Method of manufacturing semiconductor device and display device

• US 7,192,859 B2
• Filed: 05/13/2004
• Issued: 03/20/2007
• Est. Priority Date: 05/16/2003
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamaguchi, Tetsuji, Takayama, Toru, Yamazaki, Shunpei
• Primary Examiner(s): SARKAR, ASOK K
• Application Number:
  US10/845,422
• Publication Number:
  US 20050026410A1
• Time in Patent Office: 1,041 Days
• Field of Search: 257/E21.507, 257/E21.588, 257/E21.627, 257/E21.641, 438/597
• US Class Current: 438/597
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer
• CPC Class Codes: G02F 1/136286 Wiring, e.g. gate line, drain line
• CPC Class Codes: G02F 1/136295 Materials; Compositions; Manufacture processes
• CPC Class Codes: H01L 27/1285 using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
• CPC Class Codes: H01L 27/1292 using liquid deposition, e.g. printing

Abstract

To provide a method of forming a wiring for the purpose of providing a semiconductor device, which is superior in reliability and cost performance. Further, to provide methods of manufacturing a semiconductor device and a display device by using the method of forming the wiring according to the present invention. According to the present invention, when a wiring material and the like is directly patterned on a substrate mainly having an insulating surface by droplet discharging method, a wiring is formed at a position including at least an opening in contact with an underlying portion on an insulating film provided with the opening by dropping a liquid droplet containing a conductive composition by droplet discharging method. By heating the substrate with the wiring formed thereon, a surface of the wiring on the opening and a surface of the wiring other than the wiring on the opening are approximately leveled, and the opening is filled.

Claims

1. A method of manufacturing a semiconductor device comprising steps of:

forming an insulating film over a substrate;

forming an opening in the insulating film;

dropping a liquid droplet containing a conductive composition by droplet discharging method over the substrate, thereby a wiring is formed on a position including at least the opening; and

performing a heat treatment at a temperature of not less than the softening point of the conductive composition, thereby a surface of the wiring on the opening and a surface of the wiring other than the wiring on the opening are approximately leveled over the substrate.

2. A method according to claim 1, further comprising steps of:

after the heat treatment, forming a mask on the wiring; and

etching the wiring by using the mask.

3. A method according to claim 2, wherein the mask is formed by droplet discharging method.

4. A method according to claim 1, further comprising a step of:

forming a partition wall over the substrate prior to dropping the liquid droplet, thereby the wiring formed by droplet discharging method is formed inside of the partition wall.

5. A method according to claim 4, wherein the partition wall is manufactured by droplet discharging method.

6. A method according to claim 1, wherein the droplet discharging method is carried our under reduced pressure.

7. A method according to claim 1, wherein the heat treatment is performed by using a lamp.

8. A method according to claim 1, wherein the heat treatment is performed by irradiating laser beam.

9. A method according to claim 1, wherein the conductive composition is formed by dispersing a material containing a plurality of nanometal particles in a solvent.

10. A method according to claim 1, wherein the semiconductor device is a display device.

11. A method of manufacturing a semiconductor device comprising steps of:

forming an insulating film over a substrate;

forming an opening in the insulating film;

dropping a liquid droplet containing a conductive composition by droplet discharging method over the substrate, thereby a wiring is formed on a position including at least the opening; and

performing a heat treatment at a temperature of not less than the softening point of the conductive composition, thereby the opening is filled with the wiring.

12. A method according to claim 11, further comprising steps of:

after the heat treatment, forming a mask on the wiring; and

etching the wiring by using the mask.

13. A method according to claim 12, wherein the mask is formed by droplet discharging method.

14. A method according to claim 11, further comprising a step of:

forming a partition wall over the substrate prior to dropping the liquid droplet, thereby the wiring formed by droplet discharging method is formed inside of the partition wall.

15. A method according to claim 14, wherein the partition wall is manufactured by droplet discharging method.

16. A method according to claim 11, wherein the droplet discharging method is carried our under reduced pressure.

17. A method according to claim 11, wherein the heat treatment is performed by using a lamp.

18. A method according to claim 11, wherein the heat treatment is performed by irradiating laser beam.

19. A method according to claim 11, wherein the conductive composition is formed by dispersing a material containing a plurality of nanometal particles in a solvent.

20. A method according to claim 11, wherein the semiconductor device is a display device.

21. A method of manufacturing a semiconductor device comprising steps of:

forming an insulating film over a substrate;

forming an opening in the insulating film;

dropping a liquid droplet containing a conductive composition by droplet discharging method over the substrate, thereby a wiring is formed on a position including at least the opening; and

performing a heat treatment at a temperature of not less than the softening point of the conductive composition, thereby a surface of the wiring on the opening and a surface of the wiring other than the wiring on the opening are approximately leveled over the substrate and the opening is filled with the wiring.

22. A method according to claim 21, further comprising steps of:

after the heat treatment, forming a mask on the wiring; and

etching the wiring by using the mask.

23. A method according to claim 22, wherein the mask is formed by droplet discharging method.

24. A method according to claim 21, further comprising a step of

forming a partition wall over the substrate prior to dropping the liquid droplet, thereby the wiring formed by droplet discharging method is formed inside of the partition wall.

25. A method according to claim 24, wherein the partition wall is manufactured by droplet discharging method.

26. A method according to claim 21, wherein the droplet discharging method is carried our under reduced pressure.

27. A method according to claim 21, wherein the heat treatment is performed by using a lamp.

28. A method according to claim 21, wherein the heat treatment is performed by irradiating laser beam.

29. A method according to claim 21, wherein the conductive composition is formed by dispersing a material containing a plurality of nanometal particles in a solvent.

30. A method according to claim 21, wherein the semiconductor device is a display device.

31. A method of manufacturing a semiconductor device comprising steps of:

forming a thin film transistor over a substrate;

forming an insulating film over the thin film transistor;

forming an opening in the insulating film;

dropping a liquid droplet containing a conductive composition by droplet discharging method over the substrate, thereby a wiring is formed on a position including at least the opening and connected to the thin film transistor;

performing a heat treatment at a temperature of not less than the softening point of the conductive composition; and

forming a pixel electrode over the insulating film and the wiring, the pixel electrode connected to the wiring.

32. A method according to claim 31, wherein the pixel electrode is formed by droplet discharging method.

33. A method according to claim 31, further comprising steps of:

after the heat treatment, forming a mask on the wiring; and

etching the wiring by using the mask.

34. A method according to claim 33, wherein the mask is formed by droplet discharging method.

35. A method according to claim 31, further comprising a step of:

forming a partition wall over the substrate prior to dropping the liquid droplet, thereby the wiring formed by droplet discharging method is formed inside of the partition wall.

36. The method according to claim 35, wherein the partition wall is manufactured by droplet discharging method.

37. A method according to claim 31, wherein the droplet discharging method is carried our under reduced pressure.

38. A method according to claim 31, wherein the heat treatment is performed by using a lamp.

39. A method according to claim 31, wherein the heat treatment is performed by irradiating laser beam.

40. A method according to claim 31, wherein the conductive composition is formed by dispersing a material containing a plurality of nanometal particles in a solvent.

41. A method according to claim 31, wherein after the heat treatment, a surface of the wiring on the opening and a surface of the wiring other than the wiring on the opening are approximately leveled over the substrate and the opening is filled with the wiring.

42. A method according to claim 31, wherein the semiconductor device is a display device.