Inductor for radio frequency integrated circuit
First Claim
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1. An inductor, comprising:
- a plurality of unit inductors, a vertical cross-section of at least one unit inductor of the plurality of unit inductors having a width that increases from a bottom surface of the at least one unit inductor to a top surface of the at least one unit inductor, the at least one unit inductor including a top metal layer extending across the width at the top surface; and
means for connecting a unit inductor to an adjacent unit inductor in the plurality of unit inductors in a direction perpendicular to the top metal layer, wherein the means includes metal layers extended from the unit inductors adjacent to the means and a conductive plug for connecting the extended metal layers.
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Abstract
An inductor used in a radio frequency integrated circuit is disclosed. The inductor includes a plurality of unit inductors each having a vertical spiral structure, wherein a vertical cross-section of at least one unit inductor selected from the plurality of unit inductors is an inverted trapezoid.
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23 Claims
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1. An inductor, comprising:
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a plurality of unit inductors, a vertical cross-section of at least one unit inductor of the plurality of unit inductors having a width that increases from a bottom surface of the at least one unit inductor to a top surface of the at least one unit inductor, the at least one unit inductor including a top metal layer extending across the width at the top surface; and means for connecting a unit inductor to an adjacent unit inductor in the plurality of unit inductors in a direction perpendicular to the top metal layer, wherein the means includes metal layers extended from the unit inductors adjacent to the means and a conductive plug for connecting the extended metal layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification