Temperature-programmed desorbed gas analyzing apparatus

• US 7,155,960 B2
• Filed: 10/26/2004
• Issued: 01/02/2007
• Est. Priority Date: 10/27/2003
• Status: Expired due to Fees

• Current Assignee: Rigaku Corporation
• Original Assignee: Rigaku Corporation
• Inventors: Takata, Yoshihiro, Arii, Tadashi, Matsuo, Shuichi
• Primary Examiner(s): Williams; Hezron
• Assistant Examiner(s): Rogers; David A.
• Application Number:
  US10/972,327
• Publication Number:
  US 20050086997A1
• Time in Patent Office: 798 Days
• Field of Search: 73/190.2, 73/191.2, 73/232.1, 73/232.2, 73/233.5, 73/233.7, 73/280.1, 73/280.2, 73/280.4, 73/280.5, 73/280.6, 73/310.5, 73/310.7, 250/288, 250/289
• US Class Current: 73/31.05
• CPC Class Codes: H01J 49/049 with means for applying heat to desorb the sample; Evaporation
• CPC Class Codes: H01J 49/24 Vacuum systems, e.g. maintaining desired pressures

Abstract

A temperature-programmed desorbed gas analyzing apparatus including a sample chamber 1 in which a sample S is disposed, an infrared heating furnace 2 for heating the sample S disposed in the sample chamber 1, a measuring chamber 3 in which gas desorbed from the sample S by heating is introduced, a turbo molecular pump 4 for reducing the pressure in the measuring chamber 3, a mass spectrometer 5 having a gas detection portion 5a disposed in the measuring chamber 3, an intermediate pressure-reduced chamber 6 provided between the sample chamber 1 and the measuring chamber 3, a first orifice 7 which the intermediate pressure-reduced chamber 6 and the sample chamber 1 intercommunicate with each other, and a second orifice 8 through which the intermediate pressure-reduced chamber 6 and the measuring chamber 3 intercommunicate with each other, and the desorbed gas occurring in the sample chamber 1 is introduced through the first orifice 7, the intermediate pressure-reduced chamber 6 and the second orifice 8 into the measuring chamber 3. The pressure in the intermediate pressure-reduced chamber 6 or the measuring chamber 3 is controlled by pressure adjusting unit so as to be fixed.

Claims

1. A temperature-programmed desorbed gas analyzing apparatus comprising:

a sample chamber in which a sample is disposed;

a heating unit for heating the sample disposed in the sample chamber;

a measuring chamber in which gas desorbed from the sample by heating is introduced;

a pressure-reducing unit for reducing the pressure in the measuring chamber;

a mass spectrometer having a gas detector disposed in the measuring chamber;

an intermediate pressure-reduced chamber provided between the sample chamber and the measuring chamber;

a first orifice through which the intermediate pressure-reduced chamber and the sample chamber intercommunicate with each other;

a second orifice through which the intermediate pressure-reduced chamber and the measuring chamber intercommunicate with each other, desorbed gas occurring in the sample chamber being introduced through the first orifice, the intermediate pressure-reduced chamber and the second orifice into the measuring chamber; and

a pressure adjusting unit for controlling the pressure of the intermediate pressure-reduced chamber so that the pressure of the measuring chamber is fixed.

2. The temperature-programmed desorbed gas analyzing apparatus according to claim 1, wherein the pressure adjusting unit comprises a pressure detecting unit for detecting the pressure in measuring chamber, a gas exhaust unit for exhausting gas in the intermediate pressure-reduced chamber by suction, and a control unit for controlling the gas exhaust unit on the basis of the value of the pressure in the measuring chamber which is detected by the pressure detecting unit so that the pressure in the intermediate pressure-reduced chamber is fixed.

3. The temperature-programmed desorbed gas analyzing apparatus according to claim 2, wherein the gas exhaust unit comprises a vacuum pump, a gas exhaust passage through which the vacuum pump intercommunicates with the intermediate pressure-reduced chamber, and a gas supply unit for supplying gas such as air, inert gas or the like into the gas exhaust passage, wherein the control unit controls the gas supply amount to the gas exhaust passage by the gas supply unit.

4. The temperature-programmed desorbed gas analyzing apparatus according to claim 3, wherein an adjusting valve for adjusting the gas suction amount of the vacuum pump is provided to the gas exhaust passage, and the gas supply unit supplies gas to the upstream side of the adjusting valve in the gas exhaust passage.