Microelectromechanical acceleration-sensing apparatus
First Claim
1. An apparatus for sensing acceleration, comprising:
- (a) a substrate;
(b) a shuttle formed from the substrate and suspended for movement along an axis in response to an applied acceleration component;
(c) a latch for capturing and holding the shuttle when an extent of movement of the shuttle exceeds a threshold value in response to the applied acceleration component; and
(d) an electrical circuit formed, at least in part, from the shuttle for indicating when the shuttle is captured by the latch and thereby indicating the occurrence of the applied acceleration component.
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Accused Products
Abstract
An acceleration-sensing apparatus is disclosed which includes a moveable shuttle (i.e. a suspended mass) and a latch for capturing and holding the shuttle when an acceleration event is sensed above a predetermined threshold level. The acceleration-sensing apparatus provides a switch closure upon sensing the acceleration event and remains latched in place thereafter. Examples of the acceleration-sensing apparatus are provided which are responsive to an acceleration component in a single direction (i.e. a single-sided device) or to two oppositely-directed acceleration components (i.e. a dual-sided device). A two-stage acceleration-sensing apparatus is also disclosed which can sense two acceleration events separated in time. The acceleration-sensing apparatus of the present invention has applications, for example, in an automotive airbag deployment system.
47 Citations
20 Claims
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1. An apparatus for sensing acceleration, comprising:
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(a) a substrate; (b) a shuttle formed from the substrate and suspended for movement along an axis in response to an applied acceleration component; (c) a latch for capturing and holding the shuttle when an extent of movement of the shuttle exceeds a threshold value in response to the applied acceleration component; and (d) an electrical circuit formed, at least in part, from the shuttle for indicating when the shuttle is captured by the latch and thereby indicating the occurrence of the applied acceleration component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An apparatus for sensing a first acceleration event and a second acceleration event separated in time, comprising:
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(a) a first acceleration sensor for sensing the first acceleration event, with the first acceleration sensor further comprising a first suspended mass moveable in response to the first acceleration event and a first latch for capturing the first mass after movement thereof in response to the first acceleration event, with the first mass upon capture by the first latch forming a completed electrical circuit; and (b) a second acceleration sensor for sensing the second acceleration event, with the second acceleration sensor further comprising a second suspended mass moveable in response to the second acceleration event and a second latch for capturing the second mass after movement thereof in response to the second acceleration event, with the second mass upon capture by the second latch forming another completed electrical circuit, and further including a moveable stop located in a path of the second mass for limiting movement of the second mass until after formation of the completed electrical circuit in the first acceleration sensor. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification