Resonant waveguide-grating filters and sensors and methods for making and using same

• US 7,167,615 B1
• Filed: 11/06/2000
• Issued: 01/23/2007
• Est. Priority Date: 11/05/1999
• Status: Expired due to Term

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Magnusson, Robert, Wawro, Debra D., Tibuleac, Sorin
• Primary Examiner(s): Glick; Edward J.
• Assistant Examiner(s): KAO, CHIH CHENG G
• Application Number:
  US09/707,435
• Time in Patent Office: 2,269 Days
• Field of Search: 385/37, 385/38, 385/12
• US Class Current: 385/37
• CPC Class Codes: G01N 2021/7776 Index
• CPC Class Codes: G01N 21/648 using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
• CPC Class Codes: G01N 21/7743 the reagent-coated grating coupling light in or out of the waveguide
• CPC Class Codes: G02B 2006/12107 Grating
• CPC Class Codes: G02B 6/02061 Grating external to the fibre and in contact with the fibre, e.g. evanescently coupled, gratings applied to the fibre end mechanically induced in the fibre G02B6/02071, surface relief on the fibre G02B6/02066
• CPC Class Codes: G02B 6/29317 Light guides of the optical fibre type
• CPC Class Codes: G02B 6/34 utilising prism or grating G02B6/293 takes precedence

Abstract

Waveguide grating devices. One includes at least one waveguide having an end, the end having an endface; and a waveguide grating fabricated on the endface, the waveguide grating having at least one waveguide layer and at least one grating layer. The waveguide layer is a separate waveguide from the waveguide on which the waveguide grating is fabricated. Systems for spectral filtering. One, which utilizes a guided-mode resonance effect in a waveguide, includes at least one waveguide having a proximal end and a distal end having an endface; and a waveguide grating fabricated on the end of the waveguide and having a plurality of variable parameters such as permittivity of the grating layer(s) and permittivity of the waveguide layer(s). Methods of forming waveguide grating devices, and methods of detecting one or more parameters of a medium using a waveguide grating device are also disclosed.

Claims

1. A waveguide grating device, comprising:

at least one fiber having an end, the end having an endface; and

a guided-mode resonance waveguide grating fabricated on the endface of the at least one fiber, the guided-mode resonance waveguide grating having at least one waveguide layer and at least one grating layer.

2. The device of claim 1, wherein the at least one grating layer comprises a dielectric material.

3. The device of claim 1, wherein the at least one grating layer comprises a polymer.

4. The device of claim 1, wherein the at least one waveguide layer comprises a dielectric material.

5. The device of claim 1, wherein the at least one waveguide layer comprises a polymer.

6. The device of claim 1, wherein the at least one grating layer and the at least one waveguide layer comprise the same layer.

7. The device of claim 1, wherein the at least one grating layer and the at least one waveguide layer comprise different layers in contact with each other.

8. The device of claim 7, wherein the guided-mode resonance waveguide grating further comprises at least a third layer in contact with the at least one waveguide layer, the at least one grating layer, or both the at least one waveguide layer and the at least one grating layer.

9. The device of claim 8, wherein the at least third layer comprises a dielectric material.

10. The device of claim 8, wherein the at least third layer comprises a metal.

11. The device of claim 7, wherein the guided-mode resonance waveguide grating further comprises a third layer in contact with the at least one grating layer.

12. A system comprising:

a waveguide grating device, comprising;

at least one fiber having a proximal end and a distal end having an endface; and

a guided-mode resonance waveguide grating fabricated on the endface of the at least one fiber, the guided-mode resonance waveguide grating having at least one waveguide layer and at least one grating layer, the waveguide grating also having a plurality of parameters including at least one permittivity of the at least one grating layer, permittivity of the at least one waveguide layer, periodic structure of the at least one grating layer, grating fill factor of the at least one grating layer, thickness of the at least one waveguide layer, and thickness of the at least one grating layer.

13. The system of claim 12, further comprising:

a source coupled to the proximal end of the at least one fiber for propagating a signal therethrough;

wherein after the signal is propagated, it contacts the guided-mode resonance waveguide grating and is reflected from the waveguide grating in whole or in part, or transmitted through the waveguide grating in whole in or in part, depending at least partially upon the plurality of variable parameters.

14. The system of claim 13, wherein the source is a laser.

15. The system of claim 13, wherein the source is a continuous wave source.

16. The system of claim 12, further comprising a photodetector operationally coupled to the at least one fiber.

17. The system of claim 16, wherein the photodetector comprises silicon.

18. The system of claim 12, wherein the at least one grating layer comprises a dielectric material.

19. The system of claim 12, wherein the at least one grating layer comprises a polymer.

20. The system of claim 12, wherein the at least one waveguide layer comprises a dielectric material.

21. The system of claim 12, wherein the at least one waveguide layer comprises a polymer.

22. The system of claim 12, wherein the at least one grating layer and the at least one waveguide layer comprise the same layer.

23. The system of claim 12, wherein the at least one grating layer and the at least one waveguide layer comprise different layers in contact with each other.

24. The system of claim 23, wherein the guided-mode resonance waveguide grating further comprises a third layer in contact with the at least one waveguide layer.

25. The system of claim 23, wherein the guided-mode resonance waveguide grating further comprises a third layer in contact with the at least one grating layer.

26. The system of claim 12, wherein the guided-mode resonance waveguide grating is configured for use as a biosensor.

27. The system of claim 12, wherein the guided-mode resonance waveguide grating is configured for use as an electrochemical sensor.

28. The system of claim 12, wherein the guided-mode resonance waveguide grating is configured for use as an optical sensor.

29. The system of claim 12, wherein the permittivity of the at least one waveguide layer and one of the permittivities of the at least one permittivity of the at least one grating layer are the same.

30. The system of claim 12, wherein the permittivity of the at least one waveguide layer and one of the permittivities of the at least one permittivity of the at least one grating layer are different.

31. A method of forming a waveguide grating device, comprising:

providing at least one fiber having an end, the end having an endface;

fabricating a guided-mode resonance waveguide grating on the endface of the fiber to form the waveguide grating device, the guided-mode resonance waveguide grating including at least one waveguide layer and at least one grating layer.

32. The method of claim 31, further comprising cleaving the end to form the endface of the at least one fiber.

33. The method of claim 31, wherein the at least one waveguide layer comprises polymer.

34. The method of claim 33, wherein the fabricating comprises dipping the endface of the at least one fiber into a polymer.

35. The method of claim 34, further comprising patterning the at least one waveguide layer.

36. The method of claim 35, wherein the patterning comprises holographic interferometry.

37. The method of claim 35, wherein the patterning comprises photolithography.

38. The method of claim 33, wherein the fabricating comprises spin coating the endface of the at least one fiber with a polymer.

39. The method of claim 31, wherein the at least one grating layer comprises dielectric material.

40. The method of claim 39, further comprising etching the at least one grating layer.

41. The method of claim 31, wherein the at least one waveguide layer is adjacent the at least one grating layer, and the fabricating comprises depositing the at least one waveguide layer on the endface of the at least one fiber by sputtering and coating the at least one waveguide layer with the at least one grating layer.

42. The method of claim 31, wherein the fabricating comprises depositing the at least one waveguide layer on the endface of the at least one fiber by thermal evaporation.

43. The method of claim 31, wherein the fabricating comprises depositing the at least one waveguide layer on the endface of the at least one fiber by electron-beam evaporation.

44. The method of claim 31, wherein the fabricating comprises depositing the at least one waveguide layer on the endface of the at least one fiber by liquid phase epitaxy.