Probe station having multiple enclosures
First Claim
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1. A probe station for probing a test device, said probe station comprising:
- (a) a chuck for supporting said test device;
(b) a plurality of electrically conductive members, each electrically isolated from, and at least partially enclosing said chuck; and
(c) a selector member capable of alternately;
(i) electrically isolating said electrically conductive members from each other; and
(ii) electrically interconnecting one said conductive member with at least one other said conductive member.
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Abstract
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.
470 Citations
3 Claims
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1. A probe station for probing a test device, said probe station comprising:
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(a) a chuck for supporting said test device; (b) a plurality of electrically conductive members, each electrically isolated from, and at least partially enclosing said chuck; and (c) a selector member capable of alternately; (i) electrically isolating said electrically conductive members from each other; and (ii) electrically interconnecting one said conductive member with at least one other said conductive member. - View Dependent Claims (2, 3)
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Specification