may be actuated with a significantly lower actuation voltage, thereby saving power.

Claims

1. A microelectromechanical (MEMS) device comprising:

an electrode;

a dielectric layer coupled to the electrode, the dielectric layer comprising at least a substantially trappy surface; and

a movable layer extending over the surface of the dielectric layer so as to form a cavity therebetween, the movable layer being configured to contact the dielectric if an electrical potential between the electrode and at least a portion of the movable layer is greater than an actuation threshold,

wherein when the movable layer contacts the dielectric layer charge is transferred between the movable layer and the dielectric layer to shift the actuation threshold to one of a plurality of functional differentiatable actuation thresholds.

2. The device of claim 1, wherein the dielectric comprises at least one of silicon nitride, silicon dioxide, aluminum oxide, and titanium dioxide.

3. The device of claim 1, wherein the device comprises an interferometric light modulator.

4. The device of claim 3, further configured to be connected to additional interferometric light modulators of an array.

5. The device of claim 4, wherein the array is configured to display an image.

6. The device of claim 1, wherein the dielectric layer is configured to maintain the transferred charge for a period of time exceeding 100 ms after contact between the movable layer and the dielectric layer is broken.

7. A microelectromechanical (MEMS) device comprising;

an electrode;

a dielectric layer coupled to the electrode, the dielectric layer comprising at least a substantially trappy surface; and

a movable layer extending over the dielectric layer so as to form a cavity therebetween, the movable layer being configured to contact the dielectric if an electrical potential between the electrode and at least a portion of the movable layer is greater than the actuation threshold;

means for altering a state of the device, the state being based on an actuation threshold; and

means for shifting the actuation threshold to one of a plurality of functional differentiatable actuation thresholds by actuating the device.

8. The device of claim 7, wherein the dielectric comprises at least one of silicon nitride, silicon dioxide, aluminum oxide, and titanium dioxide.

9. The device of claim 7, wherein the dielectric layer is configured to maintain the transferred charge for a period of time exceeding 100 ms after contact between the movable layer and the dielectric layer is broken.

10. The device of claim 7, wherein the actuation threshold altering means comprises a driving circuit.

11. The device of claim 7, further comprising means for modulating light.

12. The device of claim 11, wherein the modulating means comprises an interferometric cavity.

13. The device of claim 11, further comprising means for connecting the device to additional light modulating means of an array.

14. The device of claim 13, wherein the connecting means comprises row and column electrodes.

15. The device of claim 13, wherein the device is configured to display an image.

16. A method of addressing a microelectromechanical (MEMS) element that includes a movable layer and a dielectric layer comprising at least a substantially trappy surface, the method comprising:

transferring a charge to the dielectric of the MEMS element during a pre-charge period without substantially altering a perceived appearance; and

applying a first electrical potential difference to the MEMS element during a period sufficient to actuate the selected MEMS element and alter the perceived appearance.

17. The method of claim 16, further comprising repeating the act of transferring charge before applying the first electrical potential difference.

18. The method of claim 16, further comprising applying a second electrical potential difference to the MEMS element such that the movable layer contacts the dielectric and substantially removes the transferred charge therefrom.

19. The method of claim 16, wherein:

said first electrical potential difference comprises a first polarity; and

transferring the charge comprises applying a second electrical potential difference of a second polarity that is opposite the first polarity.

20. The method of claim 16, wherein applying the first electrical potential difference comprises applying said first electrical potential difference for at least ten milliseconds.

21. The method of claim 16, wherein:

the steps of said method are repeated multiple times to display a series of image frames; and

the ratio of the display period to the pre-charge period is at least about ten.

22. A method of manufacturing a microelectromechanical (MEMS) device, the method comprising:

forming an electrode;

forming a dielectric layer comprising at least a substantially trappy surface, the dielectric layer being coupled to the electrode; and

forming a movable layer over the dielectric layer so as to establish a cavity therebetween, the movable layer being configured to contact the dielectric if an electrical potential between the electrode and at least a portion of the movable layer is greater than an actuation threshold, and to shift the actuation threshold to one of a plurality of functional differentiatable actuation thresholds as a result of such contact.

23. The method of claim 22, wherein forming the movable layer comprises forming an interferometric cavity.

24. The method of claim 22, wherein forming the dielectric comprises forming the dielectric to comprise at least one of silicon nitride, silicon dioxide, aluminum oxide, and titanium dioxide.

25. The method of claim 22, further comprising configuring the electrode and the movable layer to be connected to additional MEMS devices of an array.

26. The method of claim 25, further comprising configuring the array to display an image.

27. The device of claim 22, further comprising configuring the dielectric layer to maintain the transferred charge for a period of time exceeding 100 ms after contact between the movable layer and the dielectric layer is broken.

28. A MEMS device manufactured by the method of claim 22.

29. A display device configured to display an image based on image data, the display device comprising:

an array of microelectromechanical (MEMS) display elements, each MEMS display element comprising a movable layer and a dielectric layer comprising at least a substantially trappy surface; and

a driving circuit configured to;

receive the image data;

select individual MEMS display elements based on the image data;

apply a first electrical potential difference to the selected individual MEMS display elements to drive the movable layer to contact the dielectric and transfer charge thereto, wherein the image is not displayed; and

apply a second electrical potential difference substantially simultaneously to selected and non-selected individual MEMS display elements of the array to actuate the selected individual MEMS display elements and display the image.

