Processing a workpiece using water, a base, and ozone

  • US 7,163,588 B2
  • Filed: 12/06/2004
  • Issued: 01/16/2007
  • Est. Priority Date: 05/09/1997
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method for cleaning at least one workpiece, comprising:

  • placing the workpiece into a chamber;

    spraying a liquid onto the workpiece, with the liquid including water and ammonium hydroxide, and with the liquid forming a liquid layer on the workpiece;

    controlling the thickness of the liquid layer by one or more of rotating the workpiece, adding a surfactant, or controlling the flow rate of the liquid; and

    providing ozone in the chamber, with at least some of the ozone diffusing through the liquid layer and chemically reacting with a contaminant on the workpiece, to clean the workpiece.

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