Alignment stage apparatus
First Claim
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1. A stage apparatus comprising:
- a base structure having a guiding surface;
a movable stage which can move along the guiding surface;
a plurality of coils provided along the guiding surface of the base structure;
a power reception coil provided to said movable stage;
a plurality of switches each provided for a corresponding coil of said plurality of coils and configured to switch the corresponding coil so that the corresponding coil is selectively used for transmitting power to said power reception coil or driving said movable stage; and
a controller configured to control said plurality of switches based on a position of said movable stage.
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Abstract
An alignment stage apparatus includes a base structure and a movable stage which can move along a surface of the base structure so as not to be in contact with the base structure. The apparatus includes a plurality of power transmission coils buried under the surface of the base structure, a power reception coil attached to the movable stage to oppose the surface, a switching device for sequentially switching, of the plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of the movable stage, and a power feeding device for supplying AC power to the power transmission coils to be energized through the switching device.
50 Citations
7 Claims
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1. A stage apparatus comprising:
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a base structure having a guiding surface; a movable stage which can move along the guiding surface; a plurality of coils provided along the guiding surface of the base structure; a power reception coil provided to said movable stage; a plurality of switches each provided for a corresponding coil of said plurality of coils and configured to switch the corresponding coil so that the corresponding coil is selectively used for transmitting power to said power reception coil or driving said movable stage; and a controller configured to control said plurality of switches based on a position of said movable stage. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification