Pressure sensor with apertured membrane guard

  • US 7,194,901 B2
  • Filed: 10/18/2004
  • Issued: 03/27/2007
  • Est. Priority Date: 10/18/2004
  • Status: Expired due to Fees
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First Claim
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:

  • a wafer substrate with a recess;

    a flexible membrane covering the recess to define a chamber containing a fluid at a reference pressure, such that the flexible membrane deflects due to pressure differentials between the reference pressure and the fluid pressure;

    associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure; and

    ,an apertured guard formed over the membrane, the apertured guard having an array of apertures directly opposing the flexible membrane and distributed evenly across the area of the guard opposing the flexible membrane, the apertures sized to allow sacrificial material between the membrane and the guard to be removed by plasma cleaning.

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