Exposure method and apparatus

• US 7,145,635 B2
• Filed: 12/22/2004
• Issued: 12/05/2006
• Est. Priority Date: 12/26/2003
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Kawashima, Haruna
• Primary Examiner(s): RUTLEDGE, DELLA J
• Application Number:
  US11/017,788
• Publication Number:
  US 20050151942A1
• Time in Patent Office: 713 Days
• Field of Search: None
• US Class Current: 355/53
• CPC Class Codes: G03B 27/52 Details
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/70916 Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps

Abstract

An exposure apparatus includes a projection optical system for projecting a pattern on a mask onto an object to be exposed, a final surface of the projection optical system and a surface of the object immersed in a fluid, and a plane-parallel plate arranged between the projection optical system and the object. The plane-parallel plate includes a first surface and a second surface that serves as a back surface of the first surface and opposes to the object. Both the first and second surfaces are immersed in the fluid and the plane-parallel plate has an antireflection coating that is designed according to an incident light at an angle corresponding to a numerical aperture of the projection optical system.

Claims

1. An exposure apparatus comprising:

a projection optical system for projecting a pattern on a mask onto an object to be exposed, a final surface of said projection optical system and a surface of the object being immersed in a fluid; and

a plane-parallel plate arranged between said projection optical system and the object,

wherein said plane-parallel plate includes a first surface and a second surface that serves as a back surface of the first surface and opposes to the object, both the first and second surfaces being immersed in the fluid, and said plane-parallel plate has an antireflection coating that is designed according to an incident light at an angle corresponding to a numerical aperture of said projection optical system.

2. An exposure apparatus according to claim 1, wherein said projection optical system includes an optical element that is closest to said plane-parallel plate, and a medium that contacts a surface of the optical element at a side opposite to the plane-parallel plate is gas.

3. An exposure apparatus according to claim 1, wherein said projection optical system includes an optical element that is closest to said plane-parallel plate, and the optical element has a plane surface at the side of said plane-parallel plate.

4. An exposure apparatus according to claim 3, wherein an incident angle of light upon the optical element is maintained below the Brewster angle.

5. An exposure apparatus according to claim 3, wherein a distance between the first surface and the optical element is longer than a distance between the second surface and the object.

6. An exposure apparatus according to claim 1, wherein said plane-parallel plate has a quartz substrate.

7. A device manufacturing method comprising the steps of:

exposing an object using an exposure apparatus according to claim 1; and

developing an object that has been exposed.

8. An exposure apparatus comprising:

a projection optical system for projecting a pattern of a mask onto an object to be exposed, a final surface of said projection optical system and a surface of the object being immersed in a fluid; and

a plane-parallel plate arranged between said projection optical system and the object,

wherein said plane-parallel plate includes a first surface and a second surface that serves as a back surface of the first surface and opposes the object, both the first and second surfaces being immersed in the fluid, said projection optical system includes an optical element that is closest to said plane-parallel plate, the optical element has a plane surface at the side of said plane-parallel plate, and an incident angle of light upon the optical element is maintained below a Brewster angle.

9. A device manufacturing method comprising the steps of:

exposing an object using an exposure apparatus according to claim 8; and

developing an object that has been exposed.