Semiconductor integrated circuit device

  • US 7,199,432 B2
  • Filed: 08/26/2004
  • Issued: 04/03/2007
  • Est. Priority Date: 03/31/1997
  • Status: Expired due to Term
First Claim
Patent Images

1. A semiconductor integrated circuit device comprising:

  • trenches formed in a semiconductor substrate and defining active regions and dummy regions not functioning as an element;

    element isolation insulating films filled in said trenches;

    dummy interconnections formed over said substrate not functioning as an element,wherein said dummy regions are regularly arranged at a scribing area and at a pad region, respectively,wherein said dummy interconnections are regularly arranged at said scribing area and at said pad region, respectively.

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