30. The device of claim 29, wherein the driving circuit is further to apply the second electrical potential difference such that the non-selected individual MEMS display elements are not actuated.

31. The device of claim 29, wherein the driving circuit is further configured to repeat the transferring of charge before applying the second electrical potential difference.

32. The device of claim 29, wherein the driving circuit is further configured to apply a third electrical potential difference to each selected MEMS display element so as to drive the movable layer to contact the dielectric and to substantially remove the charge therefrom.

33. The device of claim 29, further comprising:

a processor that is in electrical communication with said array, said processor being configured to process image data; and

a memory device in electrical communication with said processor.

34. The device of claim 33, further comprising:

a first controller configured to send at least one signal to said array; and

a second controller configured to send at least a portion of said image data to said first controller.

35. The device of claim 33, further comprising:

an image source module configured to send said image data to said processor.

36. The device of claim 33, wherein said image source module comprises at least one of a receiver, transceiver, and transmitter.

37. The device of claim 33, further comprising:

an input device configured to receive input data and to communicate said input data to said processor.

38. A display device comprising:

means for receiving image data;

means for selecting one or more of an array of microelectromechanical (MEMS) display elements based at least in part on the image data, wherein each MEMS display element comprises a movable layer and a dielectric layer comprising at least a substantially trappy surface;

means for applying a first electrical potential difference to each selected MEMS display element such that the movable layer contacts the dielectric and transfers charge thereto, wherein the image is not displayed; and

means for applying a second electrical potential difference substantially simultaneously to all display elements of the array to actuate the selected MEMS display elements and display the image.

39. The device of claim 38, wherein the means for receiving, the means for selecting, the means for applying a first electrical potential difference, and the means for applying a second electrical potential difference each comprise a driving circuit.

40. The device of claim 38, further comprising means for applying a third electrical potential difference to each selected MEMS display element so as to drive the movable layer to contact the dielectric and to substantially remove the charge therefrom.

41. The device of claim 40, wherein the means for applying a third electrical potential difference comprises a driving circuit.

42. The device of claim 38, further comprising means for repeating the transferring of charge before applying the second electrical potential difference.

43. The device of claim 42, wherein the means for repeating comprises a driving circuit.

44. The device of claim 38, wherein:

said first electrical potential difference comprises a first polarity;

said second electrical potential difference comprises a second polarity; and

the first polarity is opposite the second polarity.

45. A method of displaying an image on a display comprising an array of microelectromechanical (MEMS) display elements, each MEMS display element comprising a movable layer and a dielectric layer comprising at least a substantially trappy surface, the method comprising:

receiving image data;

selecting individual MEMS display elements based on the received image data;

transferring a charge to the dielectric of each selected MEMS display element during a pre-charge period without substantially altering the perceived appearance; and

applying a first electrical potential difference substantially simultaneously to all MEMS display elements of the array during a display period sufficient to actuate the selected MEMS display elements and to display the image.

46. The method of claim 45, further comprising repeating the transferring of charge before applying the first electrical potential difference.

47. The method of claim 45, further comprising applying a second electrical potential difference to each selected MEMS display element such that the movable layer contacts the dielectric and substantially removes the transferred charge.

48. The method of claim 45, wherein:

said first electrical potential difference comprises a first polarity;

transferring the charge comprises applying a second potential difference of a second polarity; and

the first polarity is opposite the second polarity.

49. The method of claim 45, wherein applying the first electrical potential difference comprises applying said electrical potential difference for at least ten milliseconds.

50. The method of claim 45, wherein:

displaying a series of image frames; and

the ratio of the display period to the pre-charge period is at least about ten.

51. A microelectromechanical (MEMS) device comprising:

forming an electrode;

forming a dielectric layer comprising at least a substantially trappy surface, the dielectric layer being coupled to the electrode;

forming a movable layer over the dielectric layer so as to establish a cavity therebetween, the movable layer being configured to contact the dielectric if an electrical potential between the electrode and at least a portion of the movable layer is greater than an actuation threshold, and to transfer charge to the dielectric layer upon such contact; and

configuring the electrode and the movable layer to be connected to additional MEMS devices of an array;

configuring the dielectric layer to maintain the transferred charge for a period of time exceeding 100 ms after contact between the movable layer and the dielectric layer is broken.

52. The device of claim 51, wherein the array is configured to display an image.

53. A method of manufacturing a microelectromechanical (MEMS) device, the method comprising:

forming an electrode;

forming a dielectric layer comprising at least a substantially trappy surface, the dielectric layer being coupled to the electrode;

forming a movable layer over the dielectric layer so as to establish a cavity therebetween, the movable layer being configured to contact the dielectric if an electrical potential between the electrode and at least a portion of the movable layer is greater than an actuation threshold, and to transfer charge to the dielectric layer upon such contact; and

configuring the electrode and the movable layer to be connected to additional MEMS devices of an array;

configuring the dielectric layer to maintain the transferred charge for a period of time exceeding 100 ms after contact between the movable layer and the dielectric layer is broken.

54. The method of claim 53, further comprising configuring the array to display an image.

55. The device of claim 53, further comprising configuring the dielectric layer to maintain the transferred charge for a period of time exceeding 100 ms after contact between the movable layer and the dielectric layer is broken.