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X-ray tomography and laminography

  • US 7,177,389 B2
  • Filed: 01/07/2005
  • Issued: 02/13/2007
  • Est. Priority Date: 01/09/2004
  • Status: Expired due to Fees
First Claim
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1. A device for tomographically imaging an object comprising:

  • a compound refractive lens for x-rays having a focal length f and an aperture;

    an x-ray source, selected from the group consisting of an x-ray tube and a plasma x-ray source, which is oriented to direct x rays toward said compound refractive lens;

    an x-ray detector located at a distance i from said compound refractive lens and positioned to receive x rays from said compound refractive lens, said x-ray detector further comprising an output which emits data signals corresponding to the x-ray intensity pattern striking the detector;

    wherein the object is located at a distance o from said compound refractive lens and is illuminated by x-rays from said x-ray source that are directed toward said compound refractive lens; and

    wherein 1 f = 1 o + 1 i ;

    wherein the depth of field of the refractive lens is greater than or equal to the thickness of the volume of the object to be imaged; and

    wherein the x-rays emitted from the source are collimated to eliminate x-rays that do not pass through both the object and the refractive lens while maintaining sufficient divergence to fill 20% or more of the aperture of the refractive lens;

    a device that moves the object and an imaging train consisting of the x-ray source, refractive x-ray lens and detector relative to each other so that the object is imaged over a range of angles around an axis through the object perpendicular to the optical axis defined by the centers of the source, lens and detector;

    an image memory that combines said detector data signals from a range of positions to form an image database that contains information sufficient to form a cross-sectional image of a cutting plane of the object.

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