Multi-stage type processing apparatus

• US 7,166,184 B2
• Filed: 02/16/2004
• Issued: 01/23/2007
• Est. Priority Date: 02/20/2003
• Status: Expired due to Fees

• Current Assignee: Tokyo OHKA Kogyo Company Limited
• Original Assignee: Tokyo OHKA Kogyo Company Limited
• Inventors: Nakamura, Akihiko, Sasaki, Tamotsu, Ohishi, Seiji, Aoki, Taiichiro
• Primary Examiner(s): Kackar; Ram
• Assistant Examiner(s): MACARTHUR, SYLVIA
• Application Number:
  US10/778,947
• Publication Number:
  US 20040179173A1
• Time in Patent Office: 1,072 Days
• Field of Search: 134/113, 134/1.3, 134/85, 134/87, 134/121, 134/902, 134/153, 134/157, 134/114, 118/719, 118/730, 156/345.22, 156/345.55, 355/27
• US Class Current: 156/345.22
• CPC Class Codes: G03F 7/3021 from a wafer supported on a rotating chuck
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

A multi-stage type processing apparatus which can be positioned in a limited space without having a complicated driving mechanism, includes processing units which are stacked in a multi-stage state in the vertical direction. Each processing unit has a cup surrounding a substrate and a chuck for retaining and rotating a substrate, and the cup can be elevated and lowered with respect to the chuck. A cylinder unit is contracted and thereby all the cups are unitarily lowered, so that the top surface of the chuck is located in a slightly upper position with respect to the top surface of the cup. In this state, a substrate is mounted on the chuck and attracted. Next, the cylinder unit is extended and thereby all the cups are unitarily elevated so as to accommodate the substrate therein. In this state, developing liquid is dropped from a nozzle for developing liquid onto the center of the substrate, and a motor is driven to rotate the chuck (the substrate) via a drive shaft and a timing belt to allow the developing liquid to cover the entire surface of the substrate.

Claims

1. A multi-stage type processing apparatus comprising:

a plurality of processing units which are provided apart from each other in the vertical direction, each unit having a cup surrounding a substrate and a chuck for retaining and rotating a substrate,

wherein the cups and the chucks are separated, all the cups being supported by an elevator member so as to be elevated and lowered unitarily and all the chucks being supported by a fixing member,

the fixing member comprising a hollow vertical support post and plural hollow arms extending from the support post to each chuck,

and rotation drive force is distributed from a common drive shaft which is positioned within the support post and oriented in the vertical direction.

2. The multi-stage type processing apparatus according to claim 1, wherein one of an ejection nozzle for developing liquid and an ejection nozzle for rinse liquid is provided on said elevator member with respect to each processing unit, and the other is provided on said fixing member with respect to each processing unit.

3. The multi-stage type processing apparatus according to claim 1, wherein a plurality of multi-stage type processing apparatuses are disposed in a group, an arm rotated with respect to the horizontal plane is provided in a center of the group of apparatuses, an ejection nozzle for developing liquid or an ejection nozzle for rinse liquid is attached to the arm, and the ejection nozzle for developing liquid or the ejection nozzle for rinse liquid can move back and forward with respect to an upper portion of the processing units in one of the multi-stage processing apparatuses by rotation of the arm.

4. The multi-stage type processing apparatus according to any one of claims 1–

3, wherein waste solution pipes, each of which connects to each cup, are supported to be elevated and lowered unitarily by said elevator member.

5. The multi-stage type processing apparatus according to claim 4, wherein said waste solution pipes are joined into one pipe and connected to a gas-liquid separator.

6. A multi-stage type processing apparatus comprising:

a plurality of processing units which are provided apart from each other in the vertical direction, each unit having a cup surrounding a substrate and a chuck for retaining and rotating a substrate,

wherein the cups and the chucks are separated, all the cups being supported by an elevator member so as to be elevated and lowered unitarily and all the chucks being supported by a fixing member, and rotation drive force is distributed from a common drive shaft which is positioned in the vertical direction, wherein said drive shaft is divided into plural sections with respect to each processing unit, and each of the divided shaft sections are jointed by a universal joint.

7. The multi-stage type processing apparatus according to claim 6, wherein a timing belt is provided between each chuck and each drive shaft, and drive force is transmitted by using the timing belt.

8. The multi-stage type processing apparatus according to claim 6, wherein one of an ejection nozzle for developing liquid and an ejection nozzle for rinse liquid is provided on said elevator member with respect to each processing unit, and the other is provided on said fixing member with respect to each processing unit.

9. The multi-stage type processing apparatus according to claim 6, wherein a plurality of multi-stage type processing apparatuses are disposed in a group, an arm rotated with respect to the horizontal plane is provided in a center of the group of apparatuses, an ejection nozzle for developing liquid or an ejection nozzle for rinse liquid is attached to the arm, and the ejection nozzle for developing liquid or the ejection nozzle for rinse liquid can move back and forward with respect to an upper portion of the processing units in one of the multi-stage processing apparatuses by rotation of the arm